Valve Single Unit

Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold

Prevents Micro-Bubbles

Single type Suck back P P P VN A B A B Unit Single type Unit LVC Manifold (5 stations max.) LVA LVH A R P 3 port N.C. PA LVD N.C.

CYP

P-80 (D)

Vacuum Equipment

capacity V = 50 (l) Max. adsorption flow Q (l/min (ANR)) Work Tubing O.D.

PF2D

Real-time switch output Unit switching Hysteresis mode ON YES Display Real-time flow rate Accumulated flow OFF P-1 P-2 L/min L Real-time flow rate GPM gal (US) "P" Window comparator mode H : Hysteresis GPM = gal (US)/min H H Note) Fixed SI unit (L/min, L, m3 or m3x10) will be set for the type without the unit switching function.

2-Color Display Digital Pressure Switch Series ISE70/75/75H

DOWN OUT1 U P SET ZS-31-A Bracket Note) Mounting screws are not included.

VDW

3 0.4 0.1 Port size 4 0.2 0.05 Series 200 p p Port size Symbol 300 p p Note 1) Indicates the maximum operating pressure differential of pressure ports 2 and 3.

SI unit for PROFIBUS DP

Designation Description 1 SV24 V +24 V for solenoid valve 2 SV0 V 0 V for solenoid valve 3 SI24 V +24 V for SI unit operation 4 SI0 V 0 V for SI unit operation 5 Unused The M12 connector cable has two types, SPEEDCON compatible and non-compatible.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

12 V 12 V Relay, PLC 24 V Grommet 5 V, 12 V Diagnostic indication (2-color indication) IC circuit 12 V 3-wire (NPN equivalent) A96V A96 5 V IC circuit DGrommet A93V A90V A93 A90 100 V Relay, PLC 24 V 12 V 2-wire IC circuit 100 V or less -X Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Since there are other applicable

ISE70/75/75H

Port size Rc1/4, NPT1/4, G1/4(ISO1179) U P DOWN U P DOWN U P DOWN SET SET SET Model with initial display settings of PSI is also available as standard.

VVXA21/22

LVN Port P TI/ TIL Port P Port P PA Port A PAX Port A Port A PB Normally open (N. O.) Port P Port P Port P Model Manifold base model Individual port Rc VVXA211-stations Common port Rc Port A 1 8 1 4 3 8 1 8 1 4 VVXA212-stations VVXA221-stations VVXA222-stations Manifold Manifold Stations B mount 2 to 10 stations 17-3-97 2 The VX series will be revised shortly.

Digital Flow Switch (Integrated display type)

1 V 1.8 V 5 V Current output 4 mA 7.2 mA 20 mA (PF3W721-U30) A B C Voltage output 1 V 1.48 V 5 V Current output 4 mA 5.92 mA 20 mA Rated flow [L/min] Sensor model Minimum Maximum PF3W704 0.5 4 PF3W720 2 16 PF3W740 5 40 PF3W711 10 100 PF3W721-12/14 50 250 PF3W721-U30 30 250 Analogue output (Fluid temperature) A B C D Voltage output 0.6 V 1 V 5 V 5.4 V Current output 2.4 mA 4 mA 20 mA 21.6

240

12 V Reed auto switch Solid state auto switch IC circuit 12 V 5 V, 12 V Diagnostic indication (2-color indicator) IC circuit Relay, PLC 24 V Yes Grommet 12 V 5 V, 12 V Water resistant (2-color indicator) IC circuit M9PAV1 M9BAV1 12 V 3-wire (NPN equivalent) 5 V A96V A96 IC circuit Yes 24 V Grommet A93V2 A90V A93 A90 IC circuit 100 V 100 V or less Relay, PLC 2-wire 12 V No 1 Water

FQ1

sealing method Options Flat gasket (D.O.E) 1 N/A Bracket Quick plug Nil B P Note) Specity seal material in place of "" (N for NBR or V for FPM). 4.

Air Slide Table

12 V 12 V Reed auto switch Solid state auto switch Relay, PLC Grommet 24 V IC circuit 5 V,12 V Diagnostic indication (2-color indication) 12 V A96V A96 5 V IC circuit Relay, PLC Grommet A93V A90V A93 A90 IC circuit 100 V 2-wire 24 V 12 V 100 V or less Solid state auto switches marked with are produced upon receipt of order.

KR

P. 3 KRL KRT KRU P. 4 P. 4 Use to branch line from female thread in both 90 directions. 45 male elbow Union tee Branch Use to pipe in 45 angle direction from female thread. Model in-between of male connector and male elbow. P. 4 KRK KRT KRU P. 5 P. 3 Use to branch line in the same direction from female thread. Use to connect tubes in both 90 directions.

Square Tube Type Air Cylinder Series MB1

(different sides, same side) 15 25 Y7P(V) 1pc. D-Y7NW(V), Y7PW(V), 2pcs. (different sides, same side) Solid state switch 20 25 Y7BW(V) 1pc. 2pcs. (different sides, same side) 20 30 D-Y7BAL 1pc. Center trunnion is not included.

FQ1

sealing method Options Flat gasket (D.O.E) 1 N/A Bracket Quick plug Nil B P Note) Specity seal material in place of "" (N for NBR or V for FPM). 4.

Compact Cylinder/Guide Rod Type Series CQM

A96V A96 IC circuit 5 V Yes A72 A72H Grommet Reed switch 12 V 200 V 100 V A93V A90V A93 A90 IC circuit 5 V,12 V 12 V 100 V or less No Relay, PLC 2-wire 24 V A73C A80C A79W Yes No Connector IC circuit 5 V,12 V 24 V or less Grommet Yes With diagnostic output (2-color indication) Solid state auto switches marked with a "" are produced upon receipt of order.

Guide Cylinder Series MGG

M N 4-O T Q 2-P AH AG S K W U L B AL I 4-AK hole R AA AP J X AB A Y + Stroke V AI Z + Stroke AJ For 4-AO AG AN AI Cutout window 100 piston rod end connection AM Mounting dimensions For standard strokes (mm) Bore size (mm) Stroke range (mm) O N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA P A 75, 100 125, 150 200, 250 300 63 80 100 M12 x 1.75 depth 23 100 66 180 135 117 65 228 60 M12 234