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Rated pressure range A B ZSE3 0 to -101 kPa 0 -101 kPa ISE3L 0 to 98 kPa 0 98 kPa ISE3 0 to 0.98 MPa 0 0.98 MPa -25No.PS-OMO0002-A Dimensions Grommet type Z/ISE3-01/T1-26No.PS-OMO0002-A Connector type Z/ISE3-01/T1-C -27No.PS-OMO0002-A Single-installation type Grommet type ZSE3-0X-28No.PS-OMO0002-A ZSE3-0X--D -29No.PS-OMO0002-A Connector type ZSE3-0X-C -30No.PS-OMO0002-A ZSE3-0X-C-D -31No.PS-OMO0002

(Specifications: -101 to 101 kPa) Do not exceed the specified maximum allowable load. Otherwise it can cause damage or shorten the lifetime of the Pressure switch. Input data to the Pressure switch is not erased after the power is off. (Writing time: 100,000 times) Reserve a space for maintenance.

g 101 g : The form of the G thread (including the major and minor diameter and pitch of the internal thread) is based on JIS B0202 (ISO228-1).

D Content of seal kit are changed. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

The INPoutput signal is turned on from 100[mm] 1[mm]=99 [mm] Area 2[mm] j Area 1[mm] j 100 b Speed[mm/s] 0 ON AREA Output signal OFF (INPOutput condition) INP Output signal ON In pos[mm] k OFF 101 99 0 10 20 30 40 50 60 70 80 90 100 Stroke [mm] -19- Example of step data input (2) < Positioning operation Ralative > a b c d e f g h i j k No.

The INPoutput signal is turned on from 100[mm] 1[mm]=99 [mm] Area 2[mm] j Area 1[mm] j 100 b Speed[mm/s] 0 ON AREA Output signal OFF (INPOutput condition) INP Output signal ON In posn[mm] k OFF 101 99 0 10 20 30 40 50 60 70 80 90 100 Stroke [mm] -23- Example of step data input (2) < Positioning operation Relative > a b c d e f g h i j k No.

Operating pressure (MPa) Operating direction Piston area (mm) Rod size (mm) Bore size (mm) 0.15 0.7 0.6 0.5 0.4 0.3 0.2 0.1 8.4 39.2 33.6 28.0 22.4 16.8 11.2 56 OUT CXS6 4 4.6 21.7 18.6 15.5 12.4 9.3 6.2 31 IN 110 94.2 78.5 62.8 47.1 31.4 15.7 157 OUT CXS10 6 70.0 60.0 50.0 40.0 30.0 20.0 10.0 100 IN 247 212 177 141 106 70.6 35.3 353 OUT CXS15 8 176 151 126 101 75.6 50.4 25.2 252 IN 440

47 32 49 54 M5 X 0.8 8 10.4 16 10.4 4 13.4 1 8 1 8 1 4 1 8 1 4 1 4 3 8 3 8 1 2 15.5 29.5 25.5 KQ2ZF04-01S 14 Ml 15.5 22 17 22 22 29.5 25.5 35 27 35 35 39 39 42 KQ2ZF06-01S 13.4 22 14 6 12.8 17 12.8 41 KQ2ZF06-02S 20.6 25.5 19 31 41 41 17 KQ2ZF08-01S 17.6 25.5 Hl 8 15.2 15.2 18.5 19 19 22 22 24 KQ2ZF08-02S 20.6 27 KQ2ZF10-02S 20.6 29 Dl 10 18.5 18.5 21 24.5 45.5 KQ2ZF10-03S 74 77 101

Stud Chuck SUS304 stainless steel Guide, Stopper, Drive bushing SUS304 stainless steel Collet, Release button Polypropylene resin Seal, O-ring, Bumper EPDM Particulate Generation Grade Classifications Relationship of Operating Temperature and Maximum Operating Pressure 1.2 104 Average particle concentration Particles/ft3 Maximum operating pressure MPa Grade 4 1.0 103 0.8 102 Grade 3 0.6 101

Auto switch capable (water resistant type) Note) RBL (coolant resistant) type shock absorbers are used. 20 to 50 Front mounting flange Dimensions 32 to 50 Front mounting flange R Y + Stroke Front mounting flange 63 Y + Stroke Q X 63 to 100 Front mounting flange R Y + Stroke (mm) Bore size (mm) 63 50 40 32 25 20 R 16 16 15 14 14 14 Y 119 116 101 90 88 88 Dimensions other than the above are

Data Symbol Specifications Anti-corrosive specifications for guide unit (N) -X42 Operating pressure (MPa) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) 0.7 0.6 0.5 0.4 0.3 0.2 71 61 51 40 30 20 101 R 4 8 53 45 38 30 23 15 75 L 158 136 113 90 68 45 226 R 6 12 119 102 85 68 51 34 170 L 281 241 201 161 121 80 402 R 8 16 211 181 151 121 91 60 302 L 440 377 314 251 188 126

Stud Chuck SUS304 stainless steel Guide, Stopper, Drive bushing SUS304 stainless steel Collet, Release button Polypropylene resin Seal, O-ring, Bumper EPDM Particulate Generation Grade Classifications Relationship of Operating Temperature and Maximum Operating Pressure 1.2 104 Average particle concentration Particles/ft3 Maximum operating pressure MPa Grade 4 1.0 103 0.8 102 Grade 3 0.6 101

119 97 111 98 153 96 109 Body ported Base mounted 0.32 0.53 1.6 2.2 0.33 0.4 2 position C6 (One-touch 0.33 0.49 1.4 1.1 1.8 [0.78] 1.9 2.5 [1.3] 1.6 0.27 0.37 0.35 0.27 1/8 SYJ720--C6 SZ fitting for 6) 0.32[0.54] 0.30 0.61 [0.38] 0.39 129 121 163 119 3 position 0.36 [0.40] 0.45 [0.22] SY 101 119 97 111 98 153 96 109 2.0 2.3 0.34 0.61 0.39 0.52 2 position C8 (One-touch SYJ 1.7 1.2 1.9 [0.86

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2011 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing PQ printing PQ 12450SZ Printed in Japan. D-DN

D side 1 2 3 PWR ERR PWR ERR PWR ERR 1 3 DIN rail 1 3 ITV0030-3MS ITV0030-3ML 14-8-3 4 Series ITV0 Specifications ITV001 ITV003 ITV005 ITV009 Model Min. supply pressure Set pressure +0.1 MPa Set pressure 1 kPa Max. supply pressure 1.0 MPa 0.2 MPa 101 kPa Regulating pressure range 0.001 to 0.1 MPa 0.001 to 0.9 MPa 0.001 to 0.5 MPa 1 to 100 kPa 2 /min(ANR) (Supply pressure: 101 kPa) 3.5 /min

G PPA AL 14-12-3 4 Compact Manometer Series PPA PPA100/101/102 How to Order Unit specifications PPA10 0 M Pressure specifications Nil M Option/Case holder With the unit switching function(1) 0.1 to 1 MPa (For high pressure) 101 to 10 kPa (For vacuum) 10 to 100 kPa (For low pressure) 0 1 2 Fixed in SI unit (2) None With PPA-B Nil B Note 1) With unit switching function is not permitted to sell

From the above 2. position, turn the adjustment needle 1/4 to 1 turn clockwise. 1 kPa = 7.5 mmHg 1 kPa = 7.5 mmHg 101 101 Supply pressure (kPa) Supply pressure (kPa) Applicable adsorption nozzle range Applicable adsorption nozzle range 50 50 3. 2. 1. 20 20 ZSE ISE Right 0.2 0.3 0.4 0.5 0.6 0.7 0.3 0.5 0.7 0.9 1.1 1/4 to 1 turn Right Left PSE Adsorption nozzle diameter (mm) Adsorption nozzle

Manifold Direct operated Air operated VXA31/32 17-3-101 C.O. Single unit 3 port 17-3-105 VVXA31/32 C.O. Manifold Pilot operated Diaphragm opeation with zero differential pressure 17-3-61 VXZ22/23 N.C./N.O. Single unit Pilot operated (High pressure control) 17-3-69 VXH22 N.C.

103.5 S 51 54 57 57 Q 98 101 104 104 R 36 44 53 55.5 R 40 48 56 58.5 Q 46 50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5 Q 27 30 32 32 VCA21 VCA31 41 50 60 68 18 24 30 35 64 76 86 91 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 17-2-13 8 Series VCA How to Order Manifold (VCA20) How to Order Manifold Assembly VV2C