Type: Pressure Switch, Fluid Type: Air, Sensor, Monitor Structure: [Integrated Type] Integrated shape, Analog Output Specification: Voltage, Pipe Port Type: Female Thread, Plumbing Thread Type: M, Plumbing Thread Nominal: M5x0.8, Fluid Characteristics: Noncorrosive / Incombustible, Pressure Resistance(MPa): 1.5, Operating Temperature Range(°C): -5～50, Operating Humidity Range(%): 35～85, Number

Type: Pressure Switch, Fluid Type: Air, Sensor, Monitor Structure: [Integrated Type] Integrated shape, Analog Output Specification: Voltage, Pipe Port Type: Female Thread, Plumbing Thread Type: M, Plumbing Thread Nominal: M5x0.8, Fluid Characteristics: Noncorrosive / Incombustible, Pressure Resistance(MPa): 1.5, Operating Temperature Range(°C): -5～50, Operating Humidity Range(%): 35～85, Number

Piping Specifications: M5 Female Thread/Side Piping Port, Output Specifications: NPN Open Collector 2 Outputs, Unit Specifications: Fixed SI Unit, kPa, Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: Panel Mount Adapter+Front Protective Cover, Calibration Certification: -

Piping Specifications: M5 Female Thread/Side Piping Port, Output Specifications: NPN Open Collector 2 Outputs, Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: Panel Mount Adapter+Front Protective Cover, Calibration Certification: -

Piping Specifications: M5 Female Thread/Side Piping Port, Output Specifications: NPN Open Collector 2 Outputs, Unit Specifications: Fixed SI Unit, kPa, Lead Wire: No Lead Wire, Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)], Calibration Certification: -

Piping Specifications: M5 Female Thread/Side Piping Port, Output Specifications: PNP Open Collector 1 Output+Analog Voltage, Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)], Calibration Certification: w/Certificate

Piping Specifications: M5 Female Thread/Side Piping Port, Output Specifications: PNP Open Collector 1 Output+Analog Voltage, Unit Specifications: Fixed SI Unit, kPa, Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)], Calibration Certification: -

Piping Specifications: M5 Female Thread/Side Piping Port, Output Specifications: NPN Open Collector 2 Outputs, Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: No Lead Wire, Adapter: Panel Mount Adapter+Front Protective Cover, Calibration Certification: -

Piping Specifications: M5 Female Thread/Side Piping Port, Output Specifications: PNP Open Collector 1 Output+Analog Voltage, Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: -, Calibration Certification: -

Piping Specifications: M5 Female Thread/Side Piping Port, Output Specifications: NPN Open Collector 1 Output+Analog Voltage, Unit Specifications: Fixed SI Unit, kPa, Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: None, Calibration Certification: w/Certificate

Piping Specifications: M5 Female Thread/Side Piping Port, Output Specifications: PNP Open Collector 1 Output+Analog Voltage, Unit Specifications: Unit Switching Function, Initial Value psi, Not Allowed for Use in Japan, Lead Wire: No Lead Wire, Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)], Calibration Certification: -

Piping Specifications: M5 Female Thread/Side Piping Port, Output Specifications: NPN Open Collector 1 Output+Analog Voltage, Unit Specifications: Unit Switching Function, Initial Value psi, Not Allowed for Use in Japan, Lead Wire: -, Adapter: -, Calibration Certification: -

Piping Specifications: M5 Female Thread/Side Piping Port, Output Specifications: NPN Open Collector 2 Outputs, Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)], Calibration Certification: w/Certificate

Piping Specifications: M5 Female Thread/Side Piping Port, Output Specifications: NPN Open Collector 2 Outputs, Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: Panel Mount Adapter+Front Protective Cover, Calibration Certification: w/Certificate

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

High Vacuum L Type Valve

Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for R R R PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro is a registered trademark of MATSUMURA OIL Co.,Ltd. R Kalrez is a registered trademark of E.

Series 12-REA Sine rodless cylinder

137 92 80 70 M5 x 0.8 x 8 M6 x 1.0 x8 M6 x 1.0 x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16

Solenoid Valve

-B 38 No.SQ1000V-OMQ0002-B 39 No.SQ1000V-OMQ0002-B 40 No.SQ1000V-OMQ0002-B 41 No.SQ1000V-OMQ0002-B 42 No.SQ1000V-OMQ0002-B 43 No.SQ1000V-OMQ0002-B 44 No.SQ1000V-OMQ0002-B 45 No.SQ1000V-OMQ0002-B 46 No.SQ1000V-OMQ0002-B 47 No.SQ1000V-OMQ0002-B 48 No.SQ1000V-OMQ0002-B 49 No.SQ1000V-OMQ0002-B 50 No.SQ1000V-OMQ0002-B 51 No.SQ1000V-OMQ0002-B 52 No.SQ1000V-OMQ0002-B 53 No.SQ1000V-OMQ0002-B 54 No.SQ1000V-OMQ0002

ARJ1020F

Spring 134313 o AWM Dimensions AWD K A Model ARJ1020F-M5-04 ARJ1020F-M5-06 21 22 B 10.4 12.8 C 4 6 D E F 10.6 (Width across flats: 10) G H J Caution 17.2 M5 X 0.8 6 3.5 15.5 50 ITV qRelease the lock to adjust the pressure. After the adjustment, engage the lock. Failure to observe this procedure could damage the handle or cause the secondary pressure to fluctuate.