EXxx-OMN0035CN

(EX600-DXE) 1 2 3 4 5 6 7 8 0 2 4 6 8 10 12 14 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 14 15 16 17 18 19 20 21 1 3 5 7 9 11 13 15 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 -30No.EX-OMN0035CN-A (EX600-DXF) 0 1 2 3 4 5 6 7 2 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 3 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 EX600-DXB -31No.EX-OMN0035CN-A

Digital Flow Switch (Manifold type)

to 16 (symbol 20) 33 14 33 14 40 5 to 40 (symbol 40) 33 14 33 14 45 -64No.PF-OMW0004-B Remote sensor type (return type): PF3WR (mm) A B Flow range a (L/min) Open Close Open Close 0.5 to 4 (symbol 04) 33 14 33 14 40 2 to 16 (symbol 20) 33 14 33 14 40 5 to 40 (symbol 40) 33 14 33 14 45 -65No.PF-OMW0004-B Side view Integrated display type (Basic type): PF3WB Flow range: 0.5 to 4 L/min (symbol

HRX-OM-Z002

5.6.9 Reset the setting . 5-14 5.6.10 Reset of the accumulated operating time of the dust-proof filter . 5-14 5.7 ALARM SETTING MENU. 5-15 5.7.1 Alarm setting menu . 5-15 5.7.2 Alarm sound setting . 5-15 5.7.3 Discharge pressure rise alarm (AL08) switching . 5-16 5.7.4 Threshold for discharge pressure rise alarm (AL08) setting . 5-16 5.7.5 Discharge pressure drop alarm (AL09) switching .

Stainless Steel 316

(inch) M Weight (g) A D L1 L1 Applicable tubing M 10 16 18.3 18 3.5 KQGL03-32 10-32UNF 10.6 20.5 18 5/32 12 19.5 20.7 21 4.2 KQGL03-N01S D NPT1/8 A 10 17 20.5 25 3.5 KQGL07-32 10-32UNF L2 12 13 20.5 22.1 22.9 27 18.8 KQGL07-N01S 1/4 NPT1/8 H Connection thread 9 14 24.5 25.2 35 KQGL07-N02S NPT1/4 12 21.9 25.3 37 KQGL09-N01S NPT1/8 (In case of R) 15 14 25.9 24.9 27.6 45 20.9 21.6 KQGL09-N02S

KR

(mm) Connection thread R Model A M FR double layer L FR soft nylon KRH06-02S KRH06-01S 1 8 16 12 18.5 22.5 23 22 28 26.5 22 30 33.5 29 27 34.5 30 30 Reference dimensions after R thread installation. 15.5 17 1 4 17 10.4 14 27 21 19 26 19 14 17 6 5.6 Applicable tubing 3 8 1 8 KRH06-03S 24 26.1 KRH08-01S KRH08-02S KRH08-03S KRH10-01S KRH10-02S KRH10-03S 14 1 4 3 8 1 8 1 4 3 8 20.5 15.5 26 27.5

IDX-OM-W014

V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W014 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W014 i i-2 5 i 2 1 IDU Series i-2 i-2 IDX-OM-W014 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDU Series i-2 i-3 IDX-OM-W014 i i 2 6 WARNING !

Electric Actuator Triple Axis P&P Unit

Motor mounting process M5 x 14 Tightening torque 4.4Nm0.2Nm M4 x 14 Tightening torque 2.1Nm0.1Nm Plate A M4 x 14 M4 x 12 B 22 22 B section detail A section detail 18 Electric Actuator/Maintenance Guide 3 Be sure to read before handling. Belt mounting procedure Belt mounting process Belt mounting process 1. Confirm that the belt to be used has the following part number.

HRL

The cooling capacity required for the oscillator is, 20 [kW] 6 [kW] = 14 [kW] Considering a safety factor of 20%, 14 [kW] x 1.2 = 16.8 [kW] r Calculate based on the laser output. Laser output power 6 [kW], conversion efficiency 30% The oscillators power consumption is, 6 [kW] 0.3 = 20 [kW] Example 2: When the heat generation amount in the users equipment is not known.

Slider Type Ball Screw Drive/11-LEFS Series

6 900 11-LEFS40ll-850l 1264.5 1294.5 856 1028 14 6 900 11-LEFS40ll-900l 1314.5 1344.5 906 1078 14 6 900 11-LEFS40ll-950l 1364.5 1394.5 956 1128 16 7 1050 11-LEFS40ll-1000l 1414.5 1444.5 1006 1178 16 7 1050 526

CXWM/CXWL

For dimensions of the 25 stroke, refer to page 8-26-14.

1.63

MGPWM Common Dimensions (mm) A E Standard stroke (mm) Bore size (mm) B C DA DB FA FB G GA GB H J K L 50 st or less Over 50 stroke 50 st or less Over 50 stroke 20 25 32 40 50 63 44.5 47 52 56 60.5 67.5 34 35 37 41 42 49 10 10 14 14 18 18 10 12 16 16 20 20 7.5 9 10 10 12.5 12.5 3 3 5 5 6 6 36 42 48 54 64 78 9.9 10.3 11.4 13.5 14 15.5 7.5 8.7 9 10.5 11.1 13.5 137 157 190 206 258 286 18 21 24

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

to 750 50 55 70 80 100 120 C95 FT FX ZZ + Stroke FZ CA1 CS1 Single clevis/(C) Port Cushion valve Single clevis CDH10 (mm) Bore size (mm) Stroke range H10 CX 0.1 ZZ Z U RR L CD 0.3 32 40 50 63 80 100 164.5 169 197 197 251 251 154 158 182 182 228 228 13 13 17 17 26 26 14 14 20 20 30 30 10.5 11 15 15 23 23 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 10 10 14 14 22 22 23 23 30

Rotary Table/

NA NB NC ND P Q S SD SE SF UU WA WB WC WD WE WF YA YB YC Size 10 20 30 50 6.8 11 6.5 M8 x 1.25 12 M8 x 1 10 5.5 12.5 4 M5 x 0.8 34 92 9 13 45 47 15 3H9 3.5 M5 x 0.8 8 32 19 3H9 3.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 M5 x 0.8 37 117 10 12 60 54 20.5 4H9 4.5 M6 x 1 10 43 24 4H9 4.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 Rc1/8 40 127 11.5 14 65 57 23 4H9 4.5 M6 x 1 10 48 28 4H9

Compact Hydraulic Cylinder Series CH
KGB

thread (mm) A B C D E F G H J K M P Q R S L Bore size (mm) 20 9.5 depth 5.4 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 43 1/8 16.5 6 11.5 25 9.5 depth 5.4 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 49 1/8 17 8 12 32 11 depth 6.5 66 56 10 18 14 M12 x 1.75 15 7 47 6.6 63 1/4 19.5 10 19.5 40 14 depth 8.6 75 65 10 22.4 19 M16 x 2 20 7 52 9 71 1/4 21.5 10 21.5 50 17.5 depth 10.8 81 70 11 28 24 M20 x 2.5 24

Possible to transfer a workpiece at low-speed.

(mm) ND NC NB NA K GE GD GC GB GA EF EE ED EC EB EA Size 10 20 30 50 91.4 112.4 118.7 145.8 M8 x 1 M10 x 1 M10 x 1 M14 x 1.5 20 25 27 32 15.6 19.5 21.5 28 11 14 14 18 7.5 9.5 9.5 11.5 45.2 56.4 61.5 72.9 10 14 14 19 5.5 8 8 8.5 12.5 16.5 16.5 19.5 4 4 4 6 47.1 57.1 58.4 74.4 44.3 55.3 60.3 71.4 33.5 43 46 56 14 18 19.5 22 80 100 110 130 Dimensions other than the above are the same as standard

MY1

Therefore, check the allowable load for the selected conditions. 16 20 25 32 40 50 63 16 20 25 32 40 50 63 6.0 3.0 1.0 18 7 2.1 10 5.2 1.7 26 10.4 3 15 9.0 2.4 38 15 4.5 MY1MW 30 15 5.0 57 23 6.6 59 24 8.0 84 33 10 115 38 15 120 48 14 140 60 19 180 72 21 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 15 8.5 5.0 35 14 4.2 30 14 10 49 21 6 MY1CW 60 23 20 68 30 8.2 115 35 35 93 42 11.5 150 50 50 130

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

NA NB NC ND P Q S SD SE SF UU WA WB WC WD WE WF YA YB YC Size 10 20 30 50 6.8 11 6.5 M8 x 1.25 12 M8 x 1 10 5.5 12.5 4 M5 x 0.8 34 92 9 13 45 47 15 3H9 3.5 M5 x 0.8 8 32 19 3H9 3.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 M5 x 0.8 37 117 10 12 60 54 20.5 4H9 4.5 M6 x 1 10 43 24 4H9 4.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 Rc 1/8 40 127 11.5 14 65 57 23 4H9 4.5 M6 x 1 10 48 28 4H9

Programless controller (with stroke study) Step motor (servo 24 VDC)

OFF ON OFF ON Position number IN3 IN2 IN1 IN0 Position number OUT3 OUT2 OUT1 OUT0 1 (End side) 1 (End side) 2 (Motor side) 2 (Motor side) 3 3 4 4 5 5 6 6 7 7 8 8 9 9 10 (A) 10 (A) 11 (b) 11 (b) 12 (c) 12 (c) 13 (d) 13 (d) 14 (E) 14 (E) 24 No.JXC-OMU0030-A (3) The change of I/O output signal The change of I/O output signal under the condition of controller at auto mode.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

23 246 264 42 30 269 Z + Stroke ZZ + Stroke Double clevis(D)/Locking at head end (Hl) Wl Hl/ Rl (mm) Port Cushion valve Stroke range Bore size (mm) +0.3 +0.1 CDH10 U Z RR CZ Z L CX ZZ ZZ CDH10 32 40 50 63 80 100 up to 500 10 13 162 10.5 28 170 23 14 172.5 180.5 up to 500 10 13 171 11 28 184 23 14 182 195 up to 600 14 17 194 15 40 206 30 20 209 221 up to 600 14 17 194 15 40 206 30 20 209

MK

14 Depth 10.5 Note 1) Above figure is for D-A73, A80.