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Bore size S Stroke ML2B Bore size B Stroke N K M 9 N K M 1 RE A B O 1 H REC O H PP CX NN NN MM MM CY KK LL KK LL 2-PA J J MQQ M 2-PA (Port for operating cylinder) (Port for operating cylinder) F I F RHC (mm) (mm) MK(2) M 30.5 32 41.5 K 46 58 68 J 40 46.5 55 I 76.5 91 110 N 16 15 19 H 73 88 106 F 93.5 107.5 130.5 O 18.5 19.5 21.5 N 16 15 19 M 13 15 19 K 46 58 68 J 40 46.5 55 H 73 88 106 F

19 N 16 15 19 O 18.5 19.5 21.5 F 93.5 107.5 130.5 H 73 88 106 I 76.5 91 110 J 40 46.5 55 K 46 58 68 M 30.9 32.4 41.5 N 16 15 19 Applicable cylinder ML2B25 ML2B32 ML2B40 Applicable cylinder ML2B25 ML2B32 ML2B40 KK 15 16 17.5 LL 28 30.5 37.5 MM 16 21.5 24.5 NN 22 26 37.5 PA Rc 1/8 Rc 1/8 Rc 1/4 PP 56 62.5 78.3 O 69 84 102 KK 15 16 17.5 LL 28 30.5 37.5 MM 16 21.5 24.5 NN 22 26 37.5 PA Rc 1/

D-F9N, F9P, F9B 11.9 16 78.2 85 D-F9NV, F9PV, F9BV 10.9 15 79.2 86 D-F9NW, F9PW, F9BW 11.9 16 78.2 85 D-F9NWV, F9PWV, F9BWV Switch operating position (OFF) 10.9 15 79.2 86 D-F9BA 11.9 16 Note) This varies according to the operating environment, and cannot be guaranteed.

(C) 50 55 60 65 70 80 15 15 15 15 15 15 10 10 10 10 10 10 5 5 5 5 5 5 1.64 1.37 1.30 1.23 1.16 1.09 1.26 1.05 1.00 0.95 0.89 0.84 0.88 0.74 0.70 0.66 0.62 0.59 30 1.56 1.30 1.24 1.17 1.11 1.04 1.20 1.00 0.95 0.90 0.85 0.80 0.84 0.70 0.67 0.63 0.60 0.56 32 1.50 1.25 1.19 1.12 1.06 1.00 1.15 0.96 0.91 0.86 0.82 0.77 0.81 0.67 0.64 0.60 0.57 0.54 35 1.40 1.17 1.11 1.05 0.99 0.94 1.08 0.90 0.86

Refer to "Installation and Removal of Tubing" on page 15.)

Stroke 5 10 15 20 25 30 5 mm 10 mm 15 mm 20 mm 25 mm 30 mm Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Refer to "Installation and Removal of Tubing" on page 15.)

Refer to "Installation and Removal of Tubing" on page 15.)

7.4 9.0 7.5/7.7 8.8/9.3 12 14 14/14 15/16 Cv 0.86 0.88 0.80/0.86 1.0/1.0 2.0 2.4 1.9/2.1 2.3/2.4 3.1 3.8 3.5/3.5 3.8/4.0 C [dm3/(sbar)] 2.9 3.2 2.9/3.0 2.7/3.6 6.9 8.8 7.9/7.4 9.2/8.8 12 15 14/13 15/15 Cv 0.83 0.92 0.83/0.83 0.86/0.88 1.7 2.2 1.9/1.8 2.1/2.0 3.1 3.7 3.2/3.2 3.6/3.7 C [dm3/(sbar)] 3.5 4.4 3.5/3.5 4.1/3.9 7.5 9.3 7.4/7.3 9.2/9.1 13 16 14/14 15/15 Cv 0.93 1.1 0.89/0.89 1.0/

15 stations SYJ723-R port 1/8 Note) For more than 6 stations, supply air to both sides of P port and exhaust air from both sides of R port.

Data A Correction factor for temperature (Series IDUS) Inlet air temp. ( C) Outlet air press. dew point ( C) Ambient temp. ( C) 50 55 60 65 70 80 15 15 15 15 15 15 10 10 10 10 10 10 5 5 5 5 5 5 1.64 1.37 1.30 1.23 1.16 1.09 1.26 1.05 1.00 0.95 0.89 0.84 0.88 0.74 0.70 0.66 0.62 0.59 30 1.56 1.30 1.24 1.17 1.11 1.04 1.20 1.00 0.95 0.90 0.85 0.80 0.84 0.70 0.67 0.63 0.60 0.56 32 1.50 1.25 1.19

or less VQ1130 Metal seal 3 position 2 position Single VQ1 30 Side 1 to 16 stations Options: 6.3 (0.35) 15 or less 20 or less VQ1131 Rubber seal VQ1000 VV5Q13VQ1 31 424 57 Built-in silencer Direct exhaust 4.5 (0.25) 12 or less 15 or less VQ1230 Metal seal Double (latching) 6.3 (0.35) 15 or less 20 or less VQ1231 Rubber seal Valve specifications Electrical specifications VQ1000 4.5 (0.25)

15 15-1 / IDF Series 15-1 15-1 B: 2021/11 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Tel: +81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Specifications are subject to change without prior notice and any obligation the part of the manufacturer. 2021 SMC Corporation All Rights Reserved

Stroke 5 10 15 20 25 30 5 mm 10 mm 15 mm 20 mm 25 mm 30 mm Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

-3.5 Mounting hole 2-3.5 Mounting hole Piping port M5 x 0.8 depth 5 Piping port M5 x 0.8 depth 5 13 01: R 1/8 T1: NPTF 1/8 01: R 1/8 T1: NPTF 1/8 Dimensions/Base Mount Type: ZSE2-0R Grommet type: ZSE2-0R-15 Connector type: ZSE2-0R-15C Pressure setting trimmer Indicator light (Red) Pressure setting trimmer Indicator light (Red) H SET L H SET L 15 15 9 9 2-M2.5 x 41L Mounting thread 25 2-M2.5

First find the ratio of the discharge rate for fresh water when viscosity is 15 mPas from the graph to the left. It is determined to be 48%. 2. Next, the viscosity of 15 mPas and the discharge rate of 200 l/min in the required specification example are converted to the discharge rate for fresh water.

rat r t, s.hod@entrv-i"dti*,t .d..ddrloddrg .p'ab. dorail14, (1)i'ddq raR.sn[ly drai 21, 11' dsriir 15, (2)dd*rjl 13, 12) d.blr 17, e*d6u.rwrr'o l'L_t RocsdM.bdd.g Mod oFdde ortE dlajl 15 (varTr"o"&'f', E D e H J x 2.94 (75) 0.64 {16) 1.63 (41) 0.72 (18) (36) 8.56 {216) 3.59 (91) 3.63 (93) (36) 1.08 128) rndkd lghr .smdy(varsTyF'F &'L] MillimeteE in Pareniheses INTERFACE SPEED CONTROL f'SPOIOO

(Refer to pages 15-6-3 to 15-6-5 for details.) Note 3) M5 and 10-32UNF type ports are not available with seal. Note 4) Brass parts are all electroless nickel plated. The handle of the M5 type and the lock nut of the meter-in type are black zinc chromate plated.

Series MXP/MXPJ6 11226, 10, 12, 16 Air Slide Table How to Order Clean series 11 Vacuum suction type MXP 11 12 15 M9N MXP 22 12 15 M9N Copper, fluorine and silicone-free + Low particle generation Number of auto switches Nil S n 2 pcs. 1 pc. n pcs. 22 Vacuum suction type Bore size Stroke (mm) Auto switch 6 10 12 16 5, 10 10, 20 15, 25 20, 30 Nil Without auto switch Refer to the table below