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Micromesh element equipped Note) Click here for details 3 4 5 6 3.5 MPa 7 MPa 14 MPa 21 MPa Nominal filtration Differential pressure indication Fluid direction 005 010 020 5 m 10 m 20 m 0 1 2 4 5 None Nil IN left IN right Differential pressure indicator Construction/Connection L Differential pressure indication switch Note) Note) The paper elements for water-glycol or emulsion is 10 m only

(Including O-ring for element) FH FH With relief valve Without relief valve 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) Model Element size HOW FH990-04/06 FH990-08/10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28/32 65 x 90 82 x 133 104 x 177 104 x 177 132 x 212 132 x 212 155 x 193 EM520-074N EM620-074N EM720-074N EM820-074N EM920-074N

(Except D-P5DWL type) Thread type Port thread Mounting thread Bore size Symbol Cylinder stroke (mm) 12 to 25 M thread Rc NPT G M thread NPT Nil For Standard Stroke and Manufacuture of intermediate of Stroke, refer to page 7-5-3. M thread TN TF 32 to 50 12 to 25 32 to 50 NN Inch thread Note 3) M thread to be used for without auto switch type of 32, 5 stroke exceptionally.

P a ] [ M P a ] PF3W540 PF3W511() [ M P a ] [ M P a ] PF3W521() [ M P a ] -33No.PF-OMN0009CN-F PF3W511(PVC ) PF3W521(PVC ) [ M P a ] [ M P a ] -34No.PF-OMN0009CN-F PF3W504/520/540 PF3W504S/520S/540S [MPa] [MPa] [ M P a ] [ M P a ] a] [MP a] [MP PF3W511() PF3W521() PF3W511/521(PVC ) [MPa] [ M P a ] [ M P a ] a] [MP [MPa] a] [MP -35No.PF-OMN0009CN-F IN 3F.S.8 cm (100 L/min 11

Pa/ ( S) N N m 1 1 M Pa/m ( ) m 2 M Pa M Pa (A) /N (B) / ( ) m 2 ( A ) m 2 5- I R 3 0 0 1 SUP OUT 2 3%F.S. 3 R B(P36203018) G 2 3 RcF N IR3000G43-2-01 G43-P2-N01-X30 IR3010G43-4-01 G43-P4-N01-X30 IR3020G43-10-01 G43-P10-N01-X30 02:1/4 03:3/8 04:1/2 Rc FG NNPT 00.010.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R302BG No.

How to order: EX500-AP 050 S How to order: EX500-AC 030 SSPS How to order: EX500-AC000-S 1 How to order: EX9-AC 010 1 How to order: EX9-AP 010 7 Cable length (L) Connector specification 003 0.3 [m] 005 0.5 [m] 010 1 [m] 030 3 [m] 050 5 [m] Cable length (L) Connector specification 010 1 [m] 050 5 [m] Cable length (L) 010 1 [m] 030 3 [m] 050 5 [m] Cable length(L) 010 030 1[m] 3[m] S Straight

HRS Series 6.1 Option J [Automatic fluid filling] 6-1 HRX-OM-O021 Chapter 6 OptionOptional Accessories 6.2 Option M [DI water (Pure water) piping] 6.2.1 Option M [DI water (Pure water) piping] This option is for customers who use DI water (pure water) as circulating fluid.

Snap ring m 1.5 1.25 1.25 1.75 t 0.9 1.15 1.15 1.15 Part No.

Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD.

M4 hexagon socket head cap screw [Replacement Element] END400-005 (5 m Type) END400-020 (20 m Type) 4 elements are required per unit. Protection cover 2-3. Removing cylinder a. Remove the M8 hexagon nut at four parts. b. Remove the cylinder flange holding bolts. Holding bolt: M8 hexagon socket head cap screws at four parts up to the cylinder, and remove it.

R. Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D H R 3 10 R M9B S 22 M D H R 3 10 R M9B S Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 pcs. 1 pc.

Lubrication Manual override Shock/Vibration resistance (2) Enclosure Non-locking push type 150/50 m/s2 Dustproof Note 1) Based on dynamic performance test, JIS B 8374-1981.

M4 hexagon socket head cap screw [Replacement Element] END400-005 (5 m Type) END400-020 (20 m Type) 4 elements are required per unit. Protection cover 2-3. Removing cylinder a. Remove the M8 hexagon nut at four parts. b. Remove the cylinder flange holding bolts. Holding bolt: M8 hexagon socket head cap screws at four parts up to the cylinder, and remove it.

PB Note) Parts e and r are for selection of valve composition.

o u n V F l a n g e M o u n t . . . . . . . . . 7 4 Construction/Parts List . . .

8 @0 @2 @1 @7 RLQ @3 r MLU o #5 !6 $3 $4 MLGP Component Parts Component Parts Material No.

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L ISE30 01 25 M For positive pressure ZSE30 01 25 M For vacuum/low pressure Option 2 Piping specifications Nil None Bracket R 1/8 (With M5 female thread) 01 NPT 1/8 (With M5 female thread) A T1 Straight type 4 One-touch

-2No.PS-OMF0005CN-E / 1 1.5 *3) 1 1 [] -3No.PS-OMF0005CN-E () () -4No.PS-OMF0005CN-E () * 5 m -5No.PS-OMF0005CN-E * (RcNPTG) 1/8 79 Nm 1/4 1214 Nm 1.52 2 * () ()() () () -6No.PS-OMF0005CN-E * IP66IP65 () 060 (5 ) * -7No.PS-OMF0005CN-E (ISA2 ) * * (EXH) 5 m 0.2 MPa CE (2 VCA ) () C-R () ()C-R ( ) () AC 10 DC 2 * * 2 0.51.25 mm -10+10 5 -8No.PS-OMF0005CN-E *

Note 8) For details about wiring, refer to the Operation Manual that can be downloaded from SMC website (http://www.smcworld.com). 383 PF2D Series How to Order 4-channel Flow Monitor Remote Type Monitor Unit PF2D20 M Output specification Option 2 (Refer to page 391.) 0 1 NPN4 outputs PNP4 outputs Accessory / Power supply output cable (2 m) Nil 4C None Sensor connector (4 pc.)