A B L L2 MM R1 R2 U L2 MM L1 NDd9 3 NDH10 3 NX Part no.
A B L L2 MM R1 R2 U L2 MM L1 NDd9 3 NDH10 3 NX Part no.
20 CY 15 10 MG 0.1 10 CX 0.1 6 6 D-X 0.03 5 5 10 20 30 40 50 100 10 20 30 40 50 100 20Overhang L (mm) Overhang L (mm) Graph (4) V = Up to 800 mm/s (Up to 700 mm/s for 15, 20) Data CXSJM CXSJL Graph (3) V = Up to 600 mm/s CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15
mm/s CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15, 20. 8-28-7 7 Series CXS Horizontal Mounting Graph (6) Up to 30 mm stroke Graph (5) Up to 10 mm stroke V = Up to 400 mm/s V = Up to 800 mm/s V = Up to 400 mm/s V = Up to 800 mm/s 0.2 0.2 0.1 0.1 Weight m (kg) Weight
Rated voltage For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted type Electrical entry 24 VDC, 12 VDC, 6 VDC, 5 VDC, 3 VDC Grommet L plug connector M plug connector G: 300 mm lead wire L: 300 mm lead wire M: 300 mm lead wire MN: Without lead wire Light/Surge voltage suppressor Nil S Z R U Without light/surge voltage suppressor With surge voltage suppressor With light/surge
IO-Link 1.0 IO-Link -81No.PS-OMV0003CN-G ISE70 ISE71 01.000 MPa 01.600 MPa / -0.1051.050 MPa -0.1051.680 MPa / 0.001 MPa 1.5MPa 2.4 MPa DC1224 V10(p-p)10 IO-Link DC1830 V (p-p)10 35 mA 2% F.S.1 digit(253 ) 0.5F.S. 2%F.S.(25 ) PNP NPN OFF 80 mA 30 V(NPN ) () 1.5 V (80 mA ) 1 1.5ms (060 s/0.01 ) 2 0 3 MPakPakgf/cm 2barpsi LCD 3 (X2) / 4 (7 ) 4 (1 11 7 ) ON OUT1OUT2
diameter [m] Particle diameter [m] 11-LEJS63/Ball Screw Drive Speed 600 mm/s Speed 1200 mm/s 10 10 ISO Class 8 10 10 0 L/min (ANR) ISO Class 7 ISO Class 7 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] ISO Class 6 ISO Class 6 10 10 0 L/min (ANR) 50 L/min (ANR) ISO Class 5 10 10 ISO Class 5 30 L/min (ANR) 1000 1000 ISO Class 4 ISO Class 4 90 L/min (ANR)
B + Stroke RZQ FZ 28 10 to 50, 75, 100 104 126 5.5 8 54 62 A + Stroke 2-FD MI W S Bore size (mm) FZ L M 25, 28 CEP1 10 55 18 16 60 20 FV CE1 20 64 20 25 65 22 34 CE2 28 72 22 40 FT FX L B + Stroke FZ ML2B A + Stroke 4-FD C J G5-S Rear flange style: MQQLG 10, 16, 20 25, 28 Bore size (mm) Stroke range (mm) A L 2-FD 4-FD CV 10 10 to 40 75 8 16 10 to 60 88.5 10 MVGQ 20 10 to 60 97 10 FV FV
B + Stroke RZQ FZ 28 10 to 50, 75, 100 104 126 5.5 8 54 62 A + Stroke 2-FD MI W S Bore size (mm) FZ L M 25, 28 CEP1 10 55 18 16 60 20 FV CE1 20 64 20 25 65 22 34 CE2 28 72 22 40 FT FX L B + Stroke FZ ML2B A + Stroke 4-FD C J G5-S Rear flange style: MQQLG 10, 16, 20 25, 28 Bore size (mm) Stroke range (mm) A L 2-FD 4-FD CV 10 10 to 40 75 8 16 10 to 60 88.5 10 MVGQ 20 10 to 60 97 10 FV FV
Consult SMC for other voltages. 2.9-12 Series VQ100 Plug Lead Unit Manifold (VV3Q12) L1 10.8 3.5 5 L2 3 P E 8.9 P E 11 Round head screw M1.7 X 14 W (L type) 28.7 26.5 W (M type) 300 33.8 300 2-3.5 Mounting hole 4-M5 SY P, E port Manual override SYJ 11.5 P=10 300 Latching, 100V AC or more VK H (M type) U side D side n 5 4 3 2 1 300 H (L type) VZ VT VT 42.2 L type M type 36.3 VP W
through Q R E GB GA 4-NN MM D CB CA C K J JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard
VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.
2 P 3 4 5 P 6 7 8 C 9 10 NBR 11 NBR 12 NBR 13 NBR MHSH3-A32A MHSH3-A40A MHSH3-A50A MHSH3-A63A MHSH3-A80A NBR MHSH32A-PS MHSH40A-PS MHSH50A-PS MHSH63A-PS MHSH80A-PS 1) 10,11,12,13 1) 10111213 1 MHSH3DB MHSH3-A B 1 P 2 S 3 4 5 S 6 7 8 C 26 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications
Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: S (Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: 01 (Body Ported 1/8), Thread: N (NPT)
Rated Flow Range: 25 (0.3 to 25 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: 01 (Rc1/8), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m)
Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: 01 (Rc1/8), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made to Order: X731 (Compatible with Argon and Carbon Dioxide Mixed
Function: 1 (2 Position Single), Piping: 4 (Base Mounted), Exhaust: 0 (Individual), Specifications: Standard, Voltage: S (5VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style), Port Size: 01 (Base Mounted w/Sub-plate 1/8, Body Ported 1/8), Thread: T (NPTF)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: S (Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style), Port Size: 01 (Base Mounted w/Sub-plate 1/8, Body Ported 1/8), Thread: T (NPTF), Option: F (Bracket)
Function: 1 (2 Position Single), Piping: 4 (Base Mounted), Exhaust: 0 (Individual), Specifications: Standard, Voltage: S (5VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 01 (Base Mounted w/Sub-plate 1/8, Body Ported 1/8), Thread: T (NPTF)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: S (Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 01 (Base Mounted w/Sub-plate 1/8, Body Ported 1/8), Thread: T (NPTF)