SMC Corporation of America
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Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 2 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: Rc, Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 2 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: Rc, Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)

Base Mounted Wiring: 01CD (Base Mounted Plug-in w/Multi-connector on D Side), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 2 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: Rc, Control Unit: E (Air Release Valve), Voltage of Air Release Valve: 5 (24VDC)

Base Mounted Wiring: Plug-in w/Terminal Block, Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 2 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 1/4, Thread: Rc, Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: CE Marked

Base Mounted Wiring: Plug-in w/Terminal Block, Pilot Type: Internal Pilot or None, Junction Cover: One-piece Junction Cover, Stations: 2 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 1/4, Thread: Rc, Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: CE Marked

Base Mounted Wiring: Base Mounted Plug-in w/Multi-connector on D Side, Pilot Type: Internal Pilot or None, Junction Cover: One-piece Junction Cover, Stations: 2 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 1/4, Thread: Rc, Control Unit: Air Release Valve, Voltage of Air Release Valve: 24VDC, Q: -

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

of the rated voltage 12 V 10% of the rated voltage 100 V 10% of the rated voltage 110 V*1 [115 V] 10% of the rated voltage [15% to +5% of the rated voltage] 200 V 10% of the rated voltage 220 V*1 Allowable voltage fluctuation AC [230 V] 10% of the rated voltage [15% to +5% of the rated voltage] Power consumption [W] DC 0.35 (With light: 0.4) 0.35 (With light: 0.45) 100 V 0.78 (With light

of the rated voltage 12 V 10% of the rated voltage 100 V 10% of the rated voltage 110 V*1 [115 V] 10% of the rated voltage [15% to +5% of the rated voltage] 200 V 10% of the rated voltage 220 V*1 Allowable voltage fluctuation AC [230 V] 10% of the rated voltage [15% to +5% of the rated voltage] Power consumption [W] DC 0.35 (With light: 0.4) 0.35 (With light: 0.45) 100 V 0.78 (With light

AR4 5 AR6 5 AR8 5 AR9 5 Description Model Pressure gauge with limit indicator Note 1) B24P B25P Bracket G46-10-02 (Max. 1.0 MPa), G46-2-02 (Max. 0.2 MPa) Note1) Inthegaugepartno.(e.g.G46-10-02), indicate kind of the connecting thread. Put nothing for Rc and N for NPT thread. PleaseconsultwithSMCforNPTpressuregauge.

Screw tightening torque VO307K: 1.35 to 1.45 Nm V11 : 0.14 to 0.17 Nm Parts for manifold 02 03 04 02 03 04 04 06 10 01 02 10 12 01 02 14 20 Description VEX312VEX322VEX332VEX342VEX350VEX370VEX390Bracket (with bolt and washer) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A Foot bracket (with bolt and washer) VEX1-18-2A VEX3-32-2A Silencer for pilot exhaust port (PE) AN120-M5 AN103-01 AN210-02 Note 1

-M3 X 0.5 (Piping port) 33 36 (Non-locking) Manual override B P R R 7 7 SlA 36 2 35 7 13.5 28.5 15 A 21 R2 P R1 VlA 13 1 (Bleed port) 11 10 4 15 10 10 5-M5 X 0.8 (Piping port) 8.2 14 14 15 Bracket VM/VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 10 9 36 7.1 2-M3 X 0.5 (Pilot port) 10 1.8 4 A B (Mounting holes) 3.2 21.5 1.5 22 7 8.2 2.5 (Mounting holes for manifold

Port size Port size Body size Body size Port size Port size Bowl Symbol Symbol 30 40 50 60 20 30 40 50 60 Applicable model AF20 to 60 Symbol 2 Note 4) Description 02 03 04 06 10 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 1/4 3/8 1/2 3/4 1 Bowl Metal bowl Applicable model AF30 to 60 Description Symbol Metal bowl with level gauge 8 Note 3) AF30 to 60 2 Note 4) Metal bowl Note 4) Only Metal Bowl

Note 2) For AS121FP AS-FPG/Stainless steel 304 AQ Release button color: Light blue Flow Rate and Effective Area ASV AS121FP-M5 4 AS221FP-01 AS421FP-04 AS221FP-02 AS321FP-03 Model AK 4 6 4 6 8 6 8 10 10 12 Tubing O.D.

AR-OMT0015 PRODUCT NAME REGULATOR MODEL/ Series AR20K-(F,N)01 (F,N)02(B,E,G,H,M)(-1,N,R,Y,Z)-B AR25K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR30K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)02 (F,N)04(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)06(B,E,G,H,M)(-1,N,R,Y,Z)-B AR50K-(F,N)06 (F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B AR60K-(F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B Contents PAGE 1.

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.