NCQ8

Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2"), 250 (2-1/2") 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Symbol 02 2 stations 2 stations Note 1) Connector mounting position Double wiring specification Double wiring specification ... ... ... ... ... ... ... ... 10 02 11 02 11 stations 10 stations Symbol D Mounting position 2 stations 2 stations D side Specified layout Note 2) Specified layout (up to 22 solenoids possible) (up to 21 solenoids possible) 20 20 20 stations 20 stations PG: Flat cable

Series AP500

) Connections 1/2, 3/4 inch face seal, 1/2, 3/4 inch tube weld 3.

VSA4

JIS Symbol 2 position single 01 02 03 Sub-plate Assembly Part No.: VS4020-SMounting bolt and gasket are not included.

Ionizer Nozzle type IZN10 Series IZS

Static Neutralization Characteristics (Discharge Time from 1000 V to 100 V) (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 5 5 0.1 MPa 0.05 MPa 4 4 0.3 MPa 0.05 MPa Discharge time [s] Discharge time [s] 3 3 0.1 MPa 2 2 0.7 MPa 0.3 MPa 1 1 0.5 MPa 0.5 MPa 0.7 MPa 0 0 200 400 0 0 400 200 Distance [mm] Distance [mm] (3) Female threads for piping/IZN10

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Description AXT336-1A-1 01 02 01 02 01 02 02 03 02 03 02 03 02 03 Manifold block assembly AXT336-1A-2 AXT336-1A-3 AXT336-2A-1AXT336-2A-2AXT336-3A-1AXT336-3A-2q End plate (U side) assembly w End plate (D side) assembly e Terminal assembly Junction cover assembly Tie-rod r t y Replacement Parts No. u Description Material Carbon steel NBR NBR Part no.

SZ3000

PG: Flat cable (20 pins) PH: Flat cable (10 pins) Valve stations F: D-sub connector P: Flat cable connector (26 pins) Symbol 02 Note Note Symbol 02 Stations Stations 2 stations 2 stations Double wiring Note 1) ... ... ... ...

ZP

Material ZQ Series ZPY Without buffer ZPY U N 02 N4 A5 ZF ZP Mounting thread (Refer to Table (2) for applications.) Pad diameter (mm) 02 04 2 4 ZCU Vacuum entry port (Refer to Table (2) for applications.) 06 6 AMJ 08 8 10 10 Misc. 13 13 Table (2) Vacuum Entry/Mounting Thread Diameter 16 16 Thread dia.

Free Mount Cylinder

ZPT U N 02 B4 ZP U N 04 X11 Dia. (mm) Vacuum entry (Mounting thread diameter) Dia. (mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

5 Port Air Operated Valve SYA3000/5000/7000 Series

2(B) (A)4 Symbol Applicable series Nil Port size Without sub-plate 2 1 8 (EA)5 1 (P) 3(EB) 01 SYA3000 With sub-plate 1 4 3 position closed center With sub-plate 02 SYA5000 2(B) (A)4 1 4 3 With sub-plate 02 SYA7000 (EA)5 1 (P) 3(EB) 3 8 With sub-plate 03 3 position exhaust center 2(B) (A)4 4 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 5 (EA)5 1 (P) 3(EB) 1458 5 Port Air Operated

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Model/Series SYA540 (Base mounted) Valve model Type of actuation Port size Flow characteristics Note 1) Pilot port size (Nominal size) b 4/2 5/3 (A/B EA/EB) 1 4/2 (P A/B) Weight Note 2) (g) C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv 105 (42) 110 (47) Single Double Closed center 2 position 0.66 2.4 0.41 0.64 2.8 0.29 SYA540-02 M5 x 0.8 1 4 0.72 [0.37] 0.47 0.55 0.47 0.44 0.50 3.0 [1.2] 1.8

SYA3000/5000/7000

/Series SYA5000: Base Mounted 2 position single SYA5140-02 2 x 4.3 (For mounting) M5 x 0.8 (Pilot port) Manual override (Non-locking) Ventilation hole 1/4 (Piping port) 2 position double SYA5240-02 2 x 4.3 (For mounting) M5 x 0.8 (Pilot port) Manual override (Non-locking) Ventilation hole 1/4 (Piping port) 1738 5 Port Air Operated Valve Series SYA3000/5000/7000 Dimensions/Series SYA5000:

5 Port Solenoid Valve Series SV

-12 400 200 70% 50% 10% 0 800 MB 80 600 Stroke mm AS5000-02 AS420-02 400 200 0 AN300 -KM12 T1209 800 MB 100 600 Stroke mm AS5000-02 AS420-02 400 200 0 800 CS1 125 600 Stroke mm AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions

Direct Solenoid

NPTF Side 2 1 2 MBA40r r -02 %" NPTF Sid; 7." Bottom 1 4 MBA4210-02 %" NPTF Side (2); 7." Bottom(s] 7 1 6 DIRECTIONAL AIR VALVE DIMENSIONS/PARTS LIST SERIES NVS 4$14 NVS 4l14.{!0 "XX" D Erd phrs sl lincrd dot 5 & (2)del6) ECO101 xTo11.t5 3 sl46asst ddste olsp@l a de@ (rEi.+Ed seQ 5 1 0 solonokl *!. -e.ca!6uretd-a.c. 11t120 v.60 Hr 2301210V.@H.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

(mm) 04 06 08 10 12 Type 4 6 8 10 12 Port size Elbow Universal 2 3 01 02 03 04 R 1/8 R 1/4 R 3/8 R 1/2 Control type Meter-out Meter-in 0 1 With residual pressure release valve With One-touch fitting 15-9-36 2 Speed Controller with Residual Pressure Release Valve with One-touch Fitting, Elbow Type/Universal Type Needle Valve/Flow Characteristics AS2201FE-02, AS2211FE-02 AS2301FE-02, AS2311FE

LEC-OM02704CN

CC-Link 5 19 5 (4) CC-Link CC-Link (a) 1 (RYn1)(RYn2) DWELL 0 1 3 1 1 3 DWELL 0 1 1 1 5 20 5 (b) , 1 2541 255 0 DWELL 0 1 DWELL [ms](1) 1 0 1 2 0 1 3 0 0(2) 4 0 1 5 0 1 6 0 1 7 0 0(2) 1. 0 2. ,02 5 21 5 1 2 3 4 (1) DWELL [10STMm] [ms] [ms] [r/min] [ms] 1 5.00 3000 100 150 0 1 2 3.00 2000 0 3 3 10.00 1000 0 1 4 6.00 500 0 2(2) 1. 0 2. ,02 0 2 No.1 (100) No.1 (150

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,

Series AK1000

pressure Code Code Bonnet Standard Panel installation4) Bonnet port (NPT 1/8 inch) Connections (Inletq, Outletw) 02 06 10 15 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) No code P Code Connections NPT 1/4 inch NPT 3/8 inch NPT 1/2 inch 1/4 inch compression 3/8 inch compression 1/2 inch compression 4 6 8

Table of Contents

SOL.b SOL.a 3(EB) 5(EA) 1(P) Conventional tie-rod base type manifolds are also available. 34 pins connector allows up to 16 stations with double solenoids. 4(A) 2(B) N.C. valve N.O. valve SOL.b SOL.a 1 2 SV C00 3(EB) 5(EA) 1(P) External pilot specifications is not available for 4 position dual 3 port valves. 3(EB) port 5(EA) port 4(A) port B side coil 2(B) port 1(P) port 1-2-2 1-2-3 3 Series