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Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Body Ported Common SUP Common EXH, Stations: 14 Stations, A B Port Size: -, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 20 (5 Port/Body Ported Common SUP Common EXH), Stations: 14 Stations

M5 x 0.8 14 12.5 21.5 19 22 19 19 16 16 14 6 5 7.6 depth 6.5 81 72.5 86 77.5 91 82.5 96 87.5 101 92.5 106 97.5 116 126 100 88.5 93.5 103.5 108.5 135 145 40 36.5 110 98.5 113.5 9.5 depth 8 105 115 120 125 83 88 93 98 103 108 118 128 106 111 116 121 126 131 141 151 5.5 9 4.5 20 25 15.5 18 32 50 10 29 40.5 M8 x 1.25 9.5 depth 9 22 22 23 20 8 748

20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Zuazobidea 14, Pol. Ind. Jundiz, E-01015 Vitoria Phone: 945-184 100, Fax: 945-184 124 Belgium SMC Pneumatics N.V./S.A. Nijverheidsstraat 20, B-2160 Wommelgem Phone: 03-355-1464, Fax: 03-355-1466 Greece S.

External Grip Internal Grip MHR3-10R/MDHR3-10 MHR3-10R/MDHR3-10 10 10 0.6 MPa Pressure Pressure 0.6 MPa 8 8 Gripping force (N) Gripping force (N) 0.5 MPa External grip 0.5 MPa 6 6 0.4 MPa 0.4 MPa 4 4 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 2 2 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L (mm) Gripping point L (mm) Internal grip MHR3-15R/MDHR3-15 MHR3-15R/MDHR3-15 20 20 0.6 MPa Pressure Pressure

Allowable horizontal direction load l l m m0 l = 50mm Graph 1 l = 100mm Graph 2 v = 100mm/s or less Graph 6 v = 50mm/s or less Graph 5 300 300 MGF100 MGF100 50 200 200 MGF100 30 40 MGF100 MGF100 100 100 MGF63 30 MGF63 MGF63 20 50 40 50 40 MGF63 Load weight m0 (kg) Load weight m0 (kg) Load weight m (kg) Load weight m (kg) 30 30 20 20 20 MGF40 MGF40 10 10 10 MGF40 MGF40 10 5 4 3 5 4 3 2 2 5

20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w

14 0.1 14 17 0.1 2 x 3.2 Inscribed number 3, 4, 6 (Refer to How to Order.)

13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 -45No.EX-OMX1001 Dimensions -46No.EX-OMX1001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

. : : : : : Green flashes EtherNet/IPTM-level communication not established 14 0 1 1 1 NS Green light ON Element Description Multiple EtherNet/IPTM-level communications established DHCP mode 1 1 1 1 CLEAR/HOLD Communication connector Connect the EtherNet/IPTM line.

Remote (2) Mount the end plate bracket (EX600-ZMA2) to the end plate using 2-M4 x 14 screws. Tightening torque: 0.7 to 0.8 Nm 1 2 3 CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

Remote (2) Mount the end plate bracket (EX600-ZMA2) to the end plate using 2-M4 x 14 screws. Tightening torque: 0.7 to 0.8 Nm 1 2 3 CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

LCD 3. 4. 5. 14 6. 5 Terminal Setting -13No.EX-OML0010CN-C 15 (I/O ) 24 () 27 () 33 () 47 () -14No.EX-OML0010CN-C 1. I/O Monitor(I/O ) I/O [1.I/O Monitor] 2.& 1. 3. 4. 1. 2.4. 16 2.

9 R1/8 Rc1/8 14 1.5 ZS-31-X175 29 13 R1/4 Rc1/4 17 1.6 -18No.PS-OMS0004CN-D Revision history A B C D 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2014-2017 SMC Corporation All Rights Reserved

Air or liquid leakage Check if air or liquid are leaking from the piping. 14 The product is noisy. Product failure Replace the product. -52NO.TQ1050188-OM002 Error No.

www.smcworld.com PV 12 KQ2S06-01SKQ2S04-01S 1/8PV 2~3 35Nm M5PVPD 1/6 11.5Nm / 16 - No.ZB-OM00301 V V V Assy V Assy V V Assy V Assy (2mm) V Assy 0.15Nm 0.15Nm 17 - No.ZB-OM00301 V Ass y V Assy V Assy ( ) V Assy 2 1V V Assy 2V Assy Assy 18 - No.ZB-OM00301 O Assy V Assy Assy V Assy Assy 19 - No.ZB-OM00301 1TK1-123 2 3 1VKJ 2 3 1 0.1 2 0.1 3 0.15 -0.2 2 20