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At this time, the settings of Level 1 and Level 2 are also reset. HEC002-A/HEC006-A 8-5 Operation 8.6 Detail of setting mode level The each setting mode level is explained below in detail. P V < 2 3 . 0 C # 1 8.6.1 Setting mode, Level 1 S V 2 5 . 0 C M O D E 1.

B A C D 13 14 High Rigidity Direct Acting Guide Series LJ1H20 Standard Motor Motor Output Rolled Ball Screw 100W 15mm/20mm lead Horizontal Mount How to Order Stroke LJ1H202 NC 1 F 2 Cable entry direction Top entry Cable entry direction Cable length Power supply voltage Left entry F R L T B 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) 1 2 Axial Right Left Top Bottom 2 3 4 5 2m 3m 4m 5m Axial

When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + t When P2 + 0.1 > b, subsonic flow P1 + 0.1 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 2 293 273 + t Q : Air flow rate [dm3/min (ANR)], dm3 (Cubic decimeter) of SI unit are also allowed to described by l (liter). 1 dm3 = 1 l . 25 Solenoid Valve Flow Characteristics C : Sonic conductance [dm3/(sbar)]

22 316L SS PCTFE (Option: Vespel) SH Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Seat Hastelloy C-22 Hastelloy C-22 Hastelloy C-22 PCTFE Dimensions inch (mm) AP2700 2.12 (53.8) 1.5 (38.1) 1.87 (47.5) 2.62 (66.5) 2.92 0.04 (74.2 1) 2.56 0.04 (65.0 1) Max. 10.95 (278.1) HP LP 1.54 0.04 (39.1 1) 4.93 0.05 (125.2 1.3) Connections inch (mm) A FV4 MV4 TW4 FV6 MV6 TW6 (109.2) 4.30 (

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

Model AF20 AF40 AF40-06 AF50 1/8, 1/4 AF30 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 AF60 Applicable Model Port size 1 Model AF30 AF40 AF40-06 AF50 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 AF60 30 AF X425 2 03 B Port size 1 30 AF 2 03 B X430 For high pressure Semi-standard: Select one each for a to c. Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

type VXF21A<<C S D C J Qp2 K I J R Tp2 K I S R Q z 280 (32) U L H L G1/2 G1/2 E E U 1/4 Exhaust port H 1/4 Exhaust port F F G Port size 2 x P G Port size 2 x P Faston terminal A B D C J K I 11 Q R S L E U 1/4 Exhaust port H F G 2 x P Port size Dimensions (mm) Model Port size P A B C D E F G H I J K L S VXF21A< VXF22A< VXF23A< 3/4 1 1 1/2

Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.

) 2-4.5 (mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 Approx. 300 (lead wire length) n-Rc(PT) 1/8, M5 x 0.8 (port A) 7 20 34 2-4.5 (bracket mounting holes) 4-M3 x 0.5, depth 6 (bracket mounting screws) 7 8 47.5 15.5 20 25 49 4 L3 7 7 L: Dimension table n: Stations n L 1 35 27 13 2 54 46 32 3 73 65 51 4 92 84 70

(mm) A Weight (g) L D M Model Soft nylon Urethane KAH23-M5 17 8.5 14 13 2.1 M5 x 0.8 M6 x 1 7 17.5 12.5 8.5 3.4 2.9 4 Applicable tubing 1 8 KAH23-M6 KAH23-U01 8 10 3.2 KAH04-M5 17 M5 x 0.8 M6 x 1 9.5 14 13 2 4 4 8 KAH04-M6 17.5 4 1 8 KAH04-U01 13.5 18.5 5 14 10 10 16 5.6 5.6 K 1 4 KAH04-U02 16.5 10.5 10 KAH06-M5 18.5 M5 x 0.8 M6 x 1 15 14 4 4 11.5 3 10 KAH06-M6 19 Connection

available Non.rclaling rcd Sngle f0( (N)C@K 1 2 . 1 6 24,25 3 2 , 4 A 5 0 , 6 3 Also Available: E 12,16 2A 25 32,40 Double rod iN)c0r(u'/ a 1 2 , 1 6 20,25 32,.1O CQP2 80,100 Spr ng _ _ elurn 3/extend ; coP2 1 2 , 1 6 24,25 32,44 50 Serbs End o20 to MechanicallY the cylinder at end of Large bore size Single rod 14n 160 180 200 124 Double r c d c02w 160 200 Long stroke 32 40 50,63 a0,100

1/16") 125 (1 1/4") 150 (1 1/2") 200 (2") 075 (3/4") 088 (7/8") 106 (1 1/16") 125 (1 1/4") 150 (1 1/2") 200 (2") Auto Switch Mounting Position (NCDMB-C) (in) Auto Switch Mounting Position (NCDMC-C, NCDME-C) (in) D-B5 D-B6 D-C7 D-C80 D-C73C D-C80C D-B5 D-B6 D-C7 D-C80 D-C73C D-C80C D-B59W D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-B59W D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-H7LF D-G59 D-K59 D-H7LF D-G59

Bolt used Max. tightening torque Nm(kgf/cm) Max. screw-in depth l (mm) Type MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 0.9{9.2} 2.1{21.4} 4.4{44.9} 7.4{75.5} 7.4{75.5} 18{180} 5 6 8 10 13 15 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 This causes vibration, increase of moving part and air leakage.

(ZS-28-C-1) -13No.D-S-OMG0006-C Installation / Removal of the sensor connector to the amplifier unit When connecting the connector, insert it straight into the socket until the connector clicks.

B C External pilot solenoid 5 to 99C Note 1) (Water, Oil etc.

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

Material Note 2 Clear anodized Aluminum alloy 1 8 15 Bumper Urethane 1 Clear anodized Aluminum alloy 1 12 to 40 16 Key 1 Aluminum alloy 1 Hard anodized Carbon steel 2 Aluminum alloy 1 Chromated 8: Nickel plated 17 C type snap ring for hole Carbon tool steel 1 Aluminum alloy 1 Chromated 12 to 40: Nickel plated 18 19 20 21 22 23 Magnet Plug 1 1 Stainless steel 8: Quenched 6 Spline rod 3 1 Carbon

Roll moment Mr(Nm) 1 N m = 0.7375 ft lb 31 MXH Series Compact Slide Construction MXH6 (6) MXH10 (10) 20 6 21 17 2 1 19 5 18 8 10 20 6 21 16 2 1 19 5 18 10 8 3 24 13 9 7 22 14 4 11 15 12 3 24 13 23 22 7 4 11 MXH16, 20 (16, 20) 20 6 21 17 2 1 19 5 18 18 8 10 4 7 22 23 13 24 3 12 11 Parts list Parts list Description Material Note Description Material No.