MHx-OMZ0005

JMHZ2-16D mm 16 MPa 0.1~0.7 (oC) -10~60 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 (mm) 10 3 4M40.7 8 3.4 8 2 14 - 4-2.3 V114-5LU (oC) -1050( (ms) ON5 OFF4 Hz 20 / m/s2 150/30 V114-5LU L (L) (V) 24 -1010% (W) 0.4 [0.40.1] P .1367 LED 300 15 - 4-3.

MHT2

Pressure 0.6 MPa 0.4 MPa 0.2 MPa Opening/Closing angle (Both sides) 12-9-3 4 Series MHT2 Dimensions 8-M6 x 1 mounting thread Thread depth 10 (Both sides) MHT2-32D 4-M6 x 1 thread depth 10 Mounting thread Open 28 Closed 3 Finger closing port Rc 1/8 Finger opening port Rc 1/8 4-M6 x 1 thread depth 15 Mounting thread 4-M6 x 1 bottom hole dia. 5.1 Thread for mounting attachment MHT2-40D 8-M8

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Description Material ML1C25G ML1C32G C-7 SO-015-24 SO-016-9 C-4 SO-010-16 C-6 AS568-048 TMY-32 RCS-10 GMY32 ML1C40G C-7 SO-020-31 SO-015-20 C-4 SO-010-16 C-8 C-150 TMY-40 RCS-12 GMY40 O-ring O-ring O-ring Needle gasket O-ring O-ring O-ring Tube gasket Cushion seal Piston seal Scraper Bypass gasket O-ring $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 %8 NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR

MHT2

Finger closing port Rc 1/8 Finger opening port Rc 1/8 4-M6 x 1 thread depth 15 Mounting thread 4-M6 x 1 bottom hole dia. 5.1 Thread for mounting attachment MHT2-40D 8-M8 x 1.25 mounting thread Thread depth 10 (Both sides) 4-M6 x 1 thread depth 10 Mounting thread Open 27 Closed 3 Finger closing port Rc 1/8 Finger opening port Rc 1/8 4-M8 x 1.25 thread depth 12 Mounting thread 4-M8 x 1.25

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Local Area: (800) 258-9200-www.stevenengineering.com Nil Without bracket 1 4" One-touch fitting for One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 4 SYA7000 F1 With foot bracket (2 position single only) SYA3000 5 16" One-touch fitting for VR F2 With side bracket Series One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10

VPA4

Symbol 0 P Side 1 E Side Side Bottom (1) Side Other A, B Side 9 Note 1) Size of A, B port bottom ported: Rc 3/8, 1/2 Option Stations Base specifications 2 1 Individual exhaust Common exhaust 02 2 stations 10 10 stations How to Assemble Manifold To order valves and blanking plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

10 5 10 Note) 15 Note) 20 Note) 5 5 1 pc.

EX600-SMJ_eng

Displays the diagnosis status of the unit. 10 to 57 Hz: constant amplitude 0.75 mm p-p 57 to 150 Hz: constant acceleration 49 m/s2 Communication error has occurred. Communication is normal. Communication is not established. Or, the power supply for control or input is Off. A unit other than the SI unit has been diagnosed and detected. The power supply voltage for output is abnormal.

VND

Normally closed Normally open LVQ 0.7 12 (P1) 10 (P2) Pilot pressure should be within the range of A against the operating pressure.

D-F6N/D-F6P/D-F6B

Electrical entry direction In-line Wiring type 2-wire 3-wire NPN PNP Output type Applicable load IC circuit, relay, and PLC 24 VDC relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 V) Current consumption 10 mA or less Load voltage 24 VDC (10 to 28 VDC) 28 VDC or less Load current 2.5 to 40 mA 40 mA or less Internal voltage drop 4 V or less 0.8 V or less at 10 mA (2V or less at

Slit Valve

10 O-ring: FKM Internal leak Note 2) (Pam3/s) O-ring: Kalrez 6.5 x 10 9 6.5 x 10 8 Internal leak Note 2) (Pam3/s) at reversed pressure [Reversed pressure: 0.1 MPa (abs) or less] O-ring: FKM O-ring: Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150 Operation temperature Note 3) (C) Actuator part 5 to 60 Inert gas Fluid 0.6 to 1 Operating time Note 4) (s) FKM,

Exhaust Cleaner for Vacuum Pump AMV Series

AMV6-14 AMV15-20 AMV37-20 AMV75-30 AMV160-40 1.6 3.0 5.9 10 43 59 0.3 0.5 1.0 1.0 10 10 360 650 1,500 3,700 7,500 16,000 1 1 1/2 2 2 80 (3B) JIS 10K FF flange 360 650 1,500 3,700 7,500 16,000 100 (4B) JIS 10K FF flange Construction Gasket Cover Element Tension bolt No Description Material Component Parts 1 2 3 4 Holder Case Cover Tension bolt Aluminum alloy Carbon steel Carbon steel Carbon

EX600-SEC_eng

Tightening torque: 0.7 to 0.8 Nm. 10 to 57 Hz: constant amplitude 0.75 mm p-p 57 to 150 Hz: constant acceleration 49 m/s2 : Mode 3 is a function for extension in the future. (not to be used.) Vibration resistance After maintenance is complete, perform appropriate functional inspections. Stop operation if the equipment does not function properly.

MHx-OMZ0003

JMHZ2-16D mm 16 MPa 0.1~0.7 (oC) -10~60 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 mm 10 3 4M40.7 8 3.4 8 2 13 - 4-2.3 V114-5LU (oC) -1050( (ms) ON5 OFF4 Hz 20 / m/s2 150/30 V114-5LU L (L) (V) 24 -1010% (W) 0.4 [0.40.1] P .1367 LED 300 14 - 4-3.

ML1

Model PP SS VV OO Gasket QQ RR TT UU ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 16.5 C11.2 18 46 30 12 32 22 8 17 23.5 12.5 10 C14 53 40 34 26 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 X 0.8 M6 X 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120 53.5 28 40 242 36.5

VG342

Push type (Non-locking) Unrestricted 150/50 Shock/Vibration resistance (m/s2) (2) Terminal no. 2 () Manual override Mounting orientation 48 VDC In the case of indicator light assembly Terminal no. 1 (+) 1.1 kg Weight For grommet type Note 1) Based on dynamic performance test JIS B 8374-1981.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Solenoid Specifications 100, 200 VAC, 50/60 Hz; 24 VDC Coil rated voltage How to Calculate the Flow Rate 15 to +10% of rated voltage Allowable voltage fluctuation For obtaining the flow rate, refer to page 31-10.

Multistage Ejector Series ZL

Suction cover PVF 1 9 Sound absorbing material B ZL112-SP01 Front cover Without valve PVF 2 10 Sound absorbing material A (set no. for 9, 10 &11) End cover PE 3 11 Suction filter Body 4 When ordering a vacuum pressure gauge or a digital vacuum pressure switch separately, use the part numbers shown in the option specifications on page 3.

EX600-SDNA_eng

Displays the diagnosis status of the unit. 10 to 57 Hz: constant amplitude 0.75 mm p-p 57 to 150 Hz: constant acceleration 49 m/s2 Minor communication error. Fatal communication error. The element in SI unit is broken. Connection is not established. Communication is normal. Double checking the node address. Communication error. The power supply for control and input is Off.

SYA3000/5000/7000

Port size Applicable series C4 C6 C4 C6 C8 C8 C10 Nil Without bracket 5 16" One-touch fitting for One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 4 SYA7000 F1 With foot bracket (2 position single only) SYA3000 3 8" One-touch fitting for F2 With side bracket Series SYA5000 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10