Slit Valve

A6063 Main material of vacuum part Body A5052 Bonnet A5052 Others Stainless steel 304 Exhaust direction Free Mounting direction Vertical Port size M5 x 0.8 Rc 1/8 End-lock mechanism With lock mechanism at opening/closing position Note 5) Cylinder volume (L) 0.12 0.2 Non-cassette type 8 14 Cassette type: Standard 12 20 Weight (kg) Cassette type: Half MESK 12 20 Cassette type: Full MESK 11

Foot Pedal Type

11 Symbol B A (A) 4 (B) 2 2 x Rc1/8 (Port 2, 4) 38.2 26.2 2 x M5 x 0.8 (Port 3, 5) 12 14 Rc1/8 (Port 1) 3 (EB) 1 (P) 5 (EA) Total Travel (T.T.) 2.5 Full Operating Force (Reference value)(F.O.F.) 55 N (at 0.5 MPa) 530.2 1590.2 Safety Instructions Be sure to read Handling Precautions for SMC Products (M-E03-3) before using.

Compact and

Piping diameter ZU05mA 0.5 90 48 7 13 14 3.9 18.6 ZU07mA 0.7 11 16 28 4.3 19.1 The piping diameter for each port should be the standard size of One-touch fitting.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

HAA7-06 HAW2-04 AT6C-04 AFF2B-03 IDF1D-1 AM150-03 AMD150-03 1.5 0.2 HAA7-06 HAW2-04 AT6C-04 AFF2B-03 IDF2D-1 AM150-03 AMD150-03 2.2 0.3 HAA7-06 HAW7-06 AT6C-04 AFF2B-03 IDF3DAM150-03 AMD250-03 3.7 0.5 HAA7-06 HAW7-06 AT6C-04 AFF4B-03 IDF4DAM250-03 AMD250-03 5.5 0.7 HAA7-06 HAW7-06 AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11

AMD

precautions on every series. 14-20-22 2 Micro Mist Separator Series AMD How to Order AMD150 to AMD850 AMD 250 03 J B Body size Option 1 4 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard Standard Standard J Drain guide B female thread R IN-OUT reversal direction Accessory (Option) Symbol Description Bracket T Element service indicator Nil B 3 4 650 1 850 11

Air Tank Series AT 1

R 1/2 R 3/4 R 11/4 R 2 R 1 Accessory (2) Rc 1/2 Valve for drainage (1 pc.) Pressure gauge (1 pc.) R 3/8 x 100 M16 x l 250 M16 x l 300 M24 x l 500 M16 x l 500 Anchor bolt (4 pcs.) Note 1) Manufactured upon receipt of order Note 2) The accessories should be mounted by user.

IDUS/IDFS

AM Misc. 14-18-11 12 Series IDUS/IDFS Specific Product Precautions 2 Be sure to read before handling. Protection Circuit Time Delay for Restarting Caution Caution When the air dryer is operated under the following conditions, the protection circuit is activated, the light goes off and operation stops. Allow at least three minutes before restarting the dryer.

RSH

As a rough guide, tighten the screw an additional 90C after feeling a tight resistance. 4.3-11 Lever Detection Switch (Proximity Switch) Mounting Position Proximity Switch Specifications/Manufacturer: OMRON Co. Ltd. E2E-X1C1 E2E-X2D1-N Model no.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

4 6-14-10 11 Series NCM Construction: Single Acting, Spring Return t y q !1 !2 e r !0 w o CJ1 CJP CJ2 CM2 CG1 !

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data 8-16-11 11 Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F 10, 15, 25 How to Order CY1F R 10 300 F9BW Number of auto switches Magnetically coupled rodless cyinder, low profile guide type Nil S n 2 pcs. 1 pc. n pcs

Connector Mounting Position: Both Sides 11~20 Stations, Stations: 11 Stations, SUP/EXH Block Mounting: 2~10 Stations: One Side, 11~20 Stations: Both Sides, Port Size: ø6 One-touch Fitting

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

R Right side parallel L Left side parallel Symbol LEKFS25 LEKFS32 LEKFS40 H 20 24 30 A 12 16 20 B 6 8 10 E Battery-less absolute (Step motor 24 VDC) y Motor option t Stroke*1 u Actuator cable type/length Robotic cable [m] Nil None R8 8*2 R1 1.5 RA 10*2 R3 3 RB 15*2 R5 5 RC 20*2 Nil Without option B With lock Size Stroke 100 200 300 400 500 600 25 V V V V V 32 V V V V V 40 V V V V V 11

Digital Pressure Switch (Built-in Regulator Type) ISE35 Series ®

Compact manifold regulator ARM10/ARM11 ZS-32-D Mounting option Direct precision operated regulator ARP20 (K) /ARP30 (K) /ARP40 (P) 126 A Digital Pressure Switch ISE35 Series Refer to pages 11 and 12 for Pressure Switch Precautions.

ITVH

Right angle type cable connector 3 m 52 10 ARJ (33) Straight type cable connector 3 m AR425 to 935 52 12.5 ARX AMR Setting part ARM 10 M12 x 1 Cable connection thread (Plug type) 5.5 8 ARP 111 11 Digital pressure display IR-A M5 x 0.8 Solenoid valve EXH Breathing IR M4 x 0.7 depth 8 F.G.

Pulse Valve

Description Material 1 Body ADC 8 Seal NBR 2 Main valve Resin 9 Washer Fe (Chromated) 3 O-ring NBR 10 Compression nut ADC 4 Bonnet ADC 11 Hexagon bolt Stainless steel 5 Sub-valve Resin 6 O-ring NBR 7 Bonnet ADC JSXFAF/Direct Piping Type Port size: Sizes 06, 10 Port size: Size 14 i u y t t r r e e w IN w IN q q Component Parts Component Parts No.

Multi-connector with One-touch Fittings DMK Series No. of Connecting Tubes: 6, 12

34 11 4 12 5 7 11 43 55 38 Click here for applicable color caps. 250 B

Soft Start-up Valve

Furthermore, connect soft start-up valves to the outlet side of the F.R.L. combination. 11 AV2000-A/3000-A/4000-A/5000-A Series Specific Product Precautions 3 Be sure to read this before handling the products. Refer to the back cover for safety instructions.

Wireless System

End Plate (D side) p. 11 Dimensions p. 12 LED Display p. 15 Technical Data p. 22 Important p. 22 Safety Instructions Back Cover 6 Wireless System EX600-W Series RoHS How to Order EN W EX600 1 SI Unit Wireless compatible Output type Symbol Specifications 1 PNP 2 NPN SI unit Symbol Specifications Note EN Wireless master unit For EtherNet/IP SV Wireless slave unit Wireless master

Industrial Filters

(Refer to 11. Nominal filtration accuracy on page 118.)

AR20-B to AR60-B

13 90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2 Note 1) The dimension of B is the length when the filter regulator knob is unlocked.