AMP

8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 13 16 19 20 22 25 108 155 221 1/4, 3/8 3/8, 1/2 1/2, 3/4 3 Series AMP Model Selection Selection Caution Caution 1.

SRP

SUS316L 1 Body SUS316 2 Valve guide PPS 3 Spacer Bonnet PPS 4 Knob PBT 5 Electroless nickel plated Set nut ZDC 6 Valve spring SUS316 7 Main valve Ceramics 8 Valve seat PTFE 9 O-ring Fluoro rubber 10 Diaphragm Fluoro rubber 11 Gasket Fluoro rubber 12 Pressure regulator spring Steel wire 13 Pressure regulator screw assembly 14 Dimensions 30.5 Bracket 40 SMC P K U C S O H L 36 51 31 30 Panel

Exhaust Cleaner for Clean Rooms AMP Series

8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Pneumatic Positioner IP300/IP3100

'to 28" (10-85mm) (0.3" to 3.4" std.)5.9max.l Linearitv* Within 1 1% Within + 2% Hvsteresis Within 1% Repeatability* Within 0.5% Within 1% Sensitivity Within 0.1% Within 0.5% Within 0.2% Within 1% Within 0.2% Within 1% Air Consumption (lvlax.) less than 0.25 SCFM @ 20 osi 0,7 SCFM @ /u osl 0.25 scFM @ 20 osi 0.7 SCFM @ 70 psi 0.25 SCFIVI @ 20 Dsi 0.7 SCFM @ 70 DSi Supply Pressure Variation

Precision Clean Regulator Series SRP

SUS316L 1 Body SUS316 2 Valve guide PPS 3 Spacer Bonnet PPS 4 Knob PBT 5 Electroless nickel plated Set nut ZDC 6 Valve spring SUS316 7 Main valve Ceramics 8 Valve seat PTFE 9 O-ring Fluoro rubber 10 Diaphragm Fluoro rubber 11 Gasket Fluoro rubber 12 Pressure regulator spring Steel wire 13 Pressure regulator screw assembly 14 Dimensions 30.5 Bracket 40 SMC P K U C S O H L 36 51 31 30 Panel

MHx-OMY0001

(Nm) L(mm) MHM-16D M3x0.5 0.63 6 MHM-25D M4x0.7 1.5 8 MHM-32D M5x0.8 3 10 MHM-50D M6x1 5.2 12 (N) MHM-16D 100 MHM-25D 200 MHM-32D 300 MHM-50D 500 -7- 2-3. 40 2-4. () 5 5 P-01-11 -8- 2-5. 1.52 2-6. 1 ()ISO VG320 (SDS) -9- 2-7. 1) 1) 2) 3) 12mm -10- 2 C3 C1 C2: C3 D-M9V D-M9WV D-M9AV D-M9 D-M9W D-M9A D-P3DWA A B E G A B E G L A B E G L D F H MHM-16D 9.1 9.1 5.6 4.6 8.1 12.8 11

SY3000V-OMY0001

COM.(2) DC 24V 12V S,Z 1V R,U 47V 32V 3 3 A B , 10 No.SY3000V-OMY0001 SY series DIN a b DIN DIN DIN 25 2 610 3 1115 4 1620 5 2124 6 DIN DIN DIN A B a b 5 D PC 1 D (IP40) PC FREE LOCK LOCK FREE 11 No.SY3000V-OMY0001 SY series AB 4(A),2(B),1(P),3/5(E) 12 No.SY3000V-OMY0001 SY series 1) 0.1mm 2) 0.1mm 3) +0.15mm 0.2mm 1) TK-123 , 2) 13 No.SY3000V-OMY0001 SY series

10%36/13?61?

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, ZP PAD SIZE 10-25, VACUUM SERIES, ZP VACUUM PAD, UL, ZP PAD SIZE 10-25, 0.0022 lb

10%34/13?57?

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, ZP PAD SIZE 10-25, VACUUM SERIES, ZP VACUUM PAD, UL, ZP PAD SIZE 10-25, 0.0022 lb

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, ZP PAD SIZE 10-25, VACUUM SERIES, ZP VACUUM PAD, UM, ZP PAD SIZE 10-25, 0.22046 lb

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, ZP PAD SIZE 10-25, VACUUM SERIES, ZP VACUUM PAD, UL, ZP PAD SIZE 10-25, 0.05511 lb

Lateral vacuum inlet with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, ZP PAD SIZE 10-25, VACUUM SERIES, ZP VACUUM PAD, UM, ZP PAD SIZE 10-25, 0.03675 lb

Lateral vacuum inlet with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, ZP PAD SIZE 10-25, VACUUM SERIES, ZP VACUUM PAD, UM, ZP PAD SIZE 10-25, 0.11023 lb

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, ZP PAD SIZE 10-25, VACUUM SERIES, ZP VACUUM PAD, UL, ZP PAD SIZE 10-25

10%36/13?61?

Lateral vacuum inlet with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, ZP PAD SIZE 10-25, VACUUM SERIES, ZP VACUUM PAD, UM, ZP PAD SIZE 10-25, 0.02449 lb

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, ZP PAD SIZE 10-25, VACUUM SERIES, ZP VACUUM PAD, UM, ZP PAD SIZE 10-25, 0.14698 lb

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, ZP PAD SIZE 10-25, VACUUM SERIES, ZP VACUUM PAD, UM, ZP PAD SIZE 10-25, 1.17249 lb