Body Size: M5 x 0.8, 10-32UNF, Control Type: Meter-out, Thread Type: R, Port Size: M5 x 0.8, Applicable Tubing O.D.: ø4, Seal Method: w/o Sealant, Option: Electroless Nickel Plating, Lock Nut Option: Round Lock Nut

Body Size: M5 x 0.8, 10-32UNF, Control Type: Meter-out, Thread Type: R, Port Size: M5 x 0.8, Applicable Tubing O.D.: ø6, Seal Method: w/o Sealant, Option: Electroless Nickel Plating, Lock Nut Option: Round Lock Nut

Body Size: M5 x 0.8, 10-32UNF, Control Type: Meter-in, Thread Type: R, Port Size: M5 x 0.8, Applicable Tubing O.D.: ø6, Seal Method: w/o Sealant, Option: Electroless Nickel Plating, Lock Nut Option: Round Lock Nut

Adapter Material: Brass, Pad Diameter: ø4, Pad Type: Flat w/Groove, Pad Material: NBR, Mounting Thread Size: M5 x 0.8, Female Thread, Vacuum Inlet: M5 x 0.8, Female Thread

Adapter Material: Brass, Pad Diameter: ø6, Pad Type: Flat w/Groove, Pad Material: Silicone Rubber, Mounting Thread Size: M5 x 0.8, Female Thread, Vacuum Inlet: M5 x 0.8, Female Thread

Adapter Material: Brass, Pad Diameter: ø10, Pad Type: Flat w/Groove, Pad Material: NBR, Mounting Thread Size: M5 x 0.8, Female Thread, Vacuum Inlet: M5 x 0.8, Female Thread

Adapter Material: Brass, Pad Diameter: ø16, Pad Type: Flat w/Groove, Pad Material: Urethane Rubber, Mounting Thread Size: M5 x 0.8, Female Thread, Vacuum Inlet: M5 x 0.8, Female Thread

Adapter Material: Brass, Pad Diameter: ø8, Pad Type: Flat w/Groove, Pad Material: Silicone Rubber, Mounting Thread Size: M5 x 0.8, Female Thread, Vacuum Inlet: M5 x 0.8, Female Thread

Adapter Material: Brass, Pad Diameter: ø8, Pad Type: Flat w/Groove, Pad Material: Urethane Rubber, Mounting Thread Size: M5 x 0.8, Female Thread, Vacuum Inlet: M5 x 0.8, Female Thread

Adapter Material: Brass, Pad Diameter: ø16, Pad Type: Flat w/Groove, Pad Material: Silicone Rubber, Mounting Thread Size: M5 x 0.8, Female Thread, Vacuum Inlet: M5 x 0.8, Female Thread

Adapter Material: Stainless Steel, Stainless Steel 304, Pad Diameter: ø16, Pad Type: Flat w/Groove, Pad Material: Conductive Silicone Rubber, Mounting Thread Size: M5 x 0.8, Female Thread, Vacuum Inlet: M5 x 0.8, Female Thread

Adapter Material: Stainless Steel, Stainless Steel 304, Pad Diameter: ø6, Pad Type: Flat w/Groove, Pad Material: Conductive Silicone Rubber, Mounting Thread Size: M5 x 0.8, Female Thread, Vacuum Inlet: M5 x 0.8, Female Thread

Body Size: M5 x 0.8, 10-32UNF, Type: Elbow, Control Type: Meter-out, Indicator Direction: None (0°), Thread: R, Port Size: M5 x 0.8, Width Across Flats: 9mm, Tubing: ø4, Seal: w/Sealant

Body Size: M5 x 0.8, 10-32UNF, Type: Elbow, Control Type: Meter-out, Indicator Direction: None (0°), Thread: R, Port Size: M5 x 0.8, Width Across Flats: 9mm, Tubing: ø6, Seal: w/Sealant

Slit Valve

width (mm) 32 x 222 46 x 236 50 x 336 Applicable wafer size Symbol 32 Note) Height 200 mm 46236 50336 300 mm Note) Neither cassette type Half MESK nor cassette type Full MESK are set.

Series: JSY1 (1000 Series), Actuation: 1 (2-position, Single), Manifold Type: 20 (Body Ported), Power Saving Circuit: T (w/Power Saving Circuit), Electrical Entry: L (L Plug Connector w/Lead Wire, 300mm), Cable Length: None, Light/Surge Voltage Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: E (Push-turn Locking Lever Type), Port Size, Thread Piping: M5 (M5 x 0.8), PE

Series: JSY1 (1000 Series), Actuation: 2 (2-position, Double), Manifold Type: 20 (Body Ported), Power Saving Circuit: T (w/Power Saving Circuit), Electrical Entry: L (L Plug Connector w/Lead Wire, 300mm), Cable Length: None, Light/Surge Voltage Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Port Size, Thread Piping: M5 (M5 x 0.8), PE Plate: PE

Series: JSY1 (1000 Series), Actuation: 2 (2-position, Double), Manifold Type: 20 (Body Ported), Power Saving Circuit: T (w/Power Saving Circuit), Electrical Entry: M (M Plug Connector w/Lead Wire, 300mm), Cable Length: None, Light/Surge Voltage Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Port Size, Thread Piping: M5 (M5 x 0.8), PE Plate: PE

Series: JSY1 (1000 Series), Actuation: 1 (2-position, Single), Manifold Type: 20 (Body Ported), Power Saving Circuit: T (w/Power Saving Circuit), Electrical Entry: L (L Plug Connector w/Lead Wire, 300mm), Cable Length: None, Light/Surge Voltage Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Port Size, Thread Piping: M5 (M5 x 0.8), PE Plate: PE

Series: JSY1 (1000 Series), Actuation: 2 (2-position, Double), Manifold Type: 20 (Body Ported), Power Saving Circuit: T (w/Power Saving Circuit), Electrical Entry: L (L Plug Connector w/Lead Wire, 300mm), Cable Length: None, Light/Surge Voltage Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: D (Push-turn Locking Slotted Type), Port Size, Thread Piping: M5 (M5 x 0.8),