CRQ2

I = I + IA kgm (m to m : Mass of I to I kg) D Calculation example When d1 = 0.1m, d = 0.05m, D = 0.04m, a = 0.04m, b = 0.02m m = 1kg, m = 0.4kg, m = 0.5kg, m = 0.2kg, Gear tooth ratio = 2 Cylinder: I I = 0.2 x = 0.03 x 10 -3kg m I = 1 x = 1.25 x 10 -3 kgm 0.1 8 0.04+0.02 12 b IB = (0.13 + 0.1 + 0.03) x 10 -3= 0.26 x 10 -3 kgm 0.05 8 I = 0.4 x = 0.13 x 10 -3 kgm a IA = 2 x 0.26 x 10 -3 = 1.04

Industrial Filters

840 21 35 37 41 38 44 04 FGDTB 210 1200 23 46 50 56 50 63 06 FGDFB FGESA Note 2) 410 3000 45 90 120 140 100 160 10 FGELA Note 2) 410 3600 50 120 140 170 110 210 20 FGETA FGESB Note 2) 800 3300 70 140 150 160 120 170 10 FGELB Note 2) 800 4200 90 170 180 210 140 230 20 FGETB FGESC Note 2) 1100 3400 83 150 160 170 120 170 10 FGELC Note 2) 1200 4400 120 190 200 220 150 230 20 FGETC FGGSB 160

SZ3000

Purchasing order is available in units of 10 pieces.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

I = I + IA kgm (m to m : Mass of I to I kg) D Calculation example When d1 = 0.1m, d = 0.05m, D = 0.04m, a = 0.04m, b = 0.02m m = 1kg, m = 0.4kg, m = 0.5kg, m = 0.2kg, Gear tooth ratio = 2 Cylinder: I I = 0.2 x = 0.03 x 10 -3kg m I = 1 x = 1.25 x 10 -3 kgm 0.1 8 0.04+0.02 12 b IB = (0.13 + 0.1 + 0.03) x 10 -3= 0.26 x 10 -3 kgm 0.05 8 I = 0.4 x = 0.13 x 10 -3 kgm a IA = 2 x 0.26 x 10 -3 = 1.04

CG5-S

100 14 10 29 20 71 16 110 M12 x 1.75 10 26 8 M26 x 1.5 131 212 100 to 750 Flange brackets and plug bolts are installed before shipment from factory.

Rotary Gripper Series MRHQ

10 H 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L Gripping point L mm Gripping point L mm MRHQ16 MRHQ16 Internal gripping 60 60 50 50 Pressure 0.2MPa Pressure 0.2MPa 40 40 Overhang H mm Overhang H mm 0.3MPa 0.3MPa 0.3MPa 0.3MPa 30 30 0.4MPa 0.4MPa 0.4MPa 0.4MPa 0.5MPa 0.5MPa 0.5MPa 0.5MPa 20 20 0.6MPa 0.6MPa 10 10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping

VCC

C 6 13.5 4.5 0.5 Width across flats F 10 Tightening torque: Tighten within 10 1 Nm. G1/4 (mm) Part no.

100

0 90 Vacuum pressure reached 80 kPa Vacuum pressure in tank [kPa] 80 Vacuum pressure [kPa] 66 kPa 70 60 53 kPa 50 40 kPa 40 26 kPa 30 20 13 kPa 10 0 Suction flow rate [L/min (ANR)] 10 0 20 30 40 50 60 70 80 90 100 1 10 Time to reach vacuum [s] 1 0 2 3 4 5 6 7 8 9 10 11 12 Vacuum Break Flow Rate Characteristics*1 (Representative value) *1 Silencer exhaust specification The graph shows the

Antistatic One-touch Fittings Series KA

(mm) Weight (g) M A L D Part No. 3.2 4 33.5 34.5 36.5 18.5 KAR23-04 18.5 17.5 18 15.5 9.6 3.4 2.9 2.3 2.1 5 KAR04-06 KAR04-08 5.6 5.6 6 8 10.4 4 16 12.8 10 KAR04-10 39.5 37 39.5 3.6 3 KAR06-08 8 18.5 6 10 KAR06-10 17 12.8 KAR06-12 42 5.2 12 20 3.5 13.1 13.1 8 KAR08-10 41 4.5 18.0 18.0 10 20 18.5 15.2 KAR08-12 42 5.1 12 10 KAR10-12 42 33 32.8 32.8 12 20 21 17 139

25

(mm) Installation distance Detection range 10 45 25 100 Detection range 50 180 423 RoHS Ionizer IZS40/41/42 Series How to Order Type 40 Standard type IZS 40 IZS 42 1600 1600 10 10 B B Type 40 Type 41/42 Made to Order Bar type Type 41 42 Feedback sensor type Dual AC type IZS41 IZS42 Sensor Symbol Sensor Built-in sensor Feedback sensor Auto balance sensor [High accuracy type] Nil F G Emitter

KA

(mm) Fitting size d Soft nylon Polyurethane D L A M Part No. 3.2 9.6 18.5 17.5 18 4 33.5 34.5 36.5 18.5 15.5 KAR23-04 3.4 2.9 2.0 1.8 5 KAR04-06 KAR04-08 5.6 5.6 6 8 10.4 4 16 12.8 39.5 37 39.5 10 KAR04-10 3.3 2.5 KAR06-08 8 18.5 6 17 12.8 KAR06-12 42 4.7 12 20 10 KAR06-10 13.1 13.1 3.0 8 KAR08-10 41 4.0 18.0 18.0 10 20 18.5 15.2 KAR08-12 42 4.6 12 10 KAR10-12 44.5 33 32.8 32.8 12 20 21 18.5

Series H, DL, L, LL Self-align Fittings

A L1 L2 M 1 8 4 LL04-01 45 10 21.8 50.9 15 3.5 52.7 10 14 10 1 4 1 8 LL04-02 LL06-01 53 47 14 10 54.9 51.9 54.7 54.8 1 4 3 8 1 8 6 LL06-02 LL06-03 LL08-01 44 66 63 14 17 12 16 9 55.9 57.9 52.9 21.8 56.8 58.5 57 12 10 14 1 4 3 8 1 4 8 LL08-02 LL08-03 LL10-02 68 77 89 16 19 14 17 14 23.3 56.9 58.9 58.9 59 60.7 62.7 14 12 17 3 8 1 2 1 4 3 8 1 2 Reference dimensions after R(PT) thread installation

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

19 R 3/8 40 35 AS331FG-03-10 AS331FG-N03-07 32.6 52.4 45 21 25.6 43.7 38.7 10 18.5 1/4" 13.2 63 56 17 23 20.6 16.2 12.9 NPT 3/8 AS331FG-03-12 AS331FG-N03-09 45.4 40.4 40.2 35.2 34.4 54.2 48 22 28.2 44.9 39.7 12 20.9 5/16" 15.2 65 59 18.5 23 19 AS431FG-04-10 AS331FG-N03-11 32.6 57.1 52.4 21 32.6 49.4 43.7 25.8 10 18.5 3/8" 17.9 23 104 16.2 65 21 16.2 28.6 49.2 56.7 24 49.6 R 1/2 42.1 AS431FG

Model Selection 1

) 0.6 0.7 Critical pressure 0.65 [658] (158) 0.5 0.6 0.55 Sonic [656] (151) 0.5 0.4 0.45 [654] (143) 0.4 0.3 0.35 0.3 [650] (133) 0.2 0.25 0.2 [646] (120) 0.15 0.1 0.1 0.05 2 2 2 2 3 2 3 2 3 2 03 04 VX211 VX22 VX23 VX2 4 VX2 50 VX2 60-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated

AC Servo Motor Driver (Pulse input type/Positioning type)

PA06 1 100 35 100 (10) (7) (10) Electronic gear denominator *3.

3

L/min 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% 24 VDC 10% Temperature characteristics (25C reference) 3% F .S. (15 to 35C) 5% F .S. (0 to 50C) 2% F .S.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Refer to page 11-11-36 for detailed solid state switches with pre-wire connectors. 11-5-5 5 Series MSUA Specifications Model 2 MSUA3 MSUA7 MSUA20 MSUA1 Single vane Vane type Single vane Single vane Single vane Rotating angle 1 90 10 180 10 90 10 180 10 90 10 180 10 90 10 180 10 Air (Non-lube) Fluid 1.05 1.5 Proof pressure (MPa) Ambient and fluid temperature 5 to 60C 0.15 to 1.0 Operating

MGQ

OUT 113 23 34 45 57 68 79 90 102 113 12 6 IN 85 17 26 34 43 51 60 68 77 85 OUT 201 40 60 80 101 121 141 161 181 201 Symbol Specifications 16 8 IN 151 30 45 60 76 91 106 121 136 151 -XA Change of rod end shape OUT 314 63 94 126 157 188 220 251 283 314 Heat resistant cylinder (150C) -XB6 20 10 Low speed cylinder (10 to 50 mm/s) -XB9 IN 236 47 71 94 118 142 165 189 212 236 Intermediate stroke

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Load weight Allowable moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

80

Give adequate confirmation, and then determine a model, just because the compatibility list shows the general case. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump