Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Full MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Non-Cassette Type, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Non-Cassette Type, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
Series: 5000 (SY5000), Port Size: 1 (Standard), Thread Type: F (G)
Function: 3 (3 Position Closed Center), Body Option: 0 (Plug-in), Option: 0 (Standard), Pilot: R (External Pilot), Voltage: 1 (100VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Port Size: 03 (Base Mounted w/Sub-plate 3/8, Side Piping), Thread: T (NPTF)
Function: 3 (3 Position Closed Center), Body Option: 0 (Plug-in), Option: 0 (Standard), Pilot: R (External Pilot), Voltage: 1 (100VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Port Size: 03 (Base Mounted w/Sub-plate 3/8, Side Piping), Thread: N (NPT)
Function: 3 (3 Position Closed Center), Body Option: 00 (Base Mounted Plug-in), Pilot: R (External Pilot), Voltage: 1 (100VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Port Size: 01 (Base Mounted w/Sub-plate 1/8 Side Piping), Thread: T (NPTF)
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com