Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

side, same location) (Side port) (For front port, use hexagon socket head set screw) S BE CB CA CRB1 BF DD MSU D BD BG A CRJ 2.2 (0.4) Note 1) CRA1 SD 16 BA CRQ2 2 x M3 x 0.5 depth 4 BB W MSQ 2 x M3 x 0.5 (Front port) (For side port, use hexagon socket head set screw) MRQ N DBC 20With external stopper: CRJU Note 2) For the 180 specification, the slated line area do not exist.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

side, same location) (Side port) (For front port, use hexagon socket head set screw) S BE CB CA CRB1 BF DD MSU D BD BG A CRJ 2.2 (0.4) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Note 1) CRA1 SD 16 BA CRQ2 2 x M3 x 0.5 depth 4 BB W MSQ 2 x M3 x 0.5 (Front port

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

1 2 3 4 5 1 2 3 4 5 1 2 3 4 5 5 2 1 3 4 32.4 32.6 15 18 M12 SPEEDCON w 4 3 5 1 2 Plug connector pin assignment A-coded (Normal key) 4.2 M12 SPEEDCON M12 SPEEDCON 17 3 4 Socket connector pin assignment A-coded (Normal key) Wiring #7 PCA-1557798 Y connector (2 x M8-M12) Socket connector pin assignment 40.7 9.9 15.8 8.3 14.8 1 q 1 3 3 4 1 2 3 4 1 2 1 4 21.8 21.7 13 12 M8 4 3 w 1 3 3 4 Plug connector

ZP

4 (Breadth x Length) 2004 S AMJ Silicon rubber 3507 U 3.5 x 7 Urethane rubber 4010 F 4 x 10 Misc.

9.8

M5 x 0.8 21.4 10.2 6 Digital Pressure Switch Series ZSE10(F)/ISE10 Panel fitting dimensions 57.2 0 0.4 14.8 0 0.4 4 x R2 or less 57.2 0 0.4 28.8 or more (Rear ported) For side ported models, dimensions differ depending on the fittings and tubing. 14.8 x n pcs. + 3 x (n pcs. 1) 4 x R3 or less ZSE10(F)/ISE10 M5 R With DIN rail The DIN rail needs to be prepared by the customer. 6.4 M5 x 0.8

IDU/IDF

3 x 60 = 2736g/h.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

u w t e r !

Nozzle Type Ionizer

8 5 Width across flats 12 10.6 17 Nozzle Type Ionizer IZN10E Series Dimensions L-bracket IZN10-B1 17 (Mounting angle adjustable range) 40 2 x M3 7.5 2 x 3.4 2 x R10 25 5 40 50 Internal mounting 2 x 3.4 20.5 33 30 30 52 46 44 26 17 11 26 12 8 x 3.4 2 x Hexagon socket head cap screw M3 x 6 (Accessory) 40 5 22.7 Internal mounting Pivot mounting 21 33 30 (Mounting angle adjustable range) (83)

JXCx-OMX0009

[Unit: mm] If the current position is within the range between the W area end 1 and W area end 2, the WAREA will be turned ON. * If W area output end 1 >W area output end 2, the alarm Parameter W-AREA1 XX Stroke (-) to Stroke (+) of the basic parameter ALM will be activated.

Speed Controller: Standard Type Series AS In-line Type 1

Description Material Note q w e r t y u i o Brass Brass Brass Brass Brass HNBR Brass NBR NBR Body B Body Needle Lock nut Handle U seal Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated AK ASS ASR Electroless nickel plated 4.5 x 3 x 0.75 2.2 x 0.8 x 0.7 Needle guide O-ring O-ring ASF Construction: AS1000-M5 Component

VR4151/4152

3 w !2 !

A_HEC-OM-K001

W: Sep. X: Oct. y: Nov. Z: Dec. Mfg. year L: 2007 M: 2008 N: 2009 9.1 How to order and manufacturing code indication 9-2 A_HEC-OM-K001-1.7 Chapter 9 Appendix 9.2 Specifications 9.2.1 Specification table Table 9-2 Temperature Controller Part No.

2/3 Port Valve

0.8 Depth 5.5 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 X 8 7 X 0 9 X 2 9 X 2 202.5 232 267 286.5 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B M6 X 1 Depth 6 70 92 109 M8 X 1.25 Depth 6 M8 X 1.25 Depth 6 4.2-34 2 Port Valve for Steam Steam Valve SeriesVND 2 Port Valve for Steam MAX.180oC

NCRAI seies

E* A73L D-A73L Parls M 3 X 0 . 5 X 3 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 tvl3x0.5x5 @ Rotary Actuator Series:NCRAl l n ck and pinion rype ||m 30(17Ie) 50121,63(2 %),80(3 %),1 0o{4) Fluid Air Air o o o o 90' 180' 100" 190" Rotatio 1 ) o r)o Basic o o Shaft Singleend Doubleend o o o Body option With ctshion a Wlthalctqruitph -oand to 200. lrom 180" model.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

4) Connector (option) Sensor connector port r e w q Power supply / Output connector port Pin no.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

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Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

For notes w and e, refer to the left. 4B/6B 870 M20 X l 500 AMD1000 w When the element has reached its replacement interval, replace it immediately with a new element.

VQC

The load ratio is obtained by the following formula: ((Load weight x 9.8)/Theoretical output) x 100% Conditions Base piping Series CJ2 Series CM2 Series MB, CA Series CS1 T0604 x 1m Tube x Length Speed controller Silencer Tube x Length Speed controller Silencer Tube x Length Speed controller Silencer AS3001F-06 AN200-KM8 VQC1000 T0604 x 1 m T0806 x 1 m AS3001F-08 AS3001F-06 VQC2000 AN200-

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

1010 (FKM) 1.3 x 1011 (FKM) A w, e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Sealmaterial Symbol Seal material Compound no.

Vacuum Gripper

Center of gravity (ZXP7A41-ZPB25JN-X1) Y Y Z X (Unitmm) Center of gravity Z X Y Z 0.01 0.68 56.48 X -21No. TQ1230001-OM102-B 5.3. Suction cup with adapter *It is shown here for representative model only. See the suction cup catalog for the other models.