Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: W (Grommet / Molded), Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: H (Stainless Steel Body, FKM Seal, Class B Coil)

Series: 350 [3 Port COM (Single Unit)], Voltage: 6 (12VDC), Electrical Entry: W (Grommet / Molded), Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: J (Stainless Steel Body, EPDM Seal, Class B Coil), Option: F (Foot Bracket)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: F (Faston terminal / Molded), Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: F (G)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: F (G), Material: H (Stainless Steel Body, FKM Seal, Class B Coil), Option: F (Foot Bracket)

Series: 250 [3 Port COM (Single Unit)], Voltage: 6 (12VDC), Electrical Entry: F (Faston terminal / Molded), Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: H (Stainless Steel Body, FKM Seal, Class B Coil)

The VC enclosure is IP65 equivalent.Single unit type, air operated poppet, Fluid: steam (184°C or less), Maximum operating pressure: 1.0MPa, Effective area: 0.16 to 2.1Cv, Coil rated voltage: 100, 110, 200, 220, 230VAC (50/60Hz), Port size: 1/8 (6A), 1/4 (8A), 3/8 (10A), 1/2 (15A), 3/4 (20A), SOLENOID COIL FOR VCS21, VALVE, STEAM, 0.00000 lb

The VC enclosure is IP65 equivalent.Single unit type, air operated poppet, Fluid: steam (184°C or less), Maximum operating pressure: 1.0MPa, Effective area: 0.16 to 2.1Cv, Coil rated voltage: 100, 110, 200, 220, 230VAC (50/60Hz), Port size: 1/8 (6A), 1/4 (8A), 3/8 (10A), 1/2 (15A), 3/4 (20A), VALVE, VALVE, STEAM, 0.00000 lb

Series: 350 [3 Port COM (Single Unit)], Voltage: 6 (12VDC), Electrical Entry: F (Faston terminal / Molded), Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: A (Brass Body, FKM Seal, Class B Coil), Option: F (Foot Bracket)

2

3 !4 o !0 !1 !2 e !3 !4 !5 !2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 Flow Control Equipment AS AS-FS w Meter-in type Meter-out type Component Parts No.

Table of Contents

5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

ZP

Q ZP T 10 06 31.8 10 6 4.5 08 35.9 14 8 6 20 30 50 40 50 A14 06 19.9 12 6 3 08 24.9 14 8 Width across flats P N N Dimensions Per Vacuum Inlet: Barb Fitting Model N P Fitting part min. hole size Vacuum inlet direction q Pad dia.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Types Q Q Q Q Q Q Q Q 21 Q Series SYJ3000 Construction Drawings Construction A B A B 2 position single 2 position double PR R PR R 3 5 1 4 2 4 2 5 1 A B A B 7 7 R1 P R2 R1 P R2 6 3 position closed center/exhaust center/pressure center 3 position closed center A B 4 2 5 1 PR2 R A 3 position exhaust center A B B PR R 3 position pressure center A B 7 R1 P R2 PR R (This construction

Table of Contents

6 q !4 @1 w @4 !0 y !3 !5 @3 !0 !

Modular Design with Uniform Body Style

Y 34 03 D Cross spacer q w e r q Body size [Applicable AC size] Symbol Description 24 [AC20] 34 [AC30] 44 [AC40] 54 [AC40-06] 64 [AC50, AC60] w Pipe thread type Nil Rc V V V V V N NPT V V V V V Body type: Standard (Ym-mm-D) Body type: Front and back port selectable (Ym-mm-1-D) F G V V V V V + 01 1/8 V V 02 1/4 V V V v 03 3/8 V V V v 04 1/2 V V v 06 3/4 V v + OUT q (Port size) OUT q

Table of Contents

3 e $2 q $0 #9 !8 u i o y !0 @8 @3 !1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !7 #2 @6 @7 Component Parts Note No.

Modular F.R.L. Units

Applicable Model Applicable Model Model AF20-A AF30-A AF40-A AF40-06-A AF50-A AF60-A Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Model AF30-A AF40-A AF40-06-A AF50-A AF60-A Port size 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 30 AF A X425 2 03 B 30 AF A 2 03 B X430 q w t y e r For high pressure q w y e r t Semi-standard: Select one each for a to c.

Table of Contents

5 q u o Material Note Component Parts !4 r No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !

Modular F.R.L. Unit

Note 3) For thread types M5 and NPT. Nil A B C D q w e q w q w w q e q w The number inside indicates the combination order counted from the inlet side.

New

Step 1 Symbol Item Selection item Size q 3 Select from Flow rate Pressure. vBody material vPort size vOrifice diameter Size 3 w VX2 3 A q A 0 Body material Aluminum Port size 1/8 w A 2 Orifice diameter Step 2 Select electrical specification.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Q P R O D U C T S Q Q Q Q Q Q 3 Q Q 3 Port 100/200/300 Series VQZ Base Mounted & Body Ported High speed and Long life. Response time Life VQZ100 10ms VQZ200 12ms 200 million cycles VQZ300 15ms Dispersion accuracy 2ms * Life: Metal seal type * Response time: Metal seal, single solenoid with light and surge voltage supressor.