Vacuum Pad Qmax 55.5 C = Qmax: Max. suction flow rate L/min (ANR) C: Conductance [dm3/(sbar)] Front matter 14 Model Selection 7 Vacuum Equipment Selection Example #Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.
Qmax 55.5 C = Qmax: Max. suction flow rate L/min (ANR) C: Conductance [dm3/(sbar)] Front matter 14 Model Selection 7 Vacuum Equipment Selection Example #Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.
Qmax 55.5 C = Qmax: Max. suction flow rate L/min (ANR) C: Conductance [dm3/(sbar)] Front matter 14 Model Selection 7 Vacuum Equipment Selection Example #Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.
Note 16-9-5 16-10-1 Page 16-9-1 16-9-3 16-1-6 16-1-7 5 Pressure Switch Application Example Pressure Switch Application Example When selecting a model, please thoroughly review and confirm beforehand, that the model will meet the necessary specification.
The PE line of the power supply cable Indicated content : (1%) 300 Ratio #1 Temperature detected by internal ERR11 WRN temp. sensor PV < 31.6 C #1 SV < 30.0 C MODE Normal Sets the temp. range for judgment of overload (accompanying abnormal output alarm ERR15). #2 Temperature detected by external 0.1 to 9.9 7 Overload Judging is available for grounding.
ERR01 System error 1 Stop The key functions are as follows: Shows output ratio of thermo module by 1%. The prefix symbol stands for cooling and no prefix stands for heating. -100 to 100% 9 Output Ratio (1%) [SEL]: Used to show the item that needs to be Move the product to an environment with little noise, turn ON the power supply. If there is no alarm, it was caused by noise.
ZR AR BR . Jul U QU RU SU . ZU AU BU . Month Q R S . Z A B . Oct X QX RX SX . ZX AX BX . T With stand for vertical installation 8 1 15 9 D-sub 15 pin (Socket type) Fixed screw: M2.6 Description No.
OUT3 OUT4 1 or 2 1: 1 bit, 2: 2 bit Temp.control Turn ON Main power switch again of the piping (e.g. no tight bends or crushed pipes). Normal pump and fan : Temperature control Control Mode status RYD 4) Confirm there is no abnormal sound, smell or heating from the product. 2nd digit : Parity check stop and pump/fan operation enabled Setting DI2 Sets control mode.
150'25 consult laclory when the desrd stroke s grealer lhan lhe slandard strcke l MPa='l0.20kg cm'z Specif rcations Operation Double acting 1.sN4Pa(1 5.3kgf/cm'; 217PSl) Prool pressure 1.oMPa(1 0.2kgtcm'; 145PSl) o.rzuP"f l zr,(st/"|.t"J tPSr) Max. operating pressure : 012, d,16 Min. operating pressure s20-0100 0.1 lvlPa(1 .okgflcm'i l4PSl) -10-+60'C (14-140'F) Amuent and Iluid 50-500mm/s
4 " 3 8 " 1 2 " 3 16 " 1 4 " 3 8 " 1 2 0604 0805 0806 1065 1075 A07 A11 A13 B05 B07 B11 B13 Metric size G Green C Note) Clear Inch size Note) Polyurethane only. 13-10-6
1 3 x 1 t x 1 Stainless steel i*lnctuding armature ass y How To Order 40inch (1000mm) When ordering the valve ancl long connec'tor ags'y include bolh the valve and connector ass'y product numbers.
Release flow rate adjusting needle Ejector exhaust PV/V port size 05 07 0.5 mm 0.7 mm With silencer Port exhaust Rc Common exhaust (Manifold only) 1 Nil Nil Y M5 x 0.8 L Without lock nut 1 8 2 (1) 10 1.0 mm M6 x 1 (Option) With lock nut 3 (2) Vacuum switch electrical entry Note 1) When port exhaust is applied to the manifold, pilot exhaust is done by common exhaust.
1 3 x 1 t x 1 Stainless steel i*lnctuding armature ass y How To Order 40inch (1000mm) When ordering the valve ancl long connec'tor ags'y include bolh the valve and connector ass'y product numbers.
Compact Pressure Switch Series ZSE2/ISE2 How to Order Piping specifications 01 T1 Operating pressure range/ Setting pressure range Single mounting R 1/8 Note 1) Single mounting NPTF 1/8 Note 1) 0 to 1 MPa 0 to 100 kPa Nil L Note 1) M5 x 0.8 (female) threaded.
Recommended flow rate Note) (l/min (ANR)) Mass (g) Internal capacity (cm3) 1.7 ZA Model IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX 1.7 4.3 IN/OUT straight piping Metric size ZR Easy installation
AMJ 30 0003 2R ZR ZM Body size Pressure gauge position 30 3/8 None Bracket Nil ZH 40 1/2 B Option 50 3/4 ZU Drain cock Nil Metal bowl 2 ZL Thread type Port size Nylon bowl 6 Drain guide (Rc 1/4) 02 1/4 Nil Rc J ZY 03 3/8 Flow: Right Left F G R 04 1/2 N If ordering two options or more, indicate symbols numerically and alphabetically.
M6 x 1 M5 x 0.8 SNJ-006A 9.2 8 3 SNJ-010A 3 12 13.9 SNJ-015A 16.2 14 3 M10 x 1 M14 x 1 SN-015A 21.9 19 5 Pad diameter: 10 to 50 ZP10B to 50B Model Size B06 A 6 ZP06B B 7 C 2.5 D 7 E G 3.3 H 9.1 Y 4 F 13 B08 8 ZP08B 9 2.5 7 13 4.7 10.1 4 B10 10 ZP10B 12 4 13 11.7 16 5.5 13.8 5.5 B13 13 ZP13B 15 4 13 14.2 18.5 8.7 19 7.5 B16 16 ZP16B 18 4 13 15.7 20 9.9 21 8.5 B20 20 ZP20B 22 4 15 19 23.5