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O-ring NBR 22 O-ring NBR 172 Lock-Up Valve IL201/211/220 Series Dimensions IL201 14.5 Panel fitting dimension Panel 35 58 45 Max. 4 2 x 6.6 2 10 62 21 5 105 2 52 OUT SIG IN OUT SIG 3 x Rc1/4 60 IL211 Panel fitting dimension 14.5 IP 58 45 Panel 35 Max. 4 IW 2 x 6.6 2 52 10 1301 AW 137 62 31 21 5 IL1 SIG OUT IN1 OUT1 SIG 2 IL2 IL2 IN2 OUT2 IT OUT 5 x Rc1/4 CP 60 IS IL220 VFN 14.5 INT Panel

Figure 11-1 MPC Group Power Connections The diagram illustrates the Ethernet communication and power cable connections required to support 21 MPCs when daisy chaining is in use. The MPCs in the dashed box form a single Power daisy chain group. Note that power daisy chaining supports a maximum of 20 MPCs in one power group.

(Nm) Recommended Proper Torque IR1000 IR2000 IR3000 12.5 21 21 4. If a directional switching valve (solenoid valve, mechanical valve, etc.) is mounted on the supply side of the precision regulator and repeatedly switched ON and OFF, wear of the nozzle/flapper section will be accelerated and a discrepancy in the setting value may occur.

48 22 37 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 45 Up to 300 24 21 52 22 41 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 50 Up to 400 35 32 60 27 45 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to 400 35 32 65 27 50 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 63 Up to 400 35 32 70 27 55 18 38 6 11 51 11 M6 x 1 7 16 11 M18 x 1.5 22 1/

31.4 31 30.5 30.1 27.1 31.8 30.1 41.8 40.1 49.6 47.8 62.8 17.4 17 25.4 25 24.5 24.1 21.1 25.4 23.7 33.6 31.8 40.1 38 52.4 8 8 19 20 21 21 22 36 37 75 76 149 152 328 D H1 A L1 Reference dimensions after R thread installation.

5 16 1 4 1 4 3 8 17.46 26 17 33.5 22.23 7 17.9 30.5 25.0 3 8 31.5 22 21 33.9 Applicable tubing Reference dimensions after NPT thread installation.

S9PV2 Grommet D-S791/S792 D-T791/T792 Direct D-S7P1/S7P2 Connector D-T791C/T792C D-F8N/F8P/F8B 12-13-15 D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-Y59A/Y7P/Y59B D-Y69A/Y7PV/Y69B 12-13-16 Grommet 12-13-17 D-F79W/F7PW/J79W Grommet Rail 12-13-18 D-Y7NW/Y7PW/Y7BW D-Y7NWV/Y7PWV/Y7BWV 12-13-19 Direct Grommet D-F9NW/F9PW/F9BW D-F9NWV/F9PWV/F9BWV 12-13-20 D-F59W/F5PW/J59W Tie-rod Grommet D-F79F 12-13-21

Temperature stability: 0.1C (CH1) When a load is stable When a load is stable 0.1C By controlling the inverter compressor, inverter fan, and electronic expansion valve simultaneously, it maintains the good temperature stability when the heat load fluctuates. 22 Circulating fluid temperature [C] Circulating fluid temperature [C] CH1 21 20 19 26 kW load 18 0 kW load 17 0 10 20 30 40 When a

AC Servo Motor Clean Room Specification Dimensions: Ball Screw Drive 11-LEFS40 Encoder cable (7) 4 x M8 x 1.25 thread depth 13 (170) Motor cable (6) 106 60 Body mounting reference plane Note 1) 74 58 6H9 ( ) depth 7 7 +0.030 0 +0.030 0 6H9 ( ) depth 7 13 L (3.1) A (Table traveling distance) Note 2) 86 86 (223.5) Stroke (88) (90) 61 90 Encoder Z-phase detecting position Note 3) 48.5 (4) 21

Clean series t Copper, Fluorine and Silicone-free + Low Particle Generation For details, refer to the Clean Series/Low Particle Generation section of the Web Catalog. 21 Standard model no. Copper, fluorine and silicone-free + Low particle generation 80

The VZ series consists of 4 and 5 port solenoid valves with rubber seal. Base mounted and body ported valves are available with standard, flat cable, DIN rail mounted plug-in and non plug-in manifolds. Various options are available. The VZ series is still available although direct replacements for each series have been implemented. See individual series information for replacements. Body

Clean specifications include 10- (relief type), 11- (vacuum suction type), and 12- (relief type with specially treated sliding parts) , Other specifications include copper, fluorine and silicon-free + low partical generation (21- and 22-), Types 10-, 11- and 22- are available with ball bushing or slide bearings, Types 12- and 21- have ball bushing bearings, Piston Rod Assembly, GUIDED CYLINDER

Clean specifications include 10- (relief type), 11- (vacuum suction type), and 12- (relief type with specially treated sliding parts) , Other specifications include copper, fluorine and silicon-free + low partical generation (21- and 22-), Types 10-, 11- and 22- are available with ball bushing or slide bearings, Types 12- and 21- have ball bushing bearings, Piston Rod Assembly, GUIDED CYLINDER

L2 = 21 x m + 89.8 L1 = 10.5 x n + 45 Do not operate in an atmosphere containing flammable or explosive gases. Fire or an explosion can result. This product is not designed to be explosion proof. Default settings At the time of factory shipment, the product is in "Remote Control Mode" and set to "Enable DHCP".

Generated error per unit when control and input power supply voltage goes over approx. 28 V or under 21 V. 0: False Does not generate an error. 1 Monitor 24V_C 1: True Generates an error.

Setting Screen 21 8.5.1. Reading IO-Link Module Parameters 21 8.5.2. Setting the IO-Link Module Parameters (Only possible when not connected to PLC) 22 8.6. Setting the IO-Link Devices 23 8.6.1. Reading Information on IO-Link Devices 23 8.6.2. IO-Link Device Process Data (Example using the ISE20B-L) 24 8.6.3. IO-Link Device Identification (Example using the ISE20B-L) 24 8.6.4.

PLC (23 ) Enforce (21 ) (22 ) -20No.EX-OML0010CN-C a) (52) b) 28 c) /(16) d) e) f) 3 () (ON) (OFF) OFF ON Set Cancel Set Cancel -21No.EX-OML0010CN-C a) (52) b) 28 c) /(16) d) e) f) () g) / g)# Set Cancel Set() g)* Cancel() g) -22No.EX-OML0010CN-C (0 ) A,B Z, 0,19 "Wrong Password" -23No.EX-OML0010CN-C 2. Diagnosis Data() [2.DiangosisDate] 1.& & 2. 3. 1. (1718) 2. 25 3.

No.PF-OMP0001CN-F // PFMB7501 PFMB7102 PFMB7202 2 10 11 12 14 14 16 17 [] 21 OU1OUT2 {3 ] 22 22 [] 24 25 F0 26 F1 OUT1 28 F2 OUT2 36 F3 41 F10 42 F13 43 F20 44 F22 45 F30 46 F31 47 F80 OFF 48 F81 49 F90 50 F98 52 F99 53 54 58 59 61 62 62 65 67 -1No.PF-OMP0001CN-F (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

Doc.No.LV50***-OMQ0002-G Product Name Electromagnetic Digital Flow Switch Model/ Series/ Product Number LFE# SMC Corporation No.LV50***-OMQ0002-G Contents Safety Instructions 2 Model Indication and How to Order 11 Summary of Product Parts 13 Definitions and Terminology 14 Mounting and Installation 16 Installation 18 Piping Method 19 Wiring 21 Flow Setting 24 Function Settings 26 Default Setting

NEGATIVE RESPONSE . 3-14 3.13 REGISTER MAP . 3-16 3.13.1 Circulating fluid discharge temperature .3-17 3.13.2 Circulating fluid discharge pressure .3-17 3.13.3 Status flag .3-17 3.13.4 Alarm flag .3-18 HRLE Series HRX-OM-Z015 Chapter 1 Read before using 3.13.5 Data display . 3-20 3.13.6 Circulating fluid set temperature . 3-20 3.13.7 Operation instruction . 3-20 3.13.8 Data instruction . 3-21