Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Terminal 7 Green CH4_OUT1 8 Yellow N.C.

Wedge Cam Operation Gripper Series MHK2

Lead wire: In-line entry Lead wire: Perpendicular entry L L L Unit: mm In-line Perpendicular Lead wire Auto switch Finger position Air gripper D-F9BV D-F9B D-F9NV D-F9N D-F9BA Open 2 7 MHK2-12 Closed 7 3 12 Open 2 6 MHK2-16 Closed 8 1 1 3 13 Open 1 MHK2-20 Closed 5 1 11 Open MHK2-25 Closed 6 2 12 Open 3 MHKL2-12 Closed 3 7 12 Open 1 MHKL2-16 Closed 1 1 3 8 13 Open MHKL2-20 Closed

Electric Actuator Triple Axis P&P Unit

Mount the top cover. 22 Electric Actuator/Maintenance Guide 7 Be sure to read before handling.

Series M Miniature Fittings M3, R(PT) 1/8, M5

A C B ) M-01AN-4 M-01AN-6 M-01AU-4 M-01AU-6 5 7 5 7 16 18 16 18 2.1 4.0 2.1 4.0 1.8 2.5 1.8 2.5 Nylon tube Soft tube Hose nipple: M-01H-4, -6 Effective orifice(mm2 Weight (g) ) Part No.

Heavy Duty Stopper Cylinder Series RSH/RS1H

7 o !6 i @7 @1 #2 @9 @6 @4 #9 !0 !9 u #0 #6 t #8 q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 y Single acting spring extended (TL, TM) Double acting spring type (BL, BM) r $0 !1 !

Series KDM Rectangular Multi-connector

O f o r e b m u N g n i t c e n n o c s e b u t h c n I h c n I h c n I c i r t e M c i r t e M c i r t e M 8 / 1 1 0 P 0 1 M D K 1 0 S 0 1 M D K 2 . 3 3 2 P 0 1 M D K 1 0 S 0 1 M D K e u l B 2 3 / 5 3 0 P 0 1 M D K 3 0 S 0 1 M D K 4 4 0 P 0 1 M D K 3 0 S 0 1 M D K 0 1 d e R 4 / 1 7 0 P 0 1 M D K 7 0 S 0 1 M D K 6 6 0 P 0 1 M D K 7 0 S 0 1 M D K 6 1 / 5 9 0 P 0 1 M D K 9 0 S 0 1 M

EX260-SPR-A_eng

Warning: Danger: Unused 7 No.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

4 @7 $3 #8 #9 $0 $2 #7 @8 @9 o !6!0 @1 $1 !7 SMC !5 #6 @3 !

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 2 mounting screws (for mounting brackets) are included in bracket part no. 17-2-12 7 Series VCA Direct Operated 2 Port Solenoid Valve For Air Dimensions Grommet: G Conduit: C Q F D Q F 300 280 D VC G1/2 C R C R L VDW IN E E VQ Manual override A B B A 2-P Port size 2-P Port size VX2 VX Manual override

VCL

Valve model VCL2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCL4 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 Mounting screws (for mounting bracket) are included

VCS

Valve model Port size VCS21 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04A Note 1) 1/2 VCS41 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting bracket

VEX1

(Example) VVEX2-2-7-02N VEX3222-1LN 6 pcs. VEX1-17 1 pc. VVEX4-2-6-A VEX3420 5 pcs. VEX4-5 1 pc.

Power Clamp Cylinder

1 2 3 4 5 6 7 8 9 10 11 12 13 80 0 5 10 15 20 25 30 35 40 45 50 55 60 Load capacity (N) Load capacity (pounds) 63 300 12.0 280 11.0 Distance from pivot point (inches) 260 Distance from pivot point (mm) 10.0 240 9.0 220 200 8.0 180 7.0 160 6.0 140 5.0 120 100 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 4.00 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 Load capacity (N) Load capacity

Compact Cylinder with Solenoid Valve/

Bore size (mm) Stroke range (mm) OB P1 P2 Q RA RB S V W Y Z 32 40 50 63 9 M5 x 0.8 M5 x 0.8 2.5 10 7 12 43 43.5 59 38 5 to 100 9 M5 x 0.8 M5 x 0.8 2.5 10 7 12 43 43.5 67 46 5 to 100 11 Rc, G, NPT1/8 Rc, G, NPT1/8 3.5 14 8 17 54 63 83 58 10 to 100 14 Rc, G, NPT1/8 Rc, G, NPT1/8 3.5 18 10.5 17 54 63 97 69 10 to 100 6 Compact Cylinder with Solenoid Valve/Guide Rod Type Series CVQM Auto Switch

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Shield Brown Black Red Black Orange Black 12 13 7 6 9 8 3 Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 Connector B terminal no.

Air Cylinder

16 11 M18 x 1.5 18 1/8 63 129 56 Up to 400 35 32 65 27 50 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 63 Up to 400 35 32 70 27 55 18 38 6 11 51 11 M6 x 1 7 16 11 M18 x 1.5 22 1/4 73 135 67 Up to 400 35 32 75 27 58 18 38 6 11 51 11 M8 x 1.25 7 16 11 M18 x 1.5 22 1/4 73 135 80 Up to 500 40 37 88 32 69 22 45 12 13 62 13 M8 x 1.25 7 19 13 M22 x 1.5 26 1/4 83 158 85 Up to 500 40 37

Series KV2 Fittings

Part Number D1 Weight (grams) Bag/Box Quantity D2 L 5/32 1/4 3/8 1/2 KV2L03-00 KV2L07-00 KV2L11-00 KV2L13-00 10.4 13.2 17.9 21.7 10.6 13.3 18.1 22.1 18.3 20.6 26.1 28.9 4.5 5.3 6.6 7.8 16 17 21 22 1.6 3.5 5.4 8.5 5 7 16 23 100/800 100/400 100/200 100/200 7 Series KV2 45 Male Elbow KV2K_ _-_ _S D2 M L1 D1 Applicable Tube A Hex L2 Thread D3 D4 App. Tube OD (inch) L2 M Min. Flow Dia.

Series AP3500

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 1000 psig (6.9 MPa) 8000 psig (55.2 MPa) 14 to 212F (10 to 100 -C) (No freezing) 0.27 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 1) 1 x 10-7 Pam3/sec 1) Ra max 15 in. (0.4 m) Option: 10 in. (0.25 m), 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld 70 to 110 psig (0.48 to 0.76 MPa) NPT 1/8 inch Top Bottom mount

Air cooled Thermo-con (Compact type)

History History Version Preface Contents Chap.1 Chap.2 Chap.3 Chap.4 1.0 Jul/7/22 Jul/7/22 Jul/7/22 Jul/7/22 Jul/7/22 Jul/7/22 Record of Changes Version Contents Date 1.0 First edition Jul/7/22 HEF002-A6 i Preface Preface Thank you very much for purchasing SMC Thermo-con. This manual contains description for communication protocol of this product for your full benefit from this product.

MGP

7-1.