5 Port Solenoid Valve

32 SPR3: 0/16 SPR2: 0/32 SPR4: 0/16 SPR5: 0/32 SPR7: 0/16 SPR6: 0/32 SPR8: 0/16 SDN1: 0/32 SDN3: 0/16 SDN2: 0/32 SDN4: 0/16 EX260 SY SV VQC S0700 125 k/250 k/500 kbps 156 k/625 k/ 2.5 M/5 M/10 Mbps 9.6 k/19.2 k/45.45 k/93.75 k/ 187.5 k/500 k/1.5 M/3 M/6 M/12 Mbps 21.6 to 26.4 VDC 100 mA or less Communication speed 21.6 to 26.4 VDC 100 mA or less Power supply for control Power supply voltage

Table of Contents

0 40 80 120 160 20 40 60 80 0 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG20 (Type A products group) IDG30 (Type B products group) P1 = 0.3 MPa P1 = 0.3 MPa 0 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa 10 P1 = 0.5 MPa 10 P1 = 0.7 MPa 20 HA 20 P1 = 0.7 MPa 30 AT 30 40 ID 50 0 40 100 200 300 0 100

HRX-OM-Y120

bit was a 1. 0 0 0 0 0 0 0 1 1 bit shift in the lowest direction 0 0 0 0 0 0 0 0 1 Add 0 to the top Execute ExOR if 1 (Example 2) The least significant bit was a 0. 0 0 0 0 0 0 0 0 1 bit shift in the lowest direction 0 0 0 0 0 0 0 0 0 Add 0 to the top If it is 0, do not ExOR 3.10 Checksum calculation method HRL Series 3-10 HRX-OM-Y120 Chapter 3 Serial communication Calculation example

240

[mm] 120 120 120 120 X 80 80 80 80 Me m 40 40 40 40 0 0.2 0.4 0.6 0.8 1 0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0 0.2 0.4 0.6 0.8 1 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 Me 150 150 150 150 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 100 100 100 100 Wall Y L5 50 50 50 50 0 0.2 0.4 0.6 0.8 1 0 0 0 0 0 0.2 0.4 0.6 0.8 1 0.0 0.4 0.8 1.2 1.6 2.0 Work

Air Cylinder

4 0.5 5.5 25 M6 x 0.75 10 +0.08 0 5 1 6.5 32 M8 x 1.0 12 +0.08 0 5.5 1 7.5 40 M10 x 1.25 14 +0.08 0 6 1.25 8.5 50 M12 x 1.25 16 +0.08 0 7.5 2 10 63 M14 x 1.5 18 +0.08 0 11.5 3 14.5 80 100 D-X * Cylinder sizes 80 and 100 do not have trunnion mounting female thread on the width across flats NA.

MTS

0 0 28 33 (45) 18 28 (35) 5 (17) D-A9, D-A9V 0 (15) 0 0 32 32 (47) 22 22 (37) 0 (15) 16 D-M9, D-M9V 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-A9, D-A9V 0 (15) 0 0 38 38 (53) 26 26 (41) 0 (15) 20 D-M9, D-M9V 10 (17) 0 0 38 38 (55) 26 36 (43) 0 (17) D-F9W, D-F9WV 10 (17) 0 0 38 38 (55) 26 36 (43) 0 (17) D-A9, D-A9V 0 (15) 0 0 40 40 (55

LEC-OM032xx

If the set value is lower than 0 or larger than 12, 12 is set. ID bit 3 2 1 0 1 0 0 0 1 2 0 0 1 0 3 0 0 1 1 11 1 0 1 1 12 1 1 0 0 42 - 12. Precautions for controlling the controller (LEC) 12. 1 Communication delay between the gateway unit unit and the controller(LEC) There is communication delay between the gateway unit and the controller (LEC).

JXCx-OMU0026

0 0 35 100 0.0 0.0 0.5 Axis 1 Relative 50 10.00 1000 1000 0 0 35 100 0.0 0.0 0.5 2 Axis 2 Relative 50 10.00 1000 1000 0 0 35 100 0.0 0.0 0.5 Axis 3 Relative 50 10.00 1000 1000 0 0 35 100 0.0 0.0 0.5 Movement (ex.)

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

0 +4 0 9 0 +4 0 e v 0 Non-locking push style is standard.

CM2

0) 0(0) 0.5(0) 5.5 A 0.5(0) 0.5(0) 1.5(0) 6.5 B 3(1) 3(1) 4(2) 9 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 B 0(0) 0(0) 1(0) 6 Hs 22.5 25 28.5 32.5 A 1(0) 1(0) 2(0) 7 B A B 1.5(0) 1.5(0) 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) 5.5(3.5) 10.5 4.5(2.5) 9.5 3.5(1.5) 8.5 2.5(0.5) 7.5 ( ): With air cushion 1.4

Multi-Axis Step Motor Controller

3000 3000 0 85.0 50 100.0 0 0 0.5 Axis 2 INC 500 200.00 3000 3000 0 85.0 50 100.0 0 0 0.5 1 Axis 3 INC 500 200.00 3000 3000 0 85.0 50 100.0 0 0 0.5 > > > > > > > > > > > > > > Axis 1 SYN-I 500 100.00 3000 3000 0 0 0 100.0 0 0 0.5 Axis 2 SYN-I 0 0.00 0 0 0 0 0 100.0 0 0 0.5 2046 Axis 3 SYN-I 0 0.00 0 0 0 0 0 100.0 0 0 0.5 Axis 1 CIR-R 500 0.00 3000 3000 0 0 0 100.0 0 0 0.5 Axis 2 CIR-R 0 50.00

AZ1000

No pressure gauge (Connections: 1/4 inch face seal male) 0 Porting Configuration V3 L 1 H 2 4 10 40 -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7 MPa 0 to 28 MPa r r e Sample Order Number Port w q w

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Stroke adjusting range (One side) 0 to 10 mm 0 to 15 mm [Built-in adjusting bolts (2 pcs.)]

Fieldbus system EtherNet/IP TM compatible SI unit

Occupied byte Unit Unit part number Input Output EX600-SEN (32 outputs) 0 4 EX600-SEN (24 outputs) 0 3 SI unit EX600-SEN (16 outputs) 0 2 EX600-SEN (8 outputs) 0 1 EX600-DXB (8 inputs) 1 0 EX600-DXC (8 inputs) 1 0 EX600-DXC1 (8 inputs)(with open circuit detection) 1 0 Digital input unit EX600-DXD (16 inputs) 2 0 EX600-DXE (16 inputs) 2 0 EX600-DXF (16 inputs) 2 0 EX600-DYB (8 outputs) 0 1

Table of Contents

0 !1 !2 !

25

F .G. + 24 V Brown (2 pcs.) + 24 VDC + + + 24 V Power supply 24 VDC 0 V 0 V 0 V DC/DC Blue (2 pcs.) 0 V F .G.

A_HEC-OM-K001

(HED005/007) 9.5 Performance Chart 9-17 A_HEC-OM-K001-1.7 Chapter 9 Appendix 9.5.5 Facility water Pressure Loss Fluid: Water HED003 60 50 Pressure loss kPa HED003-HW13 HED003-HW19 40 30 20 10 0 0 1 2 3 4 5 6 7 8 9 10 Flow rate L/min Fig.9-15 Facility water Pressure Loss (HED003) HED005, HED007 60 HED005-HW13 HED005-HW19 HED007-HW13 HED007-HW19 50 Pressure loss kPa 40 30 20 10 0 0 1 2 3

SI unit for DeviceNet ®

No.5 No.6 No.7 No.8 No.9 No.10 32 16 8 4 2 1 0 0 0 0 0 0 0 1 0 0 0 0 0 1 MAC ID 2 0 0 0 0 1 0 : : : : : : : 62 1 1 1 1 1 0 63 1 1 1 1 1 1 Communication speed setting (switches No. 3 to 4) The DeviceNet communication speed is binary coded and can be set to 125 kbps, 250 kbps and 500 kbps. : Factory default setting is 125 kbps. 0: OFF 1: ON Switch No.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

0 +4 0 9 0 +4 0 e v 0 Non-locking push style is standard.

JXCx-OMT0061CN

0 0 0 100 0 0 0.1 () 1No.1(IN0ON) / 2DRIVEON (2)(5)(10)(13) No.1 DRIVE (1) No.