Exhaust Cleaner for Clean Rooms AMP Series Description AMP320 AMP220 AMP420 AMP-EL220 AMP-EL320 AMP-EL420 Element assembly With O-ring 4 Note) The first and second elements are integrated, and cannot be replaced separately. 4 Exhaust Cleaner for Clean Rooms Series AMP Dimensions (mm) 1in = 25.4mm N Optional specifications O T: With element service indicator P R Q S SMC M D IN C Bracket (accessory) G L J I H K B A IN Bracket mounting
112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x 25 19 EM 57 39 9 89 59 Y 121 79 y 26 1A SUB 58 3A : 90 5A Z 122 7A z 27 1B ESC 59 3B ; 91 5B [ 123 7B
center/pressure center 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center (A) 4 (B) 2 4 (A) 5 (EA) 1 (P) 3 (EB) 2 (B) 5 (EA) 1 (P) 3 (EB) Parts list 2 position single with back pressure check valve Material Note Description No.
Standard BC6 BC6 NBR Stainless steel, Brass NBR Standard BC6 BC6 NBR Stainless steel, Brass NBR Body Bonnet O-ring Diaphragm assembly Valve spring Body Bonnet O-ring Diaphragm assembly Valve spring q w e q w e FKM Stainless steel, Brass FKM FKM Stainless steel, Brass FKM r r Stainless steel Stainless steel t t y Core assembly Stainless steel, Copper y Core assembly Stainless steel,
P tight screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4x20) with washer, 1 pc. P tight screw (4 x 14), 2 pcs. (3)Intermediate support bracket EX600-ZMB1: For direct mounting Enclosed parts: Round head screw (M4 x 5), 2 pcs.
P tithe screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4 x 20) with washer, 1 pc. P tithe screw (4 x 14), 2 pcs. (3) Intermediate support bracket EX600-ZMB1for direct mounting Enclosed parts: Round head screw (M4 x 5), 2 pcs.
NFB MC CNP1 NFB MC L1 L1 Three phase 200 to 230 VAC Single phase 200 to 230 VAC CNP3 CNP3 L2 L2 U U U Motor U Motor L3 L3 V V V V M M N () N W W W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should be connected to L1 and L2 terminals, with nothing connected
8 e w !7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note No.
5 w !3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material No. PBT ADC Material Note q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !
Component Parts w q Description Brass Brass t r Description Stainless steel Material Note No. Material Note No.
3 Sleeve 7 Iron Spacer 8 PBT r Return spring 9 Stainless steel w Board assembly 10 e Casing 11 PBT q Plug 12 NBR O-ring 13 NBR 3 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Construction/Base Mounted Type LVM13R LVM14R LVM16R !2 !0 !2 !0 !2 !0 !1 !1 !1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No.
HECR008-W HECR012-W 3000 3000 mentioned above. Switch off electrical supplies and ensure any high temperature parts have cooled to ambient temperature.
3 w Component Parts Qty. 2 1 1 2 1 1 3 1 1 1 1 1 2 1 2 2 1 1 Note 8 12 to 40 Qty. 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 1 Note Clear anodized Clear anodized Hard anodized Chromated Chromated 8: Quenched Description Material Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Material No. q w e r t No. Aluminum alloy !5 Bumper Urethane Aluminum alloy !
Steel) IP300 . 1P3100 DIMENS'ONS MODEL 1P300 (Lever Type) tu O O r o r n N ^ " n o r7a <6,69) (LEVER TYPE) MODEL 1P3100 (Rotary Type) O N / (2) t/4 t,tPt J o o iJ5 [8 so]]NVOLUTE SPL]NE 5HA:T 4 9 2 1 [ 1 2 s 0 0 ] r r81 lJ oool oo zzo fr ool r 1 3 T H P U H O I E S \ \ o o L O O N 0 945 I 24 001 2 7ss [7r oo] N O World Wide Ag{C Support...
Steel) IP300 . 1P3100 DIMENS'ONS MODEL 1P300 (Lever Type) tu O O r o r n N ^ " n o r7a <6,69) (LEVER TYPE) MODEL 1P3100 (Rotary Type) O N / (2) t/4 t,tPt J o o iJ5 [8 so]]NVOLUTE SPL]NE 5HA:T 4 9 2 1 [ 1 2 s 0 0 ] r r81 lJ oool oo zzo fr ool r 1 3 T H P U H O I E S \ \ o o L O O N 0 945 I 24 001 2 7ss [7r oo] N O World Wide Ag{C Support...
base weight W (g) n: Station W = 36n + 6 W = 43n + 64 Note 1) For more than 10 stations (more than 5 stations in case of SS5Y7), supply pressure to P port on both sides and exhaust from EA/EB port on both side.
3 e w t !3 A A !0 !2 !7 !6 o !5 !1 i !4 Section A-A u Parts list Material Note No. Description No.
Pressure characteristics 3 5%F.S. (0 to 0.8 MPa, 0.6 MPa standard) Power supply voltage 12 to 24 VDC 10% Ripple (p-p) 10% or less Electrical Current consumption 55 mA or less Protection Polarity protection Display accuracy 3%F.S. Analogue output accuracy 3%F.S.
EtherNet/IP PLC 5.1 (IP ) EtherNet/IP IP IP <> L:2.0 2.4[mm] W:0.5 0.6[mm] L W IP IP x100 x10 x1 1) 0 0 0 Remote Control 0 0 1 192.168.1.1 () 0 0 2 192.168.1.2 : : : : 2 5 4 192.168.1.254 2) 2 5 5 DHCP 2 5 6 : : : 9 9 9 1)DHCP IP IP Rockwell Automation BOOTP/DHCP Server IP Enable DHCP : DHCP IP IP Disable DHCP : DHCP IP Disable DHCPIP 2)DHCP IP IP DHCP IP IP (1)OFF