Pressure Sensor for General Fluids

D E F G H I ZS-31-X188 20 9 R1/8 R1/8 14 1.5 ZS-31-X189 20 9 NPT1/8 NPT1/8 14 1.5 ZS-31-X175 29 13 R1/4 R1/4 17 1.6 ZS-31-X186 29 13 NPT1/4 NPT1/4 17 1.6 -14No.PS-OMG0006-D Revision history A: For B: Complete revision C: Contents revised in several places. D: Contents revised in several places.

VNB

cable O.D. 6 to 8 (D, DL) Pilot port B (Air operated) L (Terminal with indicator light: DL) M (Conduit terminal: T) K (DIN terminal: D) I (Grommet: G) J (Conduit: C) 4 x 2-18 mounting hole Applicable flange Pilot port Rc A B C D E F G H I J K L M Model VNB5-32F VNB6-40F VNB7-50F 1 8 1 4 1 4 130 150 180 210.5 226 250 135 140 155 134 146 162.5 20 24 24 100 105 120 36 42 54 12 12 14 244 259.5

Refrigerated Air Dryer

B IDFB4E to 15E A Power cable outlet 0.7 [17 mm] Grommet with membrane Signal cable outlet 0.7 [17 mm] Terminal block (Wire diameter 0.4 [9 to 11mm]) Grommet with membrane Power cable outlet 0.7 [17 mm] IDFB4E to 11E_Terminal block C D A B Terminal block Dimensions Unit: inch [mm] A B C D Model B B 9.0 [230] 2.6 [67] 7.0 [179] 1.3 [32] IDFB4E, 6E, 8E, 11E A Power cable outlet 0.7 [17 mm]

ZQ-OM01401

20 -20 10 0 0 0 0 5 10 15 20 25 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] Pmax Qmax 10 Pmax 2 (P1 Q1 ) 3 Qmax 0 37 - No.ZQ-OM01401-B 11.2 () ZQ000A 11.3 -100 -80 [kPa] -60 -40 -20 0 (V 6 ) 0 5 10 15 20 [L/min (AMR) ] ZQA (PD)() ZQ000A (PD) 100 80 [L/min(ANR)] 70 [L/min(ANR)] 0.5MPa 0.5MPa 80 60 0.4MPa 50 0.35MPa 0.3MPa 60 0.3MPa 40 40 30 20 20 10 0 0 0 1 2 3 4 5 0 1 2 3 4 5 [] [

JCRB-OM00003

Size A 10 6 15 6 20 6 30 6 40 6 Operating Angle and Hysteresis Angle Solid state auto switch D-M9 Size Operating angle (m) Hysteresis angle Note) Since the figures in the table on the left are 10 36o 5o provided as a guideline only, they cannot be guaranteed.

Digital Flow Switch (Integrated display type)

Model Max. rated flow Model Max. rated flow [L/min] [L/min] PFM710--C/E 10 (5) PFM710--D/F 10 (5) PFM725--C/E 25 (12.5) PFM725--D/F 25 (12.5) PFM750--C/E 50 (25) PFM750--D/F 50 (25) PFM711--C/E 100 (50) PFM711--D/F 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 Flow adjustment needle revolution Flow characteristics (reference value) -57No.PF-OMJ0006-J Pressure loss (at 350 [kPa]) -58No.PF-OMJ0006

PC Wiring System

Refer to page 44 in CAT.E02-20 about the circuit diagram.

PROFINET Compatible Fieldbus System

NOTE The parameter for output modules takes priority over the system parameter [IO communication on port diagnostic (COM A-D)].

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

-00 KPQL10-00 18.5 16 25 35 23 6.8 28.4 M L 8 12 KPGL12-00 KPQL12-00 20.9 20 40 50 24 7.5 30.4 Note 1) D indicates the maximum diameter.

Manifold Specifications

O.D.: 6 VP4 U D U side D side 2 to 8 2 to 8 9 to 16 D-sub connector cable assembly Symbol VZS B Both sides Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Stations Symbol VFS 02 2 stations 1 D side VS4 16 stations 16 Max. 16 stations.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock

Nozzle Type Ionizer

d A IZN10E-01 02m06 6 3.5 IZN10E-01 02m07 1/4" 7 34.7 26 2 x M3 x 0.5 thread depth 10 11 291 *1 Dimension of the resin part in described in the Mounting Warning note 3 (page 24). 18.31 One-touch fitting (Elbow) IZN10E-mm 16 17 D B C Applicable tubing O.D. d 180 [mm] Model d B C D IZN10E-mm16 6 22 16 11.5 IZN10E-mm17 1/4" 24.5 18.5 12 Female threads for piping (Rc1/8) IZN10E-11mm 14 Rc1/

Digital Flow Switch (Remote type sensor unit)

Output for PF2W3 + Analogue (1 to 5 V) type PF2W5--1Analogue output: 1 to 5 V Output impedance: 1 k 1: Refer to the PF2W3 or PF2W2 operation manual for details of the flow monitors. 2: Load indicates analogue input equipment such as a voltmeter. -19No.PF-OMO0014-D Output for PF2W3 + Analogue (4 to 20 mA) type PF2W5--2Analogue output: 4 to 20 mA Load impedance: 300 (12 VDC) 600 (24 VDC)

Microspeed Cylinder: Double Acting/Single Rod Series CM2X ø 20, ø 25, ø 32, ø 40 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

BM2-032 BM2-040 D-C7, D-C8, D-H7 D-B5, D-B6, D-G5 D-A3A, D-A44A, D-G39A, D-K39A BM2-020 BM2-025 BA2-032 BA2-040 BA2-020 BA2-025 BM3-032 BM3-040 BM3-020 BM3-025 Caution Mounting Type and Accessories 1. Be careful of the snap ring springing out. When replacing the rod seal, take care that the snap ring does not spring out while you are removing it.

KF

D I.D.

KA

(mm) Fitting size d Soft nylon Polyurethane D L A M Part No. 3.2 9.6 18.5 17.5 18 4 33.5 34.5 36.5 18.5 15.5 KAR23-04 3.4 2.9 2.0 1.8 5 KAR04-06 KAR04-08 5.6 5.6 6 8 10.4 4 16 12.8 39.5 37 39.5 10 KAR04-10 3.3 2.5 KAR06-08 8 18.5 6 17 12.8 KAR06-12 42 4.7 12 20 10 KAR06-10 13.1 13.1 3.0 8 KAR08-10 41 4.0 18.0 18.0 10 20 18.5 15.2 KAR08-12 42 4.6 12 10 KAR10-12 44.5 33 32.8 32.8 12 20 21 18.5

Compact Cylinder with Lock Double Acting, Single Rod Series CLQ ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 How to Order CLQ B F D 30 40 30 40 M9BW CDLQ D F B With auto switch With auto switch (Built-in magnet) Made to Order Mounting style Refer to page 817

Compact Cylinder with Lock Double Acting, Single Rod Series CLQ 20, 25, 32, 40, 50, 63, 80, 100 How to Order CLQ B F D 30 40 M9BW 30 40 B CDLQ F D With auto switch With auto switch (Built-in magnet) Made to Order Refer to page 817 for details.

Parallel Type Air Gripper

-40 M8 x 1.25 17.7 16 Max. tightening torque (Nm) Model Screw MHZ2-10 M2.5x0.45 0.49 MHZ2-16 M3 x 0.5 0.88 MHZ2-20 M4x0.7 2.1 MHZ2-25 M5 x 0.8 4.3 MHZ2-32 M5 x 0.8 4.3 MHZ2-40 M6x1 7.3 Note) If auto switches D-Y59, D-Y69, or D-Y7P are used, or the auto switch is mounted to the corner of the body, only a tapped body can be used.

VDW Series

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 Thread type 1 2 10 20 Rc G NPT Nil F N Material Brass Stainless steel C S Type 30 OUT port size Stations VVCW20-4A Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 Type 10 is M5 only.

Digital Pressure Switch

D ZS-24-D ZS-35-C Panel mount adapter E ZS-35-D ZS-35-F Panel mount adapter + Front protective cover F ZS-35-G Accessories 1 / Part numbers Part number Option 1 ZS-24-A Bracket A with 2 mounting screws each of M3 x 5 L, M4 x 5 L ZS-24-B Bracket B with 2 mounting screws M4 x 5 L ZS-24-D Bracket D with 2 mounting screws each of M3 x 5 L, M4 x 5 L ZS-35-C Panel mount adapter (piping specification