Flame Resistant

0 06, 08, 10 Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] i q y !2 !1 !3 Number of needle rotations Number of needle rotations AS3201F, AS3211F AS4201F, AS4211F r Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Component Parts No.

AU

1 Filter Bowl assembly Lubricator AF11-2 AF11-3 AL12-2 AL12-3 14-3-11 2 Series AU Flow Characteristics Inlet pressure: 1.0 MPa Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Pressure Characteristics Inlet pressure: 0.7 MPa, Outlet pressure: 0.2 MPa, Flow rate: 20 l/min (ANR) Outlet pressure (MPa) Outlet

SI unit ( device)

Dimensions for installation L: Dimensions n: Number of stations L n 2 3 4 5 6 7 8 9 10 L1 133.4 166.4 199.4 232.4 265.4 298.4 331.4 364.4 397.4 L2 117 150 183 216 249 282 315 348 381 -11No.EX-OMY0021 Wiring Select the appropriate cables to mate with the connectors mounted on the SI unit.

PF3WBCSR.eng

Otherwise it can cause failure or malfunction of the system. 1 L+ Brown 18 to 30 VDC 2 N.C.

DOC1003077

F Main power switch L Power supply cable (Accessory, with Ferrite core) Each presses of the [MODE] key changes the operating mode as follows.

HEC-OM-Y008

Mar Q yQ ZQ AQ BQ CQ DQ .

SI unit ( device)

Designation Description 1 L+ +24 V for SI unit 2 SV24 V +24 V for solenoid valve 3 L0 V for SI unit 4 C/Q IO-Link communication line 5 SV0 V 0 V for solenoid valve FE terminal Connect the FE terminal to ground.

ATX-OM-F004E

Outer dimensions and descriptions of each part 4Outer dimensions and descriptions of each part 1) Outer dimensions Model HAA15-10 HAA22-14 PORT SIZE 1B union 11/2B union A 460 588 B 394 484 C 33 52 D 70 70 E 59 60 F 485 580 G 428 505 H 320 333 J 150 150 K 150 150 L 320 400 M 70 94 N 58 65 P 200 200 Q 480 610 R 220 220 S 225 238 HAA Series 6 4 1) Outer dimensions ATX-OM-F004E Air-Cooled Aftercooler

Multi-channel Digital Sensor Monitor

Remarks Power supply/output cable ZS-26-L Length 2 m Connector for sensor lead wire ZS-28-C 1 pc.

PA300/500/700

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Vacuum (Option) Body ported Base mounted Component Parts Description Body Adapter plate End plate Retainer Spool valve Piston Spring Sub-plate Note Platinum silver Platinum silver Platinum silver No. q w e r t y u i Material Aluminium die-casted Aluminium

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

High Purity Fluoropolymer Needle Valve Series LVN 1

PB Tightening torque for piping Torque (N.m) Body class 1.5 to 2.0 2 3.0 to 3.5 3 7.5 to 9 4 17-5-133 3 Series LVN Flow Characteristics (Fluid: Water) LVN20 LVN30 LVN40 14 4 4.5 7 8 12 3.5 Differential pressure Differential pressure Differential pressure 6 10 P0.05MPa P0.05MPa P0.05MPa 3 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) 5 8 P0.03MPa P0.03MPa 2.5 4 P0.03MPa 2 6 3 1.5 4

lVFl 10

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solenl '1 '100 vAc ,2 2OO VAC 5 24 VDC s 'r io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

Table of Contents - Tubing

How to Use Caution q The multiple tube holder can be cut apart according to the number of tube to be connected.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit [Option]

Note 3) When specifying the negative common specifications of the L kit, suffix N to the kit symbol. 578

Heavy Duty Stopper Cylinder Series RSH/RS1H ø20, ø32 ø50, ø63, ø80 3

With cancel cap With lever detection switch Q Note 2) Direction of transfer Note 1) Options can be combined.

3 Port Solenoid Valve Series VQZ100/200/300 Single Unit [Option]

Coil voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC [115 VAC] (50/60 Hz) 220 VAC [230 VAC] (50/60 Hz) 24 VDC 12 VDC Electrical entry MO: M-type plug connector without connector M: M-type plug connector with lead wire L: L-type plug connector with lead wire G: Grommet (DC specification) LO: L-type plug connector without connector With light/ surge voltage suppressor With

Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: L (No Flow Adjustment Valve, Rear Ported), Port Size: C6 (ø6), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made to Order: X731 (Compatible

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 14 (1 1/2), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 14 (1 1/2), Output Specification/Temperature Sensor: L2 (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: None), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature