10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

AC Servo Motor Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

Compatible Driver -@ type -# type Driver type Series LECYM LECYU Applicable network MECHATROLINK2 MECHATROLINK-3 Control encoder Absolute 20-bit encoder Communication device USB communication, RS-422 communication Power supply voltage [V] 200 to 230 VAC (50/60 Hz) Reference page Page 766 672

Various options include earth leakage breaker, and communications function (RS-485).? Dustproof filters are available for the air-cooled refrigerator type.Temperature stability: ?1.0C , Cooling capacity: 9.0/9.5kW, 10.0/11.0kW, 13.0/14.5kW, 14.5/16.5kW?

Various options include earth leakage breaker, and communications function (RS-485).? Dustproof filters are available for the air-cooled refrigerator type.Temperature stability: ?1.0C , Cooling capacity: 9.0/9.5kW, 10.0/11.0kW, 13.0/14.5kW, 14.5/16.5kW?

Various options include earth leakage breaker, and communications function (RS-485).

Various options include earth leakage breaker, and communications function (RS-485).

Various options include earth leakage breaker, and communications function (RS-485).

Various options include earth leakage breaker, and communications function (RS-485).? Dustproof filters are available for the air-cooled refrigerator type.Temperature stability: ?1.0C , Cooling capacity: 9.0/9.5kW, 10.0/11.0kW, 13.0/14.5kW, 14.5/16.5kW?

Various options include earth leakage breaker, and communications function (RS-485).

Various options include earth leakage breaker, and communications function (RS-485).? Dustproof filters are available for the air-cooled refrigerator type.Temperature stability: ?1.0C , Cooling capacity: 9.0/9.5kW, 10.0/11.0kW, 13.0/14.5kW, 14.5/16.5kW?

Various options include earth leakage breaker, and communications function (RS-485).? Dustproof filters are available for the air-cooled refrigerator type.Temperature stability: ?1.0C , Cooling capacity: 9.0/9.5kW, 10.0/11.0kW, 13.0/14.5kW, 14.5/16.5kW?

Various options include earth leakage breaker, and communications function (RS-485).? Dustproof filters are available for the air-cooled refrigerator type.Temperature stability: ?1.0C , Cooling capacity: 9.0/9.5kW, 10.0/11.0kW, 13.0/14.5kW, 14.5/16.5kW?

10%6046Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)275UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

Stations: 2 Stations, Port Size: C8 (ø8 One-touch Fitting), Common: 0 (+COM), Option 1: None, Option 2: RS (External Pilot, Silencer)

Stations: 3 Stations, Port Size: N7 (1/4" One-touch Fitting), Common: 0 (+COM), Option 1: None, Option 2: RS (External Pilot, Silencer)

Stations: 4 Stations, Port Size: N7 (1/4" One-touch Fitting), Common: 0 (+COM), Option 1: None, Option 2: RS (External Pilot, Silencer)

Stations: 4 Stations, Port Size: N9 (5/16" One-touch Fitting), Common: 0 (+COM), Option 1: None, Option 2: RS (External Pilot, Silencer)