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SQ Flow Characteristics at the Number of Manifold Stations (Operated individually) VQ0 Passage/Stations Station 1 Station 5 Station 10 Station 15 Model VQ4 5.9 0.23 1.5 6.2 0.19 1.5 6.8 0.31 1.8 7.0 0.38 1.9 5.9 0.23 1.5 6.2 0.19 1.5 6.8 0.31 1.8 7.0 0.38 1.9 5.9 0.23 1.5 6.2 0.19 1.5 6.8 0.31 1.8 7.0 0.38 1.9 C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv

Shaft Pattern Sequencing I Applicable shaft type: S, W, Y How to Order F59 B C P D C S 50 90 X RA1 A2 A24 C10 -X6 Built-in magnet Auto switch Nil D None Built-in magnet Refer to page 11-7-13 for the part no. of auto switches.

Shaft Pattern Sequencing I Applicable shaft type: S, W, Y How to Order F59 B C P D C S 50 90 X RA1 A2 A24 C10 -X6 Built-in magnet Auto switch Nil D None Built-in magnet Refer to page 11-7-13 for the part no. of auto switches.

(mm) W White R Red H Black (B) White (W) BU Blue Tubing model Y Yellow Blue (BU) Red (R) D G Green C Clear Yellow (Y) Green (G) Clear (C) Orange (YR) MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com YR Orange T Length per roll VMG 20 20 m roll Fluid Air/Water Max

HOW TO O R D E R X T A1 NC A U T O S W I T C H C O N S T R U C T I O N T Y P E (PLEASE SEE PAGE 1 FOR CONSTRUCTION DETAILS) Standard D Auto Switch capable (Stainless and Steel Construction (1.5~14) All Stainless Steel (1.5~14) Steel w/ Composite Tube (1.5 14) Stainless Steel w/ Composite Tube (1.514) ST SS SCT SSCT ...

HOW TO O R D E R X T A1 NC A U T O S W I T C H C O N S T R U C T I O N T Y P E (PLEASE SEE PAGE 1 FOR CONSTRUCTION DETAILS) Standard D Auto Switch capable (Stainless and Steel Construction (1.5~14) All Stainless Steel (1.5~14) Steel w/ Composite Tube (1.5 14) Stainless Steel w/ Composite Tube (1.514) ST SS SCT SSCT ...

Manifold C C 1 V V V C C 1 0 0 Valve Specification Sheet Fill in the symbol for stainless steel fitting. For others, mark necessary items with a circle.

Model (Made to Order) Model Pressure rangeNote) Indication unit Connection thread Note MPa G46-2-01 to 02-C/ C1 G46-4-01 to 02-C/ C1 G46-7-01 to 02-C/ C1 G46-10-01 to 02-C/ C1 G46-2-01 to 02M-C/ C1 G46-4-01 to 02M-C/ C1 G46-7-01 to 02M-C/ C1 G46-10-01 to 02M-C/ C1 G46-4-02-X30 G46-10-02-X30 G46-2-02M-X4 G46-4-02M-X4 G46-7-02M-X4 G46-10-02M-X4 G46-2-02M-C/ C1-X4 G46-4-02M-C/ C1-X4 G46-7-02M-C

0.3 to 1 RB series M8 x 1.0 RB0806(C) RB1006(C) M10 x 1.0 Basic type RB1007(C) P.895 to Stopper nut 0.05 to 5 RB1411(C) M14 x 1.5 RB1412(C) RB2015(C) M20 x 1.5 M27 x 1.5 RB2725(C) RBL1006(C) RBL series Coolant resistant type Basic type M10 x 1.0 RBL1007(C) RBL1411(C) P.906 to 0.05 to 5 M14 x 1.5 RBL1412(C) RBL2015(C) M20 x 1.5 M27 x 1.5 M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 RBL2725

Care should be taken about the voltage drop when the rated voltage is 6 VDC or less or when the response speed is important. (3) When using a C-R element (surge voltage suppressor) for protection of the switching element, please keep in mind that leakage voltage will increase due to leakage current flowing through the C-R element.

B RESET 72 - <>+JOG <>+1-052 B RESET <> 1-096 C RESET <> (1-097) <> C RESET <> <>OFF JOG OFF 1-098 OFF DRV C RESET <>ON SVRE ON DRIVE ON 1-099 <> SETOFF DRV C RESET <> <>1 2 (1-103) C RESET 1 [] A [a ] [] A [a ] 2 [SW] <> <> ( (1-106) RESET SVON ) C <>1 <> <> 1-144 RESET SVON D 73 - <> ON <>(M24V) 1-145 RESET SVON (1) D <> <> <> 1-146 RESET SVON

Care should be taken about the voltage drop when the rated voltage is 6 VDC or less or when the response speed is important. (3) When using a C-R element (surge voltage suppressor) for protection of the switching element, please keep in mind that leakage voltage will increase due to leakage current flowing through the C-R element.

Air operated External pilot solenoid Selection procedures Table q Applicable fluid check list Body material Seal material BC6: Standard Aluminum: L Stainless steel: S NBR : A FPM : B EPR : C NBR : A FPM : B EPR : C NBR : A FPM : B EPR : C Fluid Fluid Air (Standard, Dry) Low vaccum (1 torr) Refer to Table q to check that the desired fluid is applicable.

5 ENC c Encoder connector (16 pins) Axis 3: Connect the actuator cable. !6 MOT c Motor power connector (6 pins) !7 ENC v Encoder connector (16 pins) Axis 4: Connect the actuator cable. !8 MOT v Motor power connector (6 pins) !

Result area (LER ) ) LEY16RA-100BMLLEY16RA-100 LERH30K-3LLERH30K-3 0 ) LEY16RA-75LEY16RALEY16RA-100 LEFSH LEFS ) LEFSH25RH-300LEFS25RH-300LEFS25RH-300 11-)(25A-) 11-25A-11-25A) 11-LEFSH16A-100BRLEFS16A-100LEFS16A-100 29 No.SFOD-OMT0011CN-A c) Execute Execute b) c) (Apply) d), d) download e) 30 No.SFOD-OMT0011CN-A (2) a View(V) 4.1 (1-1-2) View (V) b c) download e) 31 No.SFOD-OMT0011CN-A

How to order L E C C G 1 L Cable length(L) K 0.3m L 0.5m 1 1m ii. Dimensions 70 - (3) Cable between branches (between the branch connectors) i. How to order L E C C G 2 L Cable length(L) K 0.3m L 0.5m 1 1m ii. Dimensions (4) Branch connector i. How to order L E C C G D Branch connector ii. Dimensions (5) Terminating resistor i. How to order L E C C G R ii. Dimensions 71 - 8.

(PLC ) Alarm _Comment _061 (01-061) <> (1) ()1(ABS)2(INC) (2)PLC 15ms(30ms) 13.2[2](P.53) 3D B RESET (+)(-) Alarm _Comment _062 (01-062) (+)(-) 3E B RESET <> (01-096) C RESET <> -64- (01-097) <> C RESET <> <>OFF JOG OFF (01-098) OFF DRV C RESET <>ON (SVRE ON) DRIVE ON (01-099) <> SET OFF DRV C RESET <> <>12 (01-103) C RESET 1 [] A [a ] 2 [SW] [] A [a ] <> <>

WETTED MATERIALS Polysulfone, Silicone, Buna-N TEMPERATURE RANGE 40 150 F (4 66 C) REPEATABILITY < +/1% F.S.