C95

B3 TG1 T I1 (min) I2 FL H d1 d2 d3 CN SR (max) R 32 14 34 3.3 3 5 22 10 30 10 45 32.5 5.5 10.5 6.6 11 17 40 16 40 4.3 4 5 25 10 35 12 55 38 5.5 11 6.6 13 20 50 21 45 4.3 4 5 27 10 40 16 65 46.5 6.5 15 9 18 22 63 21 51 4.3 4 5 32 12 45 16 75 56.5 6.5 15 9 18 25 80 25 65 4.3 4 5 36 16 45 20 95 72 10 18 11 22 30 100 115 25 75 6.3 89 4 5 10 41 16 55 18 11 20 22 32 Mounting style (ES) Bore size

Magnetically Coupled Rodless Cylinder

5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R25

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R25

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Specifications Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 10 to 50 (No freezing.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 Note 1) Values at ambient temperatures, excluding gas permeation.

Air Cylinder Series CS1

10 10 10 10 CJP 17 17 17 17 17 CJ2 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-A3/A44 D-G39/K39 BS1-125 BS1-140 BS1-200 BS1-160 BS1-180 7.5 13 12 7 8 CM2 D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL CG1 D-F5/J5/F5W D-J59W/F5BAL D-F5NTL/F59F BS4-125 BS4-125 BS4-160 BS4-180 BS4-200 5 5 5.5 6 6 MB D-G39/K39 [Stainless Steel Mounting Screw Kit] 11 11 10 10 10 MB1 Since this is a guideline

Rotary Actuator/Vane Type

[mm] Size A B C D E (g7) F (h9) G1 G2 H J K L M1 M2 N P Q R S T U V1 V2 W X Y1 Y2 Z Q1 Q2 Q3 Q4 10 29 22 8 14 40.004 0.016 9 0 0.036 1 1 7 5 9 0.5 16.5 8.5 9.5 14.5 M3 x 0.5 3.5 3.5 M3 x 0.5 21 10.6 3 37 44 19.8 31 25 17 41 15 34 25 9 18 50.004 0.016 12 0 0.043 1.5 1.5 6 6 10 0.5 19 11 10 17 M3 x 0.5 M3 x 0.5 3.5 3.5 M3 x 0.5 24 12.6 3 44.5 52 21 36 29 21 48 20 42 34.5 10 20 60.004 0.016

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

10 10 10 40 40 40 40 5 6.4 5 6.4 12 5 13 10 90 7 15 90 (mm) G 86 112 FZ 10 12 FY 54 68 FX 59 74 EC 41 48 EO 65 80 DO 103 132 DC 79 100 BA 134 166 CA 18 24 CB 44.5 54 BC 134.6 166.6 BD 56 66 AD 78 102 K 15 21 14 17 AC 6 8 J 38 52 AA 135 175 AB 129 167 H 31 43 Model MHSL3-100D MHSL3-125D BB 184 234 L SB 14 17.5 SA 9 11 R 118 148 NB SC 31 32 Q 23 31 NA 37 43 O 7.5 10.5 TA M8 x 1.25 M 4 6 P

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

17 140 14.5 10 17 160 13 10 17 180 14 10 17 200 14.5 10 17 D-Z7/Z80 D-A3/A44/A5/A6 D-A59W D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-F5/J5/F5W/J59W D-F5BAL/F5NTL/F59F D-G39/K39 12 13 7 7.5 8 6 6 7 7 7 6 6 5 5.5 5 11 11 10 10 10 Since this is a guideline including hysteresis, not meant to be guaranteed.

Compact Cylinder

Minimum Auto Switch Mounting Stroke (mm) Auto switch model D-M9W D-M9A Bore size (mm) D-A9 D-A9V D-M9 D-M9V D-M9WV D-M9AV D-P3DW No. of auto switch mounted 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 10 10 10 10 10 10 10 5 10 10 10 5 10 5 10 5 10 5 10 5 15 15 10 10 10 10 10 5 15 15 15 15 15 15 15 15 15 15 15 15 5 5 5 5 5 5 5 5 5 5 10 5 10 5 10 5 10 5 10 5 10 10 10 10

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

9 M18 x 1.5 9 H M18 x 1.5 10 H Width across flats 16 45 Width across flats 16 Width across flats 37 28 4 x M4 x 0.7 Width across flats 24 3 x M3 x 0.5 G G 10 10 F F E E Y Y 3 3 18 34 C C A A B D B D Dimensions (mm) Dimensions (mm) A B C D E F G H Y A B C D E F G H Y Model Model ZPT40HBJ25-01-A18 ZPT63HBJ25-01-A18 72 127.5 83 138.5 50-01-A18 50-01-A18 107 162.5 118 173.5 40 41 28 43 20.5

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

port 2 x 7 Mounting hole Relief port (mm) H G FZ FT E F FX FY AL A Bore size B2 24 22 22 18 D B B1 Stroke range 0 50 45 45 41 75 150 to 1000 150 to 700 150 to 700 41 32 32 26 14 12 10 8 16 13 13 13 5 4 4 4 12.5 11 10 10 19.5 19.5 15.5 . 40 40 34 17 17 13 60 60 60 40 32 25 20 20-0.033 FX 26-0.033 0 82 36 75 75 26-0.033 0 20, 25 and 32 22 200 to 1000 32-0.039 0 66 21 52 247 217 204 200 191

Mechanically Jointed Rodless Cylinder Series MY1

MY1B10G Stroke 10 10 7.3 7.8 2 x M5 x 0.8 (Hexagon socket head plug) 2 x 2 x 3.4 through-hole Bottom side M4 x 0.7 depth 7 4 x M3 x 0.5 depth 5 30 50 5.9 5.9 25 26 22 28 17 100 + Stroke 5 Floating bracket mounting thread (2 x M3 x 0.5 thread depth 5) 2 x 5 counterbore depth 2 25 24 3.5 1 2 x M5 x 0.8 (Port) 1 3 3 2.2 6.8 1.7 7.3 SMC SMC 27 20.2 19.5 10 10 10 10 15 15 8.5 12 12 8.5 55 110

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Type 40/Type 41 How to Order SS3YJ7-40 -05 --01 Applicable solenoid valve SYJ714SYJ714MSYJ724SYJ724MApplicable blanking plate assembly SYJ700-10-2A R port 1/4 R port 1/8 P, R port thread type Manifold type Stations 40 41 Type 40 Type 41 Nil Rc G NPT NPTF 2 stations : 20 stations 02 : 20 F N T A A A A 01 1/8 A port size P port 1/8 P port 1/4 A port 1/8 Note) If there are more than 6 stations

Integrated Controller

200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mep L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 600 600 600 600 L3 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg

MXS Series Air Slide Table

Model F 50 50 50 60 35 60 70 70 80 FF 40 40 40 50 35 60 70 70 80 GA 25 25 25 35 50 54 107 155 195 KA NA 2 2 2 2 2 2 4 4 4 M 83 83 83 93 108 147 200 254 306 N 4 4 4 4 6 6 6 8 8 HA 35 35 35 35 35 70 70 76 88 ZZ 97 97 97 107 122 161 214 268 320 G 15 15 15 15 15 19 37 41 19 H 45 45 45 55 35 35 35 38 44 NN 2 2 2 2 3 4 5 6 7 I 10 10 10 10 10 10 58 70 87 J 44 44 44 54 69 108 113 155 190 K 31 41

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A A1 MM U1 L1 RR1 A1 L1 E1 MM RR1 U1 0.4 0.2 + 0.2 + 0 0.2 0.4 0.2 0.4 10 12 16 20 +0.002 0 5 6.4 8 10 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 +0.002 0 5 6.5 8 10 #8-32UNC 10 12 16 20 12 16 20 25 10 12 16 20 14.6 16.6 21 25.6 RCS-01 RCS-015 RCS-02 RCS-025 RCD-01 RCD-015 RCD-02 RCD-025 21.5 32 34 41 6 6 6 8 16 25 25 30 #8-32UNC #8-32UNC #10-32UNF 1/4-28UNF 6.3 12 10.3 18 7 14 11.5 14

CJ5-S

20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 1/4 109 174 80 Up to 1400 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 3/8 130 208 100 Up to 1500 40 37 41 125 60 30 100 14 10 29 20 71 16 M12 x 1.75 10 26 8 M26 x 1.5 100 1/2 131 210 110 Flange bracket and plug bolt are installed when shipped from factory. 10-14-14 15 Stainless Steel Cylinder Series CG5-

CJ5-S

20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 1/4 109 174 80 Up to 1400 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 3/8 130 208 100 Up to 1500 40 37 41 125 60 30 100 14 10 29 20 71 16 M12 x 1.75 10 26 8 M26 x 1.5 100 1/2 131 210 110 Flange bracket and plug bolt are installed when shipped from factory. 10-14-14 15 Stainless Steel Cylinder Series CG5-

Basic Type/Direct Mount Type

13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 K 5 4 11 8 10 15 16 25 26 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55 69 Model CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40