MHZ

10) D1 E B D2 A Model S C S C S C S C 0.016 0.043 MHZ2-10 K 7 12f8 52.8 11 15 Applicable tubing End boss assembly MHZ2-16 K 0.016 0.043 10 16f8 58.7 15 20 MHZ2-20 K 0.020 0.053 D2 12 20f8 70.5 19 22 0.020 0.053 MHZ2-25 K 15 25f8 82.9 24 25 D1 MHZ Other dimensions and specifications correspond to the standard type.

MHZ

10) D1 E B D2 A Model S C S C S C S C 0.016 0.043 MHZ2-10 K 7 12f8 52.8 11 15 Applicable tubing End boss assembly MHZ2-16 K 0.016 0.043 10 16f8 58.7 15 20 MHZ2-20 K 0.020 0.053 D2 12 20f8 70.5 19 22 0.020 0.053 MHZ2-25 K 15 25f8 82.9 24 25 D1 MHZ Other dimensions and specifications correspond to the standard type.

Table of Contents

For details, refer to pages 3-7-19 and 3-7-20.

NCA1

R O D B O R E S I Z E 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 1000 10 1200 12 1400 14 E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please consult SMC Customer Service for larger sizes.

Air Cylinder NCA1 Series

R O D B O R E S I Z E 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 1000 10 1200 12 1400 14 E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please consult P/A Customer Service for larger sizes.

CQ2

Standard (mm) A Without auto switch B P A B P Q Q With auto switch Bore (mm) 5st 10 50 20 5st 10 33 20 5st 10 20 5st 10 20 5st 10 60 20 5st 10 43 20 32 40 50 RC(PT) 1/8 28 40 M5 X 0.8 50 38 11.5 11 10.5 11 RC(PT)1/8 10.5 11 RC(PT)1/8 46.5 34.5 56.5 44.5 56.5 39.5 66.5 49.5 RC(PT)1/8 RC(PT)1/4 78.5 50.5 10.5 10.5 88.5 60.5 10.5 68.5 40.5 68.5 50.5 RC(PT)1/4 C D E H I J K

7

K L F I J (D) Flat terminal C E U 11 T A OUT IN M B 2 x P Port size I F J L K (D) (mm) Electrical entry Model Flat terminal Conduit terminal Conduit Port size P A B C E F I J K L D M T T V U U T 68.5 (74.5) 126.5 (134.5) 76.5 (84.5) 76.5 (84.5) 82.5 (90.5) U 62.5 (68.5) 107.5 (113.5) 29 62.5 (68.5) 5 C VXD2 30 3/4 99.5 68.5 47.5 23 71 20 4.5 17 51 32.5 38.5 35 6 D VXD2 33 35 1 102 71 50

CV/MVGQ

J Bore size (mm) Stroke range (mm) A AL B B1 C CDH10 CX D F H1 E I J K L LL D50 63 80 100 +0.070 0 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 35 35 40 40 12 16 20 25 83 83 84 85 98 100 105 110 7 7 11 11 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 18 18 20 20 11 11 13 16 10 10 14 14 40 40 52 52 20 20 25 30 52 64 78 92 27 27 32 41 70 85 102 116 Up to 600 Up to 600 Up to 750 Up to 750 18 25 31.5 35.5

CV/MVGQ

J Bore size (mm) Stroke range (mm) A AL B B1 C CDH10 CX D F H1 E I J K L LL D50 63 80 100 +0.070 0 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 35 35 40 40 12 16 20 25 83 83 84 85 98 100 105 110 7 7 11 11 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 18 18 20 20 11 11 13 16 10 10 14 14 40 40 52 52 20 20 25 30 52 64 78 92 27 27 32 41 70 85 102 116 Up to 600 Up to 600 Up to 750 Up to 750 18 25 31.5 35.5

MXS

0 A B NN-M4 X 0.7 thread 8 deep MGG 4 MGC 1 MGF 7 7 6.5 3.2 CY1 A B 11 5.5 5.5 11 MY1 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 20 30 20 28 38 ZZ 48 58 68 90 106 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 N 4 4 6 6 6 HA 20 20 20 30 48 GA 11 21 31 43 41 MXS6L-10 MXS6L

High Vacuum Angle Valve

M10, L = 20 Refer to part no.

CL

32 37 37 16 20 20 25 30 to 500 to 600 to 600 to 750 to 750 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 CXS +0.3 +0.1 +0.3 +0.1 +0.3 +0.1 CXT +0.3 +0.1 MX Bore (mm) W/o rod boot W/ rod boot KA L LZ MM PG S N PH U P PL W H 51 58 58 71 72 PW RR J K Z 244 273 296 347 381 Z 252 281 304 356 390 ZZ 43 52 52 65 65 e 11.2 11.2 11.2 12.5 14.0 f 59 66 66 80 81 ZZ 14 18 18 22 26 h l 40 50 63 80

MXS Series Air Slide Table

B 11 5.5 5.5 11 H (NN-1) X H G Cross section BB Cross section AA (mm) Model F 20 30 20 28 38 GA 11 21 31 43 41 HA 20 20 20 30 48 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 Z 41.5 51.5 61.5 83.5 99.5 M 42 52 62 84 100 ZZ 48 58 68 90 106 MXS6L-10 MXS6L-20 MXS6L-30 MXS6L-40 MXS6L-50 67 MXSIL Series Air Slide Table (Symmetric

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Horizontal Operation (Pushing load, Pusher) MX Bore size (mm) MTS Allowable load weight (WA) (kg) 5.1 K 3cos + 2 (1.9 + Lo) sin 6 MY 10.5 K 3.5cos + 2 (2.2 + Lo) sin 10 35 K 5cos + 2 (2.7 + Lo) sin 72 K 6cos + 2 (2.9 + Lo) sin CY 15 MG 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-

SMC Pneumatic Clean Series

N 1.5 N F A 1.5 F H S + Stroke 20 Non-lock manual release type K (This drawing shows the cases of 20 and 25.)

C85

13 15 8 15 24 32 6 62 44 17 20 24 28 8 8 22 8.2 11 20 25 G 1/8 M22 x 1.5 M10 x 1.25 137 17 15 10 15 30 32 8 65 50 20 22 28 33.5 8 8 22 11 10.2 22 With Rod Boot (mm) Item h KK 1 to 50 AM C e f K Stroke 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 20 M8 x 1.25 71 20 8 36 20 6 84 96 109 134 159 25 M10 x 1.25 74 22 10 36 20 8 87 99 112 137 162 187 Item Wh I Stroke 1

Stopper Cylinder

KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Relief port (10-, 21-) Vacuum port (11-, 22-) Width across flats B1 H1 2 x NN MM MM NA 2 x Eh8 20, 25 D D Standard port Width across flats KA 45 45 1.5 A AL K Relief port (10-, 21-) H + Stroke A AL K 1.5 Vacuum port (11-, 22-) ZZ + 2 x Stroke S + Stroke F H F (mm) Female Rod End Female rod end 2 x M5 x 0.8 Relief port (10-) Vacuum port (11-) A1 20 20 20 21 H M4 x 0.7 M5 x 0.8 M6 x 1 M8 x

AC

Note 2) Without valve mechanism. q 00 10 20 30 40 e w w q w q q w e q w (1) Numbers in K indicate the constructing order from the left hand side (upper stream) with a view from front. Ex.) Symbol 00 AF+AR+AL 10 AW+AL (Available only for AC1010 to 4010.) 20 AF+AR 30 AF+AFM+AR (Available only for AC2030 to 4030.)

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 40 22.5 1.2 11 6 46 25 14.5 10 56 29 20.5 04 A J K 3 40 22.5 1.8 11 6 46 25 14.5 10 56 29 20.5 06 08 N S U F GN GS HS 18 11 15 59 42.5 1.2 10 20 66.5 50 06 08 15 59 42.5 1.8 20 66.5 50 04 JB K ZP3 Y UM B5 3 41 23.5 11 6 47 26 14.5 10 57 30 20.5 JB K 15 60 43.5 10 20 67.5 57 J K 4 10 13 16 D