Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Clamp Cylinder with Lock Series CLK1

switch 12 32 207 (46) 276 (62) 346 (78) 415 (93) IN (691) 1.11 BMA2-032 BMA2-050 BMA2-063 BMA2-040 D-H7A1, H7A2, H7B, H7C D-H7NW, H7PW, H7BW D-H7LF, H7NF 378 (85) 504 (113) 630 (142) 756 (170) OUT (1260) 2.02 Solid state switch 16 40 318 (71) 424 (95) 530 (119) 636 (143) IN (1060) 1.70 588 (132) 784 (176) 980 (220) 1180 (265) OUT (1960) 3.14 Reed switch D-B53, B54, B64, B59W 20 50 BA-32 BA-04

Vacuum Ejector with Solid State Timer, Series ZMA

Ejector stations Port & silencer position 1 station 01 Right side Left side Both sides R L S 10 stations (Max.) 10 Note) Left and right as viewed with the VAC port in front Thread type Common exhaust port size 1/2 3/4 ZZMA dedicated silencer (ZZM-SA) 04 06 S Rc NPTF G Nil T F When placing an order, include the single type ejector models to be manifolded together with the manifold part

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: None (0°), Thread: R, Port Size: U10/32 (U10-32UNF), Width Across Flats: 9mm, Tubing: 04 (ø4)

Voltage: 6 (12VDC), Electrical Entry: L (L Plug Connector), Lead Wire: Lead Wire, Orifice Size: 04 (0.4mm), Port Size: M5 (w/Sub-Plate M5x0.8), Body/Seal Material: A (Body C36, Seal FKM)

Voltage: 6 (12VDC), Electrical Entry: M (M Plug Connector), Lead Wire: Lead Wire, Orifice Size: 04 (0.4mm), Port Size: M5 (w/Sub-Plate M5x0.8), Body/Seal Material: A (Body C36, Seal FKM)

Voltage: 6 (12VDC), Electrical Entry: M (M Plug Connector), Lead Wire: O (w/o Lead Wire), Orifice Size: 04 (0.4mm), Port Size: M5 (w/Sub-Plate M5x0.8), Body/Seal Material: A (Body C36, Seal FKM)

Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector), Lead Wire: Lead Wire, Orifice Size: 04 (0.4mm), Port Size: M5 (w/Sub-Plate M5x0.8), Body/Seal Material: A (Body C36, Seal FKM)

Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector), Lead Wire: Lead Wire, Orifice Size: 04 (0.4mm), Port Size: M5 (w/Sub-Plate M5x0.8), Body/Seal Material: A (Body C36, Seal FKM)

Body Size: 2 (M5), Socket, Plug Type: P (Plug), Port Size: 04 (R, Rc(PT) 1/2 or Ø4 Tube), Connection: E (Bulkhead w/One-touch Fitting)

Body Size: 2 (M5), Socket, Plug Type: P (Plug), Port Size: 04 (R, Rc(PT) 1/2 or Ø4 Tube), Connection: H (Straight w/One-touch Fitting)

Body Size: 2 (M5), Socket, Plug Type: P (Plug), Port Size: 04 (R, Rc(PT) 1/2 or Ø4 Tube), Connection: L (Elbow w/One-touch Fitting)

Body Size: 2 (M5), Socket, Plug Type: S (Socket), Port Size: 04 (R, Rc(PT) 1/2 or Ø4 Tube), Connection: E (Bulkhead w/One-touch Fitting)

Body Size: 2 (M5), Socket, Plug Type: S (Socket), Port Size: 04 (R, Rc(PT) 1/2 or Ø4 Tube), Connection: H (Straight w/One-touch Fitting)

Body Size: 2 (M5), Socket, Plug Type: S (Socket), Port Size: 04 (R, Rc(PT) 1/2 or Ø4 Tube), Connection: L (Elbow w/One-touch Fitting)

Moisture Control Tube

Moisture control tube effective length Symbol 02 04 06 O.D. 2 mm 4 mm 6 mm Effective length 100 mm 200 mm Symbol 100 200 Dimensions Unit: mm Model Full length L Nominal effective length X L O.D. x I.D.

Series 10-, 21- AF-A Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size a Mounting Nil Without mounting option B Note 3) With bracket + Option r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Note 7) p: For thread type: M5 and NPT only Note 8) c: Combination available for options: E1, E2, E3, E4. 4 Series ARP20/30/40 Specifications ARP20(K) ARP30(K) ARP40(K) Model Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 Fluid Air Proof pressure 1.2 MPa Max. operating pressure 0.7 MPa Ex.) ARP30-02BG For 0.4 MPa setting 0.005 to 0.4 MPa Set pressure range Note 1) Ex.)

Speed Controller with One-touch Fittings Series AS In-line Type 1

M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D. Metric size Inch size P . 15-11-3 3.2 With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Use 1/8" tube. 23 04 06 08 10 12 01 03 05 07 09 11 13 4 6 8 10 12 Flow Direction Symbols on Body JIS Symbol Symbol 15-9-10

7

Usage 2 x 3 CK-P04 Knuckle pin Clevis pin 4 4 57 Note) Cotter pins and flat washers are attached to the pin as a standard. 430 CK1 Series Options Limit Switch Mounting Base/Dog Fitting 50 75 Material: Rolled steel 4 x M5 x 0.8 17.3 58.7 5 30.2 Part no.