AZ1000

Refer to gauge guide (P.94).

Clean Gas Filter

Note 2) Weight kg Connection Filtration area cm 2 AME SFA100-02 SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 SFA102-02 SFA202-02 SFA302-02 SFA103-02 SFA203-02 SFA303-02 Rc 1/4 (Female thread) 13.85 ED001S-X10V 0.34 26 NPT 1/4 (Female thread) AMF Rc 1/4 (Female thread) 33.18 ED101S-X10V 0.44 70 NPT 1/4 (Female thread) ZFC Rc 1/4 (Female thread) 56.75 ED201S-X10V 0.66 140 NPT 1/ 4 (Female

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

20.9 30.2 (30.3) 23 (24) AS221FSG-02-03 (S) 5/32" 8.2 AS221FSG-02-07 (S) 1/4" 11.2 23.4 32.7 (32.8) 24 (24) AS221FSG-02-09 (S) 5/16" 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FSG-02-11 (S) 3/8" 15.5 26.4 35.7 (35.8) 15.6 25 (26) AS321FSG-02-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FSG-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FSG-02-

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

39.9 34.9 18.5 15 17 8 R 1/4 ASD430FG-02-08S 28.2 18.5 55 46.5 15.2 34.4 29.4 11 19.7 10 21 31 58 ASD430FG-02-10S 49.3 18.5 17 25.2 74 6 ASD530FG-02-06S 48.3 12.8 20.3 18.5 28.2 76 8 ASD530FG-02-08S 51.3 15.2 46.9 41.9 48.3 43.3 23 19.8 19 R 1/4 42.8 37.8 15.4 21 80 32.6 10 ASD530FG-02-10S 54.1 18.5 23.1 22 83 34.4 55.9 12 ASD530FG-02-12S 20.9 17 74 25.2 48.3 6 ASD530FG-03-06S 12.8 20.3 18.5

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10 20 50 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 40 30 5 10 20 10 0 5 0 5 20 10 10 0 10 Number of needle rotations Number of needle rotations Number

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

M M A L1 H/DL L/LL D1 D2 L2 KC H Connection threads KK Male Branch: KPQU, KPGU (M5) KK130 Effective area mm2 D Model L TPH TPS A (M5) 2 x Applicable tubing Connection thread R M H (width across flats) Note1) Applicable tubing O.D. mm Weight g P M P DM D M5 x 0.8 1/8 1/4 M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGU04-M5 KPGU04-01 KPGU04-02 KPGU06-M5 KPGU06-01 KPGU06-02 KPGU08-01 KPGU08-02

Table of Contents

-08 AS2200-02 100 200 50 100 0 0 SV100 ANA1 -C08 T0604 SV200 ANA1 -C10 T0806 200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed

ISE70/75/75H

Port size Rc1/4, NPT1/4, G1/4(ISO1179) U P DOWN U P DOWN U P DOWN SET SET SET Model with initial display settings of PSI is also available as standard.

PFxx-OMJ0005CN

Pn [H_1] [CoL] ON OFF ON OFF [F 1] OUT1 -25No.PF-OMJ0005CN-I H_1(H_2) H1(H2) H1(H2) 0 On H_1(H_2) H1(H2) H1(H2) 0 On -26No.PF-OMJ0005CN-I [F 2] OUT2 OUT2 OUT1, <> [F 2] [F 1]OUT1 [---] -27No.PF-OMJ0005CN-I [F 3] (N2)(Ar)(CO2) CO21/2 <> [F 3] [FLU] N2 [F 3] -28No.PF-OMJ0005CN-I [F 4] 20 1 atm() 0 1 atm() <> [F 4] [rEF] 0.927= [F 4] -29No.PF-OMJ0005CN-I [F 5] <> [F 5] [rES

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

(Blocking disks) P R (Blocking disk) P P U side D side Series SY3000 Series SY3000 U side D side Port size Port size Assembly No.

SL5200

Refer to gauge guide (P.94).

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS2201FE-01, AS2211FE-01 AS2301FE-01, AS2311FE-01 AS2201FE-02, AS2211FE-02 AS2301FE-02, AS2311FE-02 AS3201FE, AS3211FE AS3301FE, AS3311FE Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa AS-F Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) TMH ASD AS AS-FE AS-FE Number of needle rotations Number of needle rotations Number of needle rotations

Tamper Proof and Flat Head Screw

ASD430F-02-08ST R 1/4 36.7 11 7 15 18.5 18.5 17 46.5 15.2 8 28.2 1.5 40.7 41.7 ASD430F-02-10ST 19.7 21 49.3 18.5 10 31 ASD530F-02-06ST 17 12.8 48.3 6 25.2 20.3 ASD530F-02-08ST 18.5 15.2 51.3 8 28.2 R 1/4 49.3 15.4 9.5 23 19.8 19 55.3 1.5 53.7 ASD530F-02-10ST 21 18.5 54.1 10 32.6 23.1 ASD530F-02-12ST 22 20.9 55.9 12 34.4 ASD530F-03-06ST 17 12.8 48.3 6 25.2 20.3 ASD530F-03-08ST 18.5 15.2 51.3

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

N02 NPT 1/4 NPT 3/8 Note 2) N03 N04 NPT 3/8 NPT 1/2 NPT 3/8 NPT 1/2 Note 1) AS220-02 Note 2) AS320-02 597 Series AS20-D Construction AS3200-02-D Meter-out M5 type U10/32 type Meter-in M5 type U10/32 type AS3210-02-D Component Parts No.

VFRA3000

Refer to p.0-33 to 0-36 for Safety Instruction and common precautions. VFRA3111 5 pcs.

Speed Controller with One-touch Fittings

AS1002F-02 AS1002F AS2002F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS-F AS-F TMH ASD AS Number of needle rotations Number of needle rotations Number of needle rotations AS2052F AS3002F AS4002F AS-FE Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa KE Flow rate (L/

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series AS-F AS-F Model TMH Speed controller with Applicable tubing O.D. Model Port size 4 6 8 10 12 ASD One-touch fittings for AS121-M5 AS221-01 AS221-02 AS321-02 AS321-03 AS421-04 M5 x 0.8 AS 1 8 R metal body specifications 1 4 R AS-FE 1 4 Uses flame resistant resin as standard.

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

0 o AS-F AS-F w !0 o u r e !3 !1 u u TMH r t r t ASD e !3 e !3 AS q AS-FE !1 !1 i !4 y q q KE i !5 i !5 AS-FG AS-FP AS-FM AS321F-02 Meter-out type AS3201F-02 Meter-in type AS3211F-02 AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

AC

How To Order Lubricator Series AL20 to 40 AL 20 N 02 B X480 Z 2 Lubricator With External Epoxy Coating, Stainless Fasteners Body Size Symbol 20 30 40 Name Plate, Caution Plate On Bowl in psi, F Size 1/8 3/8 1/2 Bowl Applicable Body Size 20 30, 40 NPT Threads Description Metal Bowl Metal Bowl with Sight Glass Symbol 2 8 Port Size Symbol 02 03 04 Accessories Applicable Body Size 20 30 40 Port

Series AC Epoxy Coated F.R.L.

How To Order Lubricator Series AL20 to 40 AL 20 N 02 B X480 Z 2 Lubricator With External Epoxy Coating, Stainless Fasteners Body Size Symbol 20 30 40 Name Plate, Caution Plate On Bowl in psi, F Size 1/8 3/8 1/2 Bowl Applicable Body Size 20 30, 40 NPT Threads Description Metal Bowl Metal Bowl with Sight Glass Symbol 2 8 Port Size Symbol 02 03 04 Accessories Applicable Body Size 20 30 40 Port