HAA

Model/Standard Specifications HAA7 1000 HAA15 HAA22 HAA37 Model AT Max. flow capacity (l/min (ANR)) (1) 5700 2200 3300 70 0.7 32 40 Compressed air 5 to 100 Rated performance Operating range Electrical specifications Inlet air temperature (C) Inlet air pressure (MPa) Ambient temperature (C) Outlet air temperature (C) Fluid Inlet air temperature (C) Inlet air pressure (MPa) Ambient temperature

Digital Flow Switch

C: Contents revised in several place. D: Contents revised in several places. [September 2016] E: Contents revised in several places. [August 2018] F: Contents are added.

Digital Flow Switch

C: Contents revised in several place. D: Contents are added. E: Modified errors in text. F: Modified errors in text. G: Contents revised in several places. [September 2016] H: Contents revised in several places.

Mechanically jointed rodless cylinder Basic type With Slide bearing guide type With cam follower guide type With linear guide type With High rigidity/ Linear guide type With Protective Cover type

MY1B/C/H/HT/CW series 10 16 20100 Fluid Air Proof pressure 1.2 MPa Max. operating pressure 0.8 MPa Min. operating pressure 0.2MPa 0.1 MPa +5 to +60 o Ambient and fluid temperature C (No freezing) Lubrication Not required (non-lube) 1000 or less +1.8 +1.8 2700 or less 0 0 Stroke length tolerance +2.8 0 +2.8 0 1001 to max stroke 2701 to max storke Cushion Rubber bumper Shock absorber Air

Series MLGP

Description Note 1 Body 16 Ball bushing MLGPL 31 Hexagon socket head plug 2 Lock body 17 Spacer MLGPL 32 Holder MLGPM 3 Piston 18 Pivot pin 33 Felt MLGPM 4 Piston rod 19 Pivot key 34 Type C retaining ring for hole MLGPL 5 Head cover 20 Lever 35 Rod seal A 6 Intermediate collar 21 Dust cover 36 Rod seal B 7 Collar 22 Type C retaining ring for hole 37 Rod seal C 8 Lock ring 23 Bumper A 38 Scraper

1.63

C dimension (Body length): 84 mm Example MGPW MGPW MGQ Theoretical Output MGG OUT IN Made to Order: Individual Specifications (For details, refer to page 517.)

KP/KPQ/KPG

Tubing Series10-TU Series 20m bundle Tubing size Metric size (series TU) 20 TU0425 10 BU 10-TU1208 10-TU1065 10-TU0805 10-TU0604 10-TU0425 O.D. mm Designation 8 10 5 6.5 12 8 2.5 6 4 4 I.D. mm Color Clean series B Black Black White (W) Red (R) Blue (BU) Yellow (Y) Green (G) Clear (C) Orange (YR) W White R Red BU Blue Tubing designation Y Yellow G Green C Clear YR Orange Specifications

FSQ seies

Lad sire Oi ptool \inyt. @3.4, o.2mn1, 2 w1r6 (red, b ack). 0.5m ' . lmpacl sistance J00m/s: {30 6G) . hsu aron resistance ---50Mo or more underl6sr vo tage soovDc (belw6n case and cabre) . w thsland vo tage l500VAC 1 min (between case aid bte) .Ambiontlemperalure 50 140"F (10-60"C) ' Polecton skucture lEC529 spec.lP67, warelprcoj (JtS C 0920), oibrcoj ' Suffx L lor the modelwlth a 3m long

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Analog output [mA] Analog output [V] 5 20 For compound pressure 100.0 to 100.0 kPa 100.0 kPa 100.0 kPa 0.100 to 1.000 MPa 0.100 MPa 0.100 MPa Note) 0 1.000 MPa For positive pressure 0.100 to 2.00 MPa 0 2.00 MPa 1 4 Note) Analog output is 0.8 [V] or 3.2 [mA] at the pressure A. 0.6 2.4 B A C B A C Pressure Pressure Descriptions LCD Output (OUT1) display (Orange) Displays the current pressure

ZH

Recommended Sonic Conductance and Solenoid Valves (Reference) C [dm3/(sbar)] ZH10--X185 1.48 or more ZH20--X185 3.12 or more ZH30--X185 5.92 or more ZH40--X185 11.08 or more Model VQZ200 VP300 VP500 VP700 Solenoid valve (Reference) Sonic conductance C [dm3/(sbar)]: 1.7 Sonic conductance C [dm3/(sbar)]: 4.2 Sonic conductance C [dm3/(sbar)]: 8.9 Sonic conductance C [dm3/(sbar)]: 15.3 791 C

IDX-OM-Z004

G MADE IN IDF100150F-W i.2 i-6 IDX-OM-Z004 i i.3 HFC IDF100150F-W i.3 i-7 IDX-OM-Z004 i i.4 / 1 1.5 () IDF100150F-W i.4 / i-8 IDX-OM-Z004 1 1 1.1 i.2.9 1 2 IDF100F-30-W C,RV IDF100F-30-CRVW4 IDF 100 F 30 W 4 C 5 G ) K 100kW 100 P 125kW 125 150kW 150 R ) V AC200V(50Hz) AC200/220V(60Hz) 30 1 4 5 C G K P R V 1.1 IDF100150F-W 1 1 IDX-OM-Z004 1 1.2 1.2.1 (C) 1.2.2 G 1.2.3

IDX-OM-W038

C( E) ( ) 1-1 3-2 ( ) 1-1 P. I. D3-3 5 P. I.

VP(A)300/500/700 Series (PILOT VALVE : V200)

Applicable cable Cable O.D.: 4.5 to 7 (Reference) 0.5 mm2 to 1.5mm2, 2-core or 3-core, equivalent to JIS C 3306 Applicable crimped terminal O terminal : R1.25-4M that is specified in JIS C 2805 Y terminal : 1.25-3L, which is released by JST Mfg.Co.,Ltd Stick terminal : Size 1.5 or shorter.

EX500-GPR1A.eng

For GW unit Input unit manifold configuration M12 Wiring (continued ) Display/Switch Setting 28.3 14.9 M12 Branch cable with M12 connector 31.3 48 GW unit L=300, 500, 1000, 3000, 5000 (mm) Straight Connector Type Angle Connector Type EX500-AC -SSPS EX500-AC -SAPA L L 6 6 Input unit manifold 52 M12 M12 31.3 16 32.3 COM D COM C COM B COM A DIA Turns on: DIA is abnormal.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

C B H B H Material: Carbon steel Material: Carbon steel Part no.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

200 3 Precision Air Slide Table Series MXP Table Accuracy Clean Series: Precision Air Slide Table Traveling parallelism C 11-MXP Cylinder bore Stroke Adjuster option D Surface C to surface A M Clean series Vacuum type B Surface D to surface B W 11-MXPJ6Stroke A Port C Clean series Vacuum type This type has a relief port provided in the side of the body, and the spread of particulates into

Air Cylinder RSQ Series Stopper Cylinder

Lad sire Oi ptool \inyt. @3.4, o.2mn1, 2 w1r6 (red, b ack). 0.5m ' . lmpacl sistance J00m/s: {30 6G) . hsu aron resistance ---50Mo or more underl6sr vo tage soovDc (belw6n case and cabre) . w thsland vo tage l500VAC 1 min (between case aid bte) .Ambiontlemperalure 50 140"F (10-60"C) ' Polecton skucture lEC529 spec.lP67, warelprcoj (JtS C 0920), oibrcoj ' Suffx L lor the modelwlth a 3m long

AFF

Nil Rc Thread type Accessory/Option Combinations F G N NPT Available Not available Depends on model Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Accessory Optional specification C C D -J -R Applicable model Accessory (Option) D J T AFF2B R AFF4B AFF8B AFF11B AFF22B

MGQ

Applicable series MGQM Slide bearing MGQL Ball bushing bearing 12, 16, 20, 25, 32 40, 50, 63, 80, 100 Bore size (mm) Bearing type How to Order D By-pass port dia. 20 M Stroke Bore size MGQ Bearing type Slide bearing Ball bushing bearing M L D (mm) MGQL 8 10 12 15 18 18 22 22 28 33 Bore size (mm) A (mm) B (mm) C (mm) Hexagon socket head cap screw Copper-free MGQM 10 12 14 18 22 22 27 27 31

PFxx-OMO0004CN

B AC (83) C A B -16No.PF-OMO0004CN-E 0.450.55 Nm ,, (ZS-33-M) (ZS-33-MS) M34 (84) M3 M3 -17No.PF-OMO0004CN-E M3(2) 0.350.45 Nm (84) M3 DIN DINDIN DIN0.350.45 Nm () DIN DIN F02(G/14)DIN DIN -18No.PF-OMO0004CN-E IN8cm 2F.S.