Series: 25A-PFM7, Flow Rate Range: 50 [1 to 50 (25) L/min], Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: E [1 PNP Outputs + Analog (1 to 5 V)], Unit Specification: M (Fixed SI Unit), Operation Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon

Series: 25A-PF3W7, Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 04 (1/2), Output Specification/Temperature Sensor: D (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA; Temp.: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

Series: 25A-PF3W7, Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 04 (1/2), Output Specification/Temperature Sensor: D (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA; Temp.: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

Series: 25A-PF3W7, Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 03 (3/8), Output Specification/Temperature Sensor: F (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA; Temp.: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

Series: 25A-PF3W7, Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 03 (3/8), Output Specification/Temperature Sensor: B (Out 1: PNP; Out 2: Flow Rate: PNP; Temp.: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: Â

Series: 25A-PFMB7, Flow Rate Range: 501 (5 to 500 L/min), Thread Type: Rc, Port Size: 04 (1/2), Out Specification: B (Out 1: PNP, Out 2: PNP), Lead Wire: W (Lead Wire w/Connector 2 m, Rubber Cover for Connector, Silicone Rubber), Unit Specifications: M (SI Unit Only), Bracket: R (w/Bracket)

Series: 25A-PFM7, Flow Rate Range: 10 [0.2 to 10 (5) L/min], Port Size: 01 (Rc1/8), Piping Entry Direction: Straight, Output Specification: C [1 NPN Outputs + Analog (1 to 5 V)], Unit Specification: M (Fixed SI Unit), Operation Manual: N (None), Calibration Certificate: A (w/Calibration Certificate), Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber)

Series: 25A-PFMB7, Flow Rate Range: 501 (5 to 500 L/min), Thread Type: Rc, Port Size: 04 (1/2), Out Specification: D (Out 1: NPN, Out 2: Analog to 20 mA), Lead Wire: W (Lead Wire w/Connector 2 m, Rubber Cover for Connector, Silicone Rubber), Unit Specifications: M (SI Unit Only), Bracket: R (w/Bracket)

Series: 25A-PFM7, Flow Rate Range: 50 [1 to 50 (25) L/min], Port Size: N01 (NPT1/8), Piping Entry Direction: L (Bottom Side), Output Specification: C [1 NPN Outputs + Analog (1 to 5 V)], Unit Specification: M (Fixed SI Unit), Operation Manual: N (None), Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option: R (Bracket

IDX-OM-U022

B V IDFA100F V IDFA125F V IDFA150F B IDFA100F150F 1 4 1.3 IDX-OM-U022 1. 3.7 5.2 (IDFA100F, 125F) R OFF 5.2 L1 L2 L3 1,2 3,4 5,6 M5 9.5mm 3.5mm 2 1 3 2 4 5 6 M3 6.5mm 1.25mm 2 L1,L2,L3 PE: L2 L3 PE L1 M4 9.5mm 5.5mm 2 IDFA100F150F 1 5 1.3 IDX-OM-U022 1. 5.2 3.7 5.2 (IDFA150F) R OFF L1 L2 L3 M5 9.5mm 3.5mm 2 L1,L2,L3 PE: L2 L3 PE L1 1,2 3,4 5,6 1 3 2 4 5 6

PSE200

3.4 29.4 M5 x 0.8 0.5 27.2 2.5 Pressure port 13 12 7.2 5.4 3 12 4 5 5.5 With sensor cable 10.4 2.7 2 Multi-channel Controller Series PSE200 How to Order PSE20 0 M Option 2 Input/Output specifications Without connector Nil Sensor connector (4 pcs.)

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Orifice conductance In the case of a A (cm2) hole in an ultra-thin plate, the conductance C results from V the average velocity of the gas, R the gas constant, M the molecular weight and T the absolute temperature. From the formula C=VA/4=(RT/2M)0.5A, the conductance for 1cm2 is C=11.6A l/sec, at an air temperature of 20C.

Rated Pressure Range: 20F (-100 to 100 kPa), Output Specification: P (PNP Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (M5 Female Thread)

Rated Pressure Range: -100 to 100 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: SI Unit Only, Piping Specification: M5 Female Thread, Option 1: -, Option 2: -

Electro-Pneumatic Regulator IT1000/2000/4000

(Note) Gauge port RC(PT)1/8, Pre6sur g6uge, 14{1.0}, 28{2.0}, 72{5.1), 100{7.1}, 145{10.2) How to Order Model t x#l r*m ? Electrlcal connectlon ?

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

29.4 M5 27.2 0.5 2.5 Pressure port 13 12 7.2 5.4 3 12 4 5 5.5 With sensor cable 10.4 2.7 2 Multi-channel Controller Series PSE200 How to Order PSE20 0 M Option 2 Input/Output specifications Without connector Nil Sensor connector (4 pcs.)

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 Symbol Specifications -X12 Lubricant: Vaseline -X21 Grease-free (Seal: Fluorine-coated) + Throttle valve (Without check valve) -X214 Throttle valve (Without check valve) Note) M5 size: S (with seal) is not necessary. 611 A AS Series Construction AS1201-M5 AS2201/3201/4201 AS3201-02 o !1 w r u y e t !5 !2 !4 q !0 !3 i Component Parts No.

AS-FPQ/AS-FPG

M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.