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(Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 4 No.EX##-OMY0006CN 1. / 1 1.5 *3) *3)1 1 5 No.EX##-OMY0006CN () () () () 6 No.EX##-OMY0006CN / () * * IP67 7 No.EX##-OMY0006CN *() SI SI () ()SI SI * IP67 (1) (2) (3) SI ( ) SI ()SI CE 8 No.EX##-OMY0006CN * IO IO

B LVM1 (Rocker type) 3 port Universal LVM115 PAT.PEND A Dead volume B Body and plate material: PEEK C Diaphragm material: EPDM, FKM or Kalrez Bracket (Optional) Features 2 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 How to Order Series Number of ports Symbol Valve type Connection Wetted part material 11 N.C.

Switch 100 kPa 0 100 kPa 500 kPa 1 MPa Pressure range 100 kPa 100 kPa For vacuum/ low pressure ZSE30 101 kPa 101 kPa 1 MPa 0 For positive pressure ISE30 100 kPa (0.1 MPa) 1 MPa Rated pressure range of switch Regulating pressure range of switch 16-2-14

B LVM1 (Rocker type) 3 port Universal LVM115 PAT.PEND A Dead volume B Body and plate material: PEEK C Diaphragm material: EPDM, FKM or Kalrez Bracket (Optional) Features 2 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 How to Order Series Number of ports Symbol Valve type Connection Wetted part material 11 N.C.

JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: 2) : : : 1. 2. 3. 1. 2. 3. 4.

b view 4 6 2 a 5 a 5 5 Component Parts No.

0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-04 {Rc1/2} FGH200-04 {Rc1/2} FGH300-04 {Rc1/2} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-06

Option Part no. 1 Bracket A ZS-24-A With 2 pcs. of mounting screws 1 Bracket D ZS-24-D With 2 pcs. of mounting screws 1 Panel mount ZS-24-E 1 ZS-24-F Panel mount + Front protection cover 16-2-28 5 Series ZSE50F/ISE50 High Precision, Digital Pressure Switch for General Fluids Specifications ZSE50F (Compound pressure) 100 to 100 kPa 100 to 100 kPa 500 kPa 0.1 0.001 0.001 0.02 1 0.1 ISE50 (

(Inlet air pressure: 0.7 MPa, Inlet air temperature: 20C) HA How to Order AT ID 20 02 0 ID AMG ID400 Option B Bracket Z Adsorbent for low dew point Basic size AFF 20 30 40 60 Port size AM ID200 02 B 04 06 1 4 B 1 2 B 3 4 Nil Rc Thread type Misc.

Clevis Y-O5A Y.O5A Y-O8A Y-1OA Fod Clevis Pin CDP.3 CDP-3 CDP-5 CDP-6 Rod Nul NT.05 NT-05 NT.O8 NT-10 Mounlinq Brackel Clevis Pln CDP.3 CDP.4 CDP.6 CDP-7 SERIES CP CYLINDER POSITIONING ASSEMBLY DIMENSIONS CPA1 B N vr/o Boot with Boot' BORE B D E K L M MM N s H z.

Bore size mm (in) Bore size Operating range Operating range l (mm) 180 200 15 (0.6) 15 (0.6) 9 Series CQ2 Compact Cylinder Solid State Auto Switches/Direct Mounting Type D-Y59 , D-Y69 , D-Y7P (V) A B A B Auto Switch Specifications D-Y5, D-Y6, D-Y7P, D-Y7PV (with indicator light) D-Y7PV D-Y59B D-Y59A D-Y69A D-Y7P D-Y69B Auto switch model no.

F.S.=100-0=100[kPa] 1.0F.S.=1000.01=1[kPa] 4951[kPa]ON () 1[F.S.],51[kPa]ON 5052[kPa]ON4951[kPa] 50[kPa]() 50[kPa] ON 50[kPa]1.0 [F.S. ]ON ON ON ON 0 0.01 MPa 0.00,0.01,0.02,0.015,0.025 () 0() 0 -11No.PS-OMH0002CN-D () SI ON-OFF ONOFF ON-OFF ON (LED) () " ()" ON-OFF ON () -12No.PS-OMH0002CN-D ISE7013.615 NmISE75/75H2528 Nm (24 mm) (ZS-31-A) B M6 5 mm B (ZS-31-A) -13No.PS-OMH0002CN-D

G PPA AL 14-12-3 4 Compact Manometer Series PPA PPA100/101/102 How to Order Unit specifications PPA10 0 M Pressure specifications Nil M Option/Case holder With the unit switching function(1) 0.1 to 1 MPa (For high pressure) 101 to 10 kPa (For vacuum) 10 to 100 kPa (For low pressure) 0 1 2 Fixed in SI unit (2) None With PPA-B Nil B Note 1) With unit switching function is not permitted to sell

G PPA AL 14-12-3 4 Compact Manometer Series PPA PPA100/101/102 How to Order Unit specifications PPA10 0 M Pressure specifications Nil M Option/Case holder With the unit switching function(1) 0.1 to 1 MPa (For high pressure) 101 to 10 kPa (For vacuum) 10 to 100 kPa (For low pressure) 0 1 2 Fixed in SI unit (2) None With PPA-B Nil B Note 1) With unit switching function is not permitted to sell

AS2052FS AS1002FS AS2002FS Inlet pressure: 0.5 MPa 500 Inlet pressure: 0.5 MPa 100 08, 09 Inlet pressure: 0.5 MPa 06, 07 01, 23, 03, 04, 06, 07 Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] 200 400 06, 07 03, 04 300 50 100 200 100 0 0 5 10 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations AS3002FS AS4002FS Inlet pressure

(Values at the initial period) VG JIS Symbol VP S070 VQ Model Valve model VKF VS3145 VS3135 P A C [dm3(sb Cv b Cv b Cv b Cv Flow characteristics 6.1 7.3 9.0 0.3 0.2 0.2 1.6 1.8 2.4 0.4 0.2 0.3 1.5 1.8 2.3 1/4 3/8 1/2 3/4 6.1 7.2 9.0 0.27 0.21 4.8 5.1 16 15 0.34 0.46 4.1 4.5 18 20 VZ VS AC DC 30 or less

force N Gripping force N 0.5MPa 0.5MPa 80 120 0.4MPa 0.4MPa 60 90 0.3MPa 0.3MPa 40 0.2MPa 60 0.2MPa 20 30 100 0 80 60 40 20 0 80 60 40 20 100 Gripping point L mm Gripping point L mm 2 Series MHF2 Model Selection Effective gripping force: Series MHF2 Step 2 External gripping Internal gripping The air gripper should be operated so that the amount of overhang "H" will stay within the range

ZQ-OM01501 How to order ZQ ZSV A M W 2 A (1) (2) (3) (4) (1) Vacuum pressure switch Symbol Pressure range [kPa] output specifications A -100 to 100 NPN1 output + Energy Saving Function B PNP1 output + Energy Saving Function (2) Vacuum pressure switch unit specifications Nil Note 1 With unit switching function M Fixed SI unit [kPa] Note 1 ) The unit conversion function is not for use in Japan