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or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L] 4.0 or less 4.0 or less Quoted from the standard JRA-GL-02

SPOOL VALVE PNEUMATIC CONNECTIONS (S, C1, C2) INMETRO certifications: Ex ia IIC T4/T5/T6 Ga Ex ia IIC T4/T5/T6 Ex ia IIC T4/T5/T6 Gb Temperature range: T4: -40 to +80 C; T5: < +65 C; T6: < +50 C. 02 Low capacity. Stroke volume of actuator < 1 dm3. G 1/4 (ND91 series), 1/4 NPT (ND92,ND93 and ND94 series). 03 Medium capacity. Stroke volume of actuator 13 dm3.

[] -3No.PS-OMS0004CN-D () () () () -4No.PS-OMS0004CN-D () * C3604+AI203(96)FKM () ZS-31-X175 X188 () NG NG -5No.PS-OMS0004CN-D * (Nm) R1/8 35 R1/4 812 (50N ) () * () 6 33 ( ) () 10 m DC(-)() FG -6No.PS-OMS0004CN-D * ( ) () CE -1060 * 2030 10 1% * -7No.PS-OMS0004CN-D 0 01 PSE57 / M12(3m) 0 (01MPa) L M12(3m) 3 (-100100kPa) N 4 (0500KPa) (1~5V) 01 R1/8(M5) 28 (4~20mA) 02

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

Stations 02 03 2 stations 3 stations Station 3 2 1 D side U side 20 20 stations Note) Maximum of 20 stations Electrical entry Grommet/Plug lead C How to Order Valves S070 A 5 B G Electrical entry Body type Body type Base mounted with clips G C Grommet Plug lead with light/surge voltage suppressor Symbol A Coil voltage Power consumption Pressure specification Flow rate 5 6 V S R 24

Type 31 How to Order Applicable solenoid valve Note) SY113--M3 SY113A--M3 SY123--M3 SY123A--M3 Applicable blanking plate assembly SY100-77-1A SS3Y1 31 05 Stations 02 2 stations P R 20 20 stations R port M5 x 0.8 P port M5 x 0.8 Note) SY113(A) and SY123(A) cannot be mounted on the same manifold.

VQZ Model Weight Weight (g) VFN200N/Flow Characteristics VZ Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN212N-5D-02F 240 380 VS C 2.68 2.68 b 0.40 0.40 Cv 0.72 0.72 C 5.41 5.41 b 0.31 0.31 Cv 1.38 1.38 VFN212N-5D-02F-D 2 position Single solenoid VFN Double solenoid How to Order VFN212 5 D N 02 F Z NAMUR Interface Solenoid Voltage Nil D Single solenoid Double solenoid Thread

Valve stations 02 2 stations VK A port size (Base mounted) 20 20 stations VZ Max. 20 01 02 common exhaust/individual exhaust 1 8 individual exhaust 1 4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Please indicate manifold base type, applicable manifold valve

How to Order KQ2 H 05 S 02 With thread seal One-touch fittings Nil Without seal S With thread seal Applicable tubing O.D.

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

1-RD 12 7.5 7.5 20 21 29 30 Cable length 02 2m 04 4m 03 3m 05 5m PC Controller Controller connector The connector used for CN1 (control terminal) and CN2 (generalpurpose input/output).

Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

function Fixed SI unit Note) Nil N F Rc NPT G 3m lead wire with connector Without lead wire Nil N Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l Port size Output specification Applicable models Flow rate (l/min) Port size Applicable models Output specification Symbol Symbol 100 200 500 50 10 PF2A710/PF2A750 PF2A711/PF2A721, PF2A751 27 NPN open collector 2 outputs 01 02

Applicable bore size C D d H Applicable bore size C D d H 5 12.5 15 26 30 M8 x 1.25 8 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 16.5 19.6 32 36.9 M10 x 1.25 8 M24 x 1.5 32 17 25/32 25 SOR-25 NT-03 8 21.0 25.4 38 43.9 M14 x 1.5 9 M30 x 1.5 38 22 40 32 SOR-32 NT-04 11 26 31 41 47.3 M18 x 1.5 11 M33 x 2.0 41 27 50 40 SOR-40 NT-05 11 26 31 M18 x 1.5 27 63 NT-05 13 31 37 M22 x 1.5 32 80 NT-08 16 39

Double solenoid) Pressure center Exhaust center Series Closed center C3 C4 C8 C6 Dual 3 port valve (3.2) (4) (8) (6) Single SQ130 Metal seal SQ131 Rubber seal SQ230 Metal seal SQ231 Rubber seal 3.2 (0.18) 4.5 (0.25) 11.7 (0.65) 14.8 (0.82) 18 Series SQ1000/2000 How to Order Manifolds SS5Q 3 (-00T) JD0 1 08 D N Series P, R port inch bore size Symbol Series SQ1000 SQ2000 1 2 Options Symbol 02

For Water 30 20 VX2 60-02 10 VX234.5 VX2 46 VX2 6010 VX2 50 8 3 2 04 03 3 2 3 2 VX223 10 3 2 VX2112 5 4 3 Flow rate Q l/min 2 1 0.001 (0.0018) (0.0054) 0.01 (0.017) 0.05 (0.07) 0.1 Pressure differential P = (P1 P2) MPa How to read the graph When a water flow of 2 l/min is generated, lP 0.017 MPa for a valve with 3 orifice (VX212, 222, 232).

ZQ 05 1U A-K15LO B-VA M W-3 3-N (1) (2) (3) (4) (5) (6) (7)(8) (9) (1) (6) 05 0.5 07 0.7 W (2m) 10 1.0 (7) (V ) (8) (P ) (2) 1U 0 (M5x0.8) 3M 1 3.2 () 0 (M5x0.8) 2 4 () 2 4 () (3) 3 6 () 3 6 () 4 3.2 () 5 4 () B 5 4 () 1) (9) (4) ( [kPa] VA -100 to 100 NPN1 + VB PNP1 + N 1) ZFC (5) 2) M SI (kPa) 2) (99 10 ) ZZQ108A-B S C-A (1) (2) (3) (4) 1 (1) 2) 01 1 S () 02

How to order SFD 1 1 0 C08 Option Symbol Option Nil None B Bracket Port size Symbol C04 4 C06 6 C08 8 02 N02 F02 Connection size Clean One-touch fittings (KP series) Rc1/4 NPT1/4 G1/4 7 Document No.DOC1018377 4. Construction and Replacement parts SFD110-C** SFD110-*02* Component Parts No.

43 70 75H 02 43 2 75 010 MPa A 75H 015 MPa 1 02 Rc1/4 N02 NPT1/4 S M12 (5m) F02 G1/4(ISO1179) L M12 (5m) 1 27 2 NPN 2 M SI 2 43 NPN 1 1 PNP 1 P psi() 1 65 PNP 1 1 2MPa 67 2 PNP 2 ZS-31-A A M12 (5 m) ZS-31-B S M12 (5 m) ZS-31-C L -8No.PS-OMH0002CN-D LCD () SET UP DOWN 4 24 ()OUT1ON LCD 4 UPON/OFF DOWNON/OFF SET -27-67 (-27-67 OUT2()) -9No.PS-OMH0002CN-D 7 7 "8"7 "-"(