: 10 One-touch fitting C12 : 12 One-touch fitting L2 6.5 5.5 108 L1 Manual override Indicator light 65.5 P=25 A A A B A B A B A B A B 21 21 63 9 A A A A A A A 143 163 66 41.5 9 B B B B B SI unit Input block 10 n 1 2 3 4 5 6 7 Stations D-side 8 U-side Formulas L1 = 25n + 106 (Maximum 16 single wiring stations) L2: For one input block.
Hs Auto switch 24.5 A B 49.5 A 33 B Proper auto switch mounting positions (mm) D-G39 D-K39 D-A3 D-A44 D-H7 D-H7C D-H7W D-H7BAL D-C7 D-C80 D-C73C D-C80C D-B5 D-B64 D-G5NTL D-H7F D-B59W Bore size (mm) A B A A A A A A B B B B B B 16 15.5 7.5 12 14 17.5 12.5 11 19 20 8 4 6 9.5 4.5 25 17.5 13.5 17 7 15.5 19 10.5 14 20.5 7.5 3.5 5.5 9 4 32 20.5 16.5 9 20 18.5 22 23.5 12.5 17 9.5 5.5 7.5 11 6 40
M4 mounting hole A B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken
Refer to page 13-2-10 for details. (1) Valve unit (4) Adsorption confirmation switch unit K1 A V ZX1 5 Z B D M L Unit for replacement 15 C 0X B ZSP1 D Piping specifications Applicable nozzle diameter Manifold All ports are equipped with plugs.
Assembly / Disassembly procedure 4.1 With vertical auto switch unit 19 Cross recessed round head screw 2 For D-M9 18 Switch holder 2 For D-M9 Size: 10, 15 17 Cross recessed round head screw 2 3pcs. for size 15 16 Cross recessed round head screw 2 15 Cross recessed round head screw 2 14 Holding block (B) 2 13 Switch block (B) 1 12 Switch block (A) 1 3pcs. for size 15 11 Cross recessed round
as the port side B 90 from the port side C 180 from the port side D 270 from the port side Dustproof cover (Manual unlocking unit) D Clamp arm 2 x Rc1/8 Port side C A 45 49.5 B Hole diameter of workpiece C D d K SR Q Model number Hole diameter of workpiece C D d K SR Q Model number Hole diameter of workpiece C D d K SR Q Model number 115 11.6 116 11.7 117 11.8 118 11.9 119 12.0 120 155 15.6
MY1 HT MY1 W MY1 W MY1CW (Cam follower guide type) 16, 20 25, 32, 40, 50, 63 MY2C MY2 H/HT MY3A MY3B MY3M B A B A Proper Auto Switch Mounting Position (mm) D-Z7/Z80 D-Y59/Y7P D-Y7W D-Y7BA D-M9V D-M9WV D-M9AV D-A9 D-Y69/Y7PV D-Y7WV D-M9 D-M9W D-M9A Bore size (mm) A B A B A B A B A B 16 20 25 32 40 50 63 74 86 70 90 94 106 90 110 102 118 102 118 97 123 97 123 132 148 132 148 127 153
MK(2) b) Type B mounting (When using the cylinder tube threads) RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B E t E t C J G5-S Compatible Mounting Bolt Dimensions CV Model Type A mounting Type B mounting E (mm) D: Bolt length (mm) C (mm) Mounting bolt size Mounting bolt size MVGQ MQQTB10-D MQQTB16-D MQQTB20-D MQQTB25-D MQQTB28-D MQQLB10-D MQQLB16-D MQQLB20-D MQQLB25-D MQQLB28-D 8 to 11 M3 x
1 LEF LEJ A A LEL B D-D #3 LEM LEM LEY !6 @3 @3 @5 @4 @7 @2 @4 @5 @1 LES #1 #0 u #2 i y LEPY LEPS !3 C-C A-A LER !8 @6 @8 @9 B w !2 C !7 D LEH LEY -X5 D #4 #4 11LEFS C o !0 !5 11LEJS Motor option: With lock 25A!1 LEC !2 LEC S !3 LEC SS-T @0 LEC Y !9 Motorless LAT Component Parts Component Parts LZ No. Description Material Note 1 Body Aluminum alloy Anodized No.
(mm) D Model B d H C SNJ-015A Y M10 x 1 3 14 16.2 E SN-015A M14 x 1 5 19 21.9 SNJ-010A M8 x 1 3 12 13.9 C A B Ball joint type: 40, 50 D E Y C A B (mm) D E Y ZP10F Model B A C 1.5 6.5 10 12 ZP13F 13 15 3 8.2 2 7 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 3 25 28 4 10.2 ZP32F 9 32 35 ZP40F 5 13 40 43 10 28 ZP50F 6 14 50 53 8 13-11-101 6 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry Without Buffer
30.5 31.5 18.5 19.5 Grommet (Perpendicular) Reed switch Model Model 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 D-A90V 5 25.5 26.5 13.5 14.5 A B A B A B A B C D Normally closed (NC = b contact), solid state switch (D-F9G/F9H type) are also available.
Applicable Auto Switch Model Reed Switch Solid State Switch D-C7/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3lA/A44A D-A3lC/A44C D-A7/A8 D-A7lH/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9/A9lV D-9/9lA D-E7lA/E80A D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7lF D-H7lW D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5lW/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7lF D-F7BAL D-F7lV D-F7NTL D-F7lW(V) D-F5/J5 D-F5BAL D-F5lW
Dimensions H B Ball joint type: 10 to 32 (mm) D Model B d H Y ZPNA-M10 M10 x 1 3 14 E ZPNA-M14 M14 x 1 5 19 ZPNA-M8 M8 x 1 3 12 C A B Ball joint type: 40, 50 ZP3 D ZP3E ZP2 E Y ZP2V C A ZP B ZPT ZPR ZPT ZPR (mm) Model B A C D E Y XT661 ZP10F 10 12 6.5 1.5 ZP13F 13 15 3 8.2 7 2 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 25 28 4 10.2 3 ZP32F 32 35 9 ZP40F 40 43 10 13 5 26 ZP50F 50 53 8 14 6 725 ZPT/
S) SMC C A B D SMC B A SMC (Max. T) U Z M N LVQ40, LVQ60 C B A D (Max.
A C D-F9 D-F9W D-M9 D-A93 D-A90 D-A96 D-F9V D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 D 7.5 5 2 5 7 7.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38
HS Auto switch Auto switch 12 8.5 24.5 16 A B A B 33 38.2 Auto switch mounting position Auto switch mounting height (mm) (mm) Auto switch model D-C7, C8 D-H7 D-H7W D-H7F D-H7BA D-H7 D-H7C D-H7W D-H7BA D-C7, C8 D-C73C D-C80C D-B5, B6 D-C73C D-C80C D-B5, B6 D-B59W D-G5NT D-H7C D-G5NT D-B59W D-H7F Bore size (mm) A A B A B A A HS HS HS B B B B A 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5)
cable O.D.: 6.8 to 11.5) CE1 CE2 Proper Auto Switch Mounting Position D-H7 D-H7C D-H7NF D-H7W D-H7BAL D-C7 D-C80 D-C73C D-C80C ML2B D-G39 D-K39 D-A33/A34 D-A44 D-B5 D-B64 D-B59W D-G5NTL Bore size (mm) C J G5-S A B A B A B A B A B A B CV 20 56.0 31.5 50.0 25.5 55.0 30.5 51.5 27.0 53.0 28.5 49.5 25.0 25 MVGQ 56.0 31.5 50.0 25.5 55.0 30.5 51.5 27.0 53.0 28.5 49.5 25.0 32 59.5 36.5 53.5 30.5
For detailed specifications, refer to page 10-20-1. 50 7 63 9 80 9.5 100 10.5 CV D-Z7/Z80 D-A3/A44 D-A3C, D-A44C D-A5/A6 D-B5/B64 D-A59W D-B59W D-Y5/Y6 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL D-G59F D-G39/K39 D-G39C, D-K39C MVGQ Electrical entry (Fetching direction) D-A53/A56 D-A64/A67 D-B64 D-Z80 D-F59/F5P/J59 D-F59W/F5PW/J59W