Energy saving has also been considered as individual valves can be ordered with a power saving circuit as each valve can be manually turned off, safe maintenance is guaranteed.3 Port Solenoid Valve, Non Plug-in , Piping Variations, SOL VALVE, SGL, NON PLUG-IN, 3 PORT SOLENOID VALVE, 31 lb

Auto switches are integrated as standard.Magnetically coupled rodless cylinder, Low profile guide type, Overall length reduced by 31%, Bore sizes *: 10, 15, 25, Auto switches available, CYLINDER, RODLESS, RODLESS CYLINDER, 585, 5.114 lb

Auto switches are integrated as standard.Magnetically coupled rodless cylinder, Low profile guide type, Overall length reduced by 31%, Bore sizes *: 10, 15, 25, Auto switches available, CYLINDER, RODLESS, RODLESS CYLINDER, 585, 3.02 lb

Auto switches are integrated as standard.Magnetically coupled rodless cylinder, Low profile guide type, Overall length reduced by 31%, Bore sizes *: 10, 15, 25, Auto switches available, CYLINDER, RODLESS, RODLESS CYLINDER, 585, 4.07 lb

Auto switches are integrated as standard.Magnetically coupled rodless cylinder, Low profile guide type, Overall length reduced by 31%, Bore sizes *: 10, 15, 25, Auto switches available, CY1F Cylinder, RODLESS CYLINDER, 585, 2.15 lb

Choose from R(PT), NPT or G(PF) thread styles.Fluid: compressed air, Effective area mm 2 (Cv): male thread style 16 (0.88) - 550 (31); female thread style 12 (0.66) - 55 (3.1), Noise reduction: 35db or more, Oil mist removal: 99.9% or more, Element supply pressure: 0.1MP or less, Ambient & fluid temperature: 5 - 60° C, Exhaust Cleaner, EXHAUST CLEANER, 115, 0.2 lb

HRX-OM-Z015

0x00,0x03 Quantity of byte to read 0x06 0,6 0x06 Information written to 0040h (CH1 Circulating fluid set temperature) 0x00EB 0,0,E,B 0x00,0xEB Information written to 0041h (CH2 Circulating fluid set temperature) 0x0031 0,0,3,1 0x00,0x31 Information written to 0042h (Operation stop flag) 0x0001 0,0,0,1 0x00,0x01 Checksum ASCII:LRC RTU:CRC 8,9 0x50,0x4C Trailer CR/LF None Total quantity of byte 31

High Vacuum L Type Valve

External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2) for 0.5MPa 31

XL-OMY0001

XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200

XL-OMV0002

Ass'y 0 5 10 15 20 25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31

AIR CYLINDER

Sequence Yes Grommet 40mA mounting controller IC circuit Yes DC4.528V , Relay Tie-rod (2-colour display) Grommet D-M9NW(V) -900 Max.40mA Sequence mounting controller IC circuit Yes DC4.528V , Relay Tie-rod (2-colour display) Grommet D-M9PW(V) -900 Max.40mA Sequence mounting controller Relay Yes DC1028V , 2.5 Tie-rod Sequence (2-colour Grommet D-M9BW(V) -900 40mA mounting controller display) 31

CG1x-OM0006N

CG5A 11~2 2 31 4 5 6 7 13 2-6-3. P101. 2 CG5 N A (mm) E max (J) E max (J) 2 E=(m/2)v 20 0.28 0.42 25 0.41 0.65 E J m: (Kg) v m/s 32 0.66 0.91 40 1.2 1.8 50 2.0 3.4 EE max (J) 63 3.4 4.9 80 5.9 11.8 100 9.9 16.7 (2) 2-7. 14 28. 3 13 2 3CDG5 (M4 1~1.2Nm 3 3.

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

CG1-SMV13_en

Zuazobidea 14, 01015 Vitoria, Spain SWEDEN SMC Pneumatics Sweden AB,Ekhagsvgen 29-31, SE141 71 Segeltorp, Sweden SWITZERLAND SMC Pneumatik AG,Dorfstrasse 7, Postfach, 8484 Weisslingen, Switzerland SMC PnmatikSanayiTicaretveServis A.. GlbaharCaddesi, Aydn Plaza, No: 9 4 Gneli 34212 , Istanbul TURKEY SMC Pneumatics (U.K.) Ltd.

CRBB-OM00004

Allowable kinetic energy (J) 10 0.00015 15 0.00025 20 0.0004 30 0.015 40 0.03 How to calculate the load energy E : Kinetic energy (J) I : Moment of inertia (kg m Speed (rad/s) : Rotation angle (rad) 1803.14 rad t : Rotation time (s) 1 E = I 2 2 2 = t Table 2 Safety operable rotation time adjustment range Size Rotation time ( s / 90) 10 0.03 to 0.5 15 20 30 0.04 to 0.5 40 0.07 to 0.5 31

MRQB-OM0002

MRQB32,40 18 1 17 2 16 2 34 2 15 1 33 O 1 14 1 32 4 13 2 31 2 12 O 1 30 1 11 2 29 1 10 1 28 S 1 9 1 27 S 1 8 O 2 26 1 7 1 25 2 6 1 24 4 5 1 23 4 4 1 22 4 3 1 21 O 3 2 1 20 O 1 1 1 19 1 12 14 2 28 1 13 2 27 1 12 4 26 1 11 1 25 R 1 10 1 32 24 2 9 2 23 2 8 4 22 8 7 1 21 2 6 2 20 2 5 1 19 2 4 1 18 O 4 3 1 17 O 4 2 1 16 4 1 1 15

MHS

mm 0.01 c.p.m. 120 60 30 14 25 42 74 118 187 335 500 750 1270 (1) N 16 28 47 82 130 204 359 525 780 1320 () mm 4 4 6 8 8 12 16 20 24 32 g 60 100 140 237 351 541 992 1,850 3,340 6,460 1) 1625 =20mm 3263 =30mm 80125 =50mm 0.5MPa MHS4 MHS4 -16D MHS4 -20D MHS4 -25D MHS4 -32D MHS4 -40D MHS4 -50D MHS4 -63D mm 16 20 25 32 40 50 63 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 10 19 31

LEKF-OMZ0035

Actuator mounting A Model Bolt size Maximum tightening torque [Nm] Amm) mm LEKFS25 M4 1.5 4.5 24 LEKFS32 M5 3.0 5.5 30 LEKFS40 M6 5.2 6.6 31 4. When mounting the actuator, leave a gap of 40mm or more to allow for bending of the actuator cable. -25- 5.4 Precaution on maintenance Warning 1. Turn off the power supply before maintenance and replacement of the product. 2.

Electric Slide Table / High Precision Type 《 AC servo motor 》

Description Material Remarks 1 Body Aluminum alloy Hard anodized 28 Spider PUR 2 Teble Stainless 29 Cover Resin 3 Guide block Steel alloy 30 Return guide Resin 4 Ball screw shaft Steel alloy 31 Scraper Urethane 5 Ball screw nut Resin/Alloy steel 32 Steel ball Steel for special 6 End plate Aluminum alloy Hard anodized 33 Masking tape 7 Piston Aluminum alloy 34 Lock With lock only 8 Piston

JXCx-OMT0061CN

) 16 (0410)h (041F)h (No.1) 16 (0420)h (042F)h (No.2) 16 . . . . . . . . . . . . . . . (07F0)h (07FF)h (No.63) 16 * ()No.0 (0400)h 1 0=1=ABS2=INC (0401)h 1 *1 1mm/s (0402)h 2 "(-)(+) 0.01mm 2 (0404)h 1 1 1mm/s 2 (0405)h 1 1 1mm/s (0406)h 1 *1 1% (0407)h 1 *1 1% (0408)h 1 *1 1mm/s (0409)h 1 *1 1% (040A)h 1 2 "(-)(+) 0.01mm 040Ch 2 2 "(-)(+) 0.01mm 040Eh 2 *1 0.01mm *1 31