Particle generation measurement test classify the 13/22-MXQ as grade 3, 4 which is determined by the type of adjuster option that is selected.  After inspection, the 13/22-MXQ is blown with high purity air (clean bench/class M3.5) in a clean environment.  It is then sealed and shipped in an anti-static double bag.

Modular F.R.L. Pressure Control Equipment

24.5 X 15.5 15.5 15.5 Fitting size 4, 5/32 6 1/4 Y 21.5 22 24.5 X 10.5 10.5 10.5 Fitting size 4, 5/32 6 1/4 10.5 5.5 X X Y Y 236 Compact Manifold Regulator/Common Supply Type Series ARM11A Replacement Procedure is P.453 Construction Actuators Modular F.R.L.

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: H (Body: Hastelloy® C-22; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet: No Gauge

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Orange): TD 4 (Blue): RD (PCA-1446566) Plug, D-coded (Viewed from the plug side) 1 (Orange/White): TD+ 2 (Green/White): RD+ 3 (Orange): TD 4 (Green): RD (EX9-AC EN-PSRJ.PCA-1446553) Pin assignment 3 4 Fixed cable length 1 m, 2 m, 3 m, 5 m, 10 m 5 m Cable O.D. 6.4 mm 6.5 mm Applicable cable1 4.0 to 8.0 mm Conductor nominal cross section 0.14 mm2/AWG26 0.34 mm2/AWG22 0.14 to 0.34 mm2/AWG26 to 22

Digital Flow Switch

Peak/Bottom value reset: Peak and bottom value are reset. 22 PFG300 Series Selection of display on sub screen The display on the sub screen in measuring mode can be set.

RSH/RS1H

22 13.5 22 6 63 15.5(14) 24.5 24.5 17 24.5 9.5 RS H A 80 22(20.5) 37 37 23.5 37 16 The values inside ( ) are for D-Z73.

MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B A B B W A stroke 6 5 to 30 0 13 3.5 3.5 6.5 17 2.5(5) 17 4.5 5 to 20 13 17 17 10 25 3.5 16 7.5 7.5 2.5 20 1.5 20 0.5 30 15 19 (1) 19 5 23 27 27 10 18 22 22 15 23 27 27 16 4 8 8 2 2 0 A B 20 18 22 22 Bore (mm) 6 10 16 25 23 27 27 (0.5) 10 6.9 30 23 27 27 14 8.8 19 13.9 Note 1) Negative figures

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Bore size (mm) 40 50 63 16 20 25 32 Type Side support A MY-S40A MY-S63A MY-S16A MY-S20A MY-S25A MY-S32A Side support B MY-S40B MY-S63B MY-S16B MY-S20B MY-S25B MY-S32B For detailed dimensions, refer to page 8-12-22. 8-12-16 17 Series MY1W Mechanically Jointed Rodless Cylinder With Protective Cover Construction MY1W o !6 !3 !1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !

NARM Series

If it does not lock easily, turn the handle slightly clockwise or counterclockwise before pushing it. 1 3 22 15 43.5 72.5 101.5 130.5 159.5 Supply pressure (psig) 4 NARM3000 36.3 Secondary pressure (psig) 30 22 15 43.5 72.5 101.5 130.5 159.5 Supply pressure (psig) 145 Return to Menu NARM Series Specialty Regulators Regulator for Manifold NARM2500, 3000 Construction Main Parts Component Parts

80

A Compact Direct Operated 2 Port Solenoid Valve VDW Series Air Medium vacuum Water Dimensions/Single Unit Body material Aluminum Grommet 2 x 3.4 Mounting hole W Y X U D F Q 300 Full wave rectifier (AC type) C R E G B B1 A 2 x P Port size VCH VDW VDW SX10 VQ LVM [mm] Mounting bracket dimensions (XD) Electrical entry Model Port size P A B B1 C D E F G U W X Y Grommet Q R VDW2 M5, 1/8 15 22

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

Without adjuster type is unavailable for series 11-MXP6. 11-MXP How to Order 11MXPJ6 Clean series 11 Vacuum suction type 11 MXPJ6 10 22 MXPJ6 10 11-MXPJ6 Copper, fluorine and silicon-free + low particle generation Stroke 5 10 5mm 10mm 22 Vacuum suction type With auto switch type is unavailable for 11-MXPJ6.

Particle generation measurement test classify the 13/22-MXQ as grade 3, 4 which is determined by the type of adjuster option that is selected.  After inspection, the 13/22-MXQ is blown with high purity air (clean bench/class M3.5) in a clean environment.  It is then sealed and shipped in an anti-static double bag.

I

ZS-22-A H O W T O O R D E R P O S I T I V E P R E S S U R E S W I T C H S E R I E S ISE4 H O W T O O R D E R V A C U U M P R E S S U R E S W I T C H S E R I E S ZSE4 PANEL MOUNTING KIT ZS-22-A ZSE4B ISE4 B O P E R AT I N G P R E S S U R E O P T I O N S -0.1 ~ 1MPa L -10 ~ 100KPa Non-Backlit (Standard) B Backlit LCD O P T I O N S P I P I N G S P E C I F I C AT I O N S Non-Backlit (Standard

PA3000/5000/PAX1000

PAX1000, PA3000, PA5000 Proper tightening torque Nm Connection threads 12 to 14 Rc 1/4 22 to 24 Rc 3/8 28 to 30 Rc 1/2 28 to 30 Rc 3/4 PB1000 Proper tightening torque Nm Connection threads 1/6 turn after tightening by hand M5 2 to 3 Rc 1/8 Since the threaded sections of the PB1000 are resin, take particular care not to tighten any more than necessary.

α PneuAlpha HARDWARE MANUAL

There are ve types of blocks that can be placed in your program: System Inputs, front panel Keys, System M bits, Function Blocks, and System Outputs. 22 6.2 Accessing Blocks PneuAlpha How to Use PneuAlpha Series Controllers Getting Started Output pins can be connected to multiple input pins but input pins can have only one connection. Choose an open (>) input pin and enter OK.

IR1000/2000/3000

Note 2) Replacement part numbers correspond to the item numbers in the figures. 14-5-18 18 Precision Regulator Series IR1000/2000/3000 Dimensions IRV1000-01 IRV2000-02 53 55 16.5 2.3 30 22 2.3 41 (R) F.R.L.

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Port size A B C D E F 28 3/4 31 34 22 143 107 IF320 104 1 37 62 89 28 194 IF321 IF323 104 1 29 39 56 28 161 16-12-9 5 Series IF3 Flow Rate vs.

PF2A/PF2W

View A Data Terminal block number 4 3 2 1 1 2 3 4 5 6 7 8 8 7 6 5 16-11-25 22 For details about certified products conforming to international standards, visit us at www.smcworld.com.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

S) (mm) Dimensions PB S Model LVD2-T LVD3-T LVD4-T LVD5-T PA 13 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2-T LVD3-T LVD4-T LVD5-T 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 to 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 to 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 to 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64 7 52 6

VNB

A: Non-locking extended type 4 Valve size 1 to 4 6A 8A 10A 1 8 1 4 3 8 5 6 24 VDC 12 VDC 1 7 B: Locking slotted type 7 240 VAC 50/60 Hz 9 Other 11 15 11 10A 3 8 Option 2 15A 1 2 15 14 3 20 16 Nil: Non-locking push type 20A 3 4 Valve size 5 to 7 25 4 25A 1 22 11 4 32A 5 32 Electrical entry/ With light/surge voltage suppressor 1 B 22 32 28 40 6 28 40 1 4 32F Flange 11 2 40A GS Grommet