IO-Link/ELECTRO-PNEUMATIC REGULATOR

(displayed alternately) (4) Press S-key. flashes on the display (5) Press and S keys for 5 seconds or more. (press S-key to (3)) is displayed (6) "Initialize" is executed, after 5 seconds. (Release keys till less than 5 seconds to (4)) Turning off for 1 second (7) Returns to the state immediately after turning on of the power supply.

Manifold Specifications

(Put packing B w on the surface contacting to the end plate.) (11 stations) 4 stations (12 stations) 5 stations 3. For a style with a D-sub connector, open the cover !4 and insert the pin of lead wire assembly !0 as shown in the right figure.

CJ2

5 !

Fieldbus system (DeviceNet compliant)

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

Angle Seat Valve /

Step 4 Item Selected item Symbol r VXB2 1 5 A H B L L Yes r Indicator For special options, refer to page 5. Step 5 3 Angle Seat Valve / Air Operated Type VXB Series For Steam Can be used with air or water Flow Rate Characteristics N.C.

Stainless Steel One-touch Fittings Series KG

L M Nylon Urethane D 4 KGH04-00 32.5 10.4 16 5.6 5.6 3 6 KGH06-00 34.5 12.8 17 13.1 13.1 5 8 KGH08-00 38.5 15.2 18.5 26.1 18.0 7 10 KGH10-00 42.5 18.5 21 41.5 29.5 11 12 KGH12-00 44.5 20.9 22 58.3 46.1 14 Different dia. straight: KGH Part No. L M1 Effective orifice(mm 2) Nylon Urethane Applicable tube O.D.

Series KG Stainless Steel One-touch Fittings

L M Nylon Urethane D 4 KGH04-00 32.5 10.4 16 5.6 5.6 3 6 KGH06-00 34.5 12.8 17 13.1 13.1 5 8 KGH08-00 38.5 15.2 18.5 26.1 18.0 7 10 KGH10-00 42.5 18.5 21 41.5 29.5 11 12 KGH12-00 44.5 20.9 22 58.3 46.1 14 Different dia. straight: KGH Part No. L M1 Effective orifice(mm 2) Nylon Urethane Applicable tube O.D.

5 Port Air Operated Valve

hole M5 x 0.8 [4 (A), 2 (B) port] 9.3 27.8 17.8 20.3 20.3 4A 2B P P P 55.5 4A 2B 4A 2B 4A 2B 4A 2B 4A 2B 34 17 6 10 8.2 (Not used.) 5 2 x 5.5 (For mounting) (Pitch) P=27.5 23.5 1/8 [4 (A), 2 (B) port] (Station 1) (Station n) 1/8 [Pilot port: Lateral (-P)] 61.5 43 25 EB EA EB EA 11 M5 x 0.8 [5 (EA), 3 (EB) port] 18 (Pitch) P=27.5 Dimensions (Common to Type 30 and Type 31) n: Stations 20 11

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Dimensions n L 2 39 31 3 50 42 4 61 53 5 72 64 6 83 75 7 94 86 8 105 97 9 116 108 10 127 119 11 138 130 12 149 141 13 160 152 14 171 163 15 182 174 16 193 185 17 204 196 18 215 207 19 226 218 20 237 229 L1 L2 1.13-11

MIST SEPARATOR

SAFETY INSTRUCTIONS 1-5 2. APPLICATION 6 3. SPECIFICATIONS 6 4. HOW TO ORDER 7 5. OPTIONAL BRACKET ASSEMBLY 8 6. MAXIMUM APPLICABLE FLOW RATE 9 7. TROUBLESHOOTING 9 8. CONSTRUCTION / PARTS LIST 10 9. SPECIFICATIONS OF BOWL ASSEMBLY 11-18 10. REPLACEMENT PROCEDURE 19-22 11. DISASSEMBLY DRAWING 23 12.

MICRO MIST SEPARATOR

SAFETY INSTRUCTIONS 1-5 2. APPLICATION 6 3. SPECIFICATIONS 6 4. HOW TO ORDER 7 5. OPTIONAL BRACKET ASSEMBLY 8 6. MAXIMUM APPLICABLE FLOW RATE 9 7. TROUBLESHOOTING 9 8. CONSTRUCTION / PARTS LIST 10 9. SPECIFICATIONS OF BOWL ASSEMBLY 11-18 10. REPLACEMENT PROCEDURE 19-22 11. DISASSEMBLY DRAWING 23 12.

HEC_001W-E

SPECIFICATIONS -5-1 5.1 SPECIFICATIONS OF HEC001 -5-1 TABLE5-1 SPECIFICATIONS OF HEC001 -5-1 5.2 SPECIFICATIONS OF HEC003 -5-2 TABLE5-2 SPECIFICATIONS OF HEC003 -5-2 5.3 PERFORMANCE CHART -5-3 5.3.1 PERFORMANCE OF HEC001 -5-3 1) COOLING CAPACITY -5-3 2) HEATING CAPACITY -5-4 3) PRESSURE LOSS OF RADIATING WATER -5-5 5.3.2 PERFORMANCE OF HEC003 -5-6 1) COOLING CAPACITY -5-6 2) HEATING CAPACITY

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

6.5 5 3 24 5 3 24 6 3 5 4.5 24 4 4 4 33 33 33 (mm) I 4 5 5 Model MHS2-16D MHS2-20D MHS2-25D G 25 27 28 FZ 3 3 5 FY 11 13 14.5 FX 12.5 14.5 17 CB 11 13 15 EC 10 12 14 EO 14 16 20 NB 5h9 6h9 6h9 DC 30 36 42 NA 8 10 12 DO 34 40 48 K 4 5 6 B 30 36 42 Q 6 7 8 J 10 12 14 AA 35 38 40 AB 32 35 37 O 2 2.5 3 P M3 x 0.5 M5 x 0.8 M5 x 0.8 0 -0.030 0 -0.030 0 -0.030 Model MHS2-16D MHS2-20D MHS2-25D VA

OMR0032

NP (5) The "BUSY" output turns ON. OUT0 (4)(6)(9)(11) (INP) Output (6)When the traveling is completed, "OUT0" (INP) output turns ON. (5)(7)(10)(12) BUSY (7) The BUSY output turns OFF. Traveling to target position 1 is completed. (8) Enter pulse input signals.

Digital Flow Switch

Monitor unit Monitor unit Monitor unit Monitor unit 3% F.S. (15 to 35C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 2% F.S. (15 to 35C) 5% F.S. (0 to 50C) (15 to 35C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) Repeatability 1% F.S.

HRL

Users equipment 2 1 2 Circulating fluid outlet Oscillator CH1 2 2 Circulating fluid return port 3 5 4 5 Circulating fluid outlet Optical system CH2 5 5 Circulating fluid return port No. Description Size Recommended part no.

Cylinder

> I A, ' Y.POO6 I 6 5 6 3g 040 112 3,5 M3XQ,5 5 3 5 I ~POO6 6 5 6 I 3 I-g040 112 3,5 M3 x Q,5 5 3 5 1 4 -1 -11'(51.0,1 '10 $,~ ~o ! 5+ g"'" 116 5:5 M4XO,7 YPOIO , '10 6.S 10 sg04I 16 5.5I M,4 XQ,7 71' 5 a 6.3 7 I 5 a 1 6.3 YP015 I 15 7 12 ~-g.048 19 7 M5XO,a 9 I 6 10 ,7.8 10 7,a ...!:!'.015 l 15 7 12 6 -g~ 19 9 I 6 7 M5 x O.B . ~I ~--~~ K ~~ P~ ' ~k I -TFunnion Pin' . , nue ' :e In .

EXxx-OMS0026CN

Enable Val165000 5 ON/OFF ON/OFF 10 4 Disable ON/OFF ON/OFF 0 11 83 1( 2Hold/Clear Via software 3PLC 4 5x1000 -48No.EX-OMS0026CN No.

IZx-OMV0005

Note 5) Refer to cautions on page 9 if IZN10E-11-(Female threads for piping) is used.

MGQ

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30