Compact and

The selected supply valve should at least have the C factor shown in the table below. Minimum C Factor of a Supply Valve VAC. SUP. Model C [dm3/(sbar)] ZU05 0.12 ZU07 0.23 EXH. Screw-in type u Component Parts Air Supply No. Description Material Note 1 Body PBT Caution 1. Quality of supply air 2 Diffuser PBT Type S: White, Type L: Black 3 Cap POM Use clean compressed air as fluid.

EXxx-OMY0006CN

C. N. C. 34 Fig. 6-1 24 No.EX##-OMY0006CN 7. 7.1. 8 2xM5 (= 1.5 Nm) 2xM5 (SI = 1.5 Nm) 4xM () Fig. 7-1 8 VQC4000 7 25 No.EX##-OMY0006CN 7.1.1. SI 2 / =0.6 Nm O Fig. 7-2 IP65O 7.1.2. SI 1x 2x ( 2.5 mm= 1.3 Nm) Fig. 7-3 IP65 IP65 26 No.EX##-OMY0006CN 7.2.

CEx-OMQ0013

C D () T J 50 50mm K 63 63mm 80 80mm N 100 100mm R H Z mm mm mm 40 25~850 25~700 1200 950 50 25~800 25~650 1150 900 63 25~800 25~650 1150 900 80 25~750 25~600 1100 900 100 25~750 25~600 1100 850 4-2 CEU2 NPN P PNP 15 4-3 CE1-R 5 5m 10 10m C 15 15m 20 20m A B CD E F G () 16 5. 5-1 17 18 5-2 19 5-3 20 6. 6-1 1 3 4 7 5 2 6 8 9 10 11 6-2 1 11 10 9 2 3 4 5 6 7 8 12

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

BZ Basic Type Axial foot type Front flange type Rear flange type Boss-cut basic type C(D)M2X L 40 10 150 C73 With auto switch (with built-in magnet) Boss-cut front flange type FZ Microspeed cylinder Bore size 20 25 32 40 Number of auto switches Port thread type Nil TN TF 20mm 25mm 32mm 40mm Rc NPT G Nil S n 2 pcs. 1 pc.

Low Maintenance Filter Series FN1

135 180 4-11 225 (266) (60) AIR VENT G 1/4 q q A (43) OUT IN e e 150 r B t 120 327 188 (519) w w 84 OUT 2-R 1 r IN 53 DRAIN G 1/4 Note Parts list Dimensions (mm) A B No.

Pressure Relief 3 Port Valve with Locking Holes

Dimensions Padlock mounting position (Port size) (Port size) Standard specifications Model P1 P2 A B C D E F G H VHS20 1/8, 1/4 1/8 71.5 23 40 37 28 42 17.5 40 VHS30 1/4, 3/8 1/4 87 32 53 49 38 53 20 53 VHS40 1/4, 3/8, 1/2 3/8 111 42.3 70 63 52 71 29 70 1 0 - Revision history Rev. A Safety Instructions (Piping) corrected.

Safety Instructions

Properly seal the terminal connection (G 1/2) with the special wiring conduit, etc.

VFRA3000

Operating pressure (MPa) Flow Characteristics/Weight Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Weight (kg) Port size Pilot port size (Nominal size) Function Valve model C [dm3/(sbar)] 7.5 8.4 7.1 7.9 6.8 7.2 6.5 6.9 7.6 (2.4) 9.3 (2.4) C [dm3/(sbar)] 7.5 8.7 7.4 8.6 6.3 6.5 7.9 (3.4) 9.5 (3.4) 6.1 6.5 b 0.34 0.38 0.40 0.37 0.38 0.40 0.41 (0.47) 0.39 (0.46) 0.36 0.41 b Cv

Air Slide Table Series MXQ

Weight g 65 65 25 15 15 B side traveling parallelism to A side Refer to Graph 1.

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

A B c D E F H K lil N P O (Ihpth) Tol{ances Tolerances NCDBBlBWlO 1 . 1 4 0.750.98 !.

NCRBIBwserbs

A B c D E F H K lil N P O (Ihpth) Tol{ances Tolerances NCDBBlBWlO 1 . 1 4 0.750.98 !.

Series PF3W digital flow switch is perfect for applications requiring a constantly monitored flow of cooling or cleaning water. The PF3W series has been improved both in design and operating performance over the PF2W flow switch.  Depending on the selected model, the PF3W is up to 40% smaller in volume, offering improved piping space and flexibility.  Designed to work with fluids up to 90ºC

Heatless Air Dryer Series ID 1

Maintenance Caution Model A B C D E Mounting dimension J H L K G F Port size Nominal size (B) ID200 240 240 320 320 1.

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series

INFORMATION Step Motor Controller 5 types of communication protocols New New

Terminal name Details 1 L+ +24 V 2 NC N/A 3 L 0 V 4 C/Q IO-Link signal * For , enter a number from the No. line in the table on page 6. Refer to the dimension drawings on page 6 for the mounting dimensions.

Heatless Air Dryer ID Series

(C) (Atm.temp.) 0.5 MPa SOL.2 AMF 0.7 MPa Fixed filter ZFC Silencer EXH.

MHF2

8 Clear anodized Aluminium alloy 16 to 20: Type C snap ring i Cap A Clear anodized Aluminium alloy Stainless steel !9 Parallel pin o Cap B Clear anodized Aluminium alloy NBR @0 Piston seal !0 Cap C Urethane rubber NBR @1 Gasket !1 Head damper Nit riding Stainless steel NBR @2 Gasket !2 Rack Replacement Parts Bolts for Body Through-hole Mounting Description Kit no.

Safety Speed Control Valve (SSC Valve) Series ASS 1

(C) Fig. (B) Fig. (A) Set needle Piston valve Switching valve Switching valve Switching valve Switching valve Cylinder Cylinder Cylinder Cylinder Check valve (Stroke end) Fig. (C) Set pressure for piston valve > Pressure in the cylinder Set pressure for piston valve < Pressure in the cylinder (Stroke end) The air that has been supplied by the switching valve closes the check valve.

MHF2

8 Aluminium alloy Clear anodized 16 to 20: Type C snap ring i Cap A Aluminium alloy Clear anodized Stainless steel !9 Parallel pin o Cap B Aluminium alloy Clear anodized NBR @0 Piston seal !0 Cap C Urethane rubber NBR @1 Gasket !1 Head damper Stainless steel Nit riding NBR @2 Gasket !2 Rack Replacement Parts Bolts for Body Through-hole Mounting Description Kit no.

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Mounting Front flange type Rear flange type Double clevis type B A L F G D Through hole (standard) Double end tapped Foot type Cushion/Rod end threads Bore size Action D Double acting Standard (rod end female threads) With rubber bumper Rod end male threads Nil C M Port thread type Nil TN TF 32 40 50 63 80 100 32mm 40mm 50mm 63mm 80mm 100mm Rc NPT G Combination of the above specifications