MQQ CAT.ES20-156 A Compact Low Friction Cylinder (Metal Seal Type) Series MQQ 10, 16, 20, 25, 28 Lateral Load Resisting Low Friction Cylinder (Metal Seal Type) Series MQM 6, 10, 16, 20, 25 Series MQM Series MQQ eds spe ow ds d l spee an rm rict w f ion c lo igh ifo act ylind un er f mp or o h Co w t Q lo MQ or isti ng lo res ad w frictio r f l lo de lin n cy era Lat M MQ Low Friction Cylinder
If the leakage volume is 30 /min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 /min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.
7 @6 r u #1 t @4 @5 #2 @0 y i !9 !0 q !1 w !
Description AFF SGP-E: SS400 Filter case w Cover q Element SS400 AM Replacement Parts Misc. Model AMF800 AMF801 AMF900 AMF901 AMF1000 No. Description Material NBR 63271 63271 63271 3 pcs. 63271 3 pcs. 63271 5 pcs. Element r Packing e 63148 63148 63148 3 pcs. 63148 3 pcs. 63148 5 pcs. Drain NBR O.D. 112 x I.D.90 x T3 1 pc. O.D.112 x I.D.90 O.D.112 x I.D.90 x T3 3 pcs.
When knob q is adjusted downwards, adjusting spring w is compressed. The inlet valve r is opened allowing air flow to the outlet. Air outlet pressure balances against diaphragm e and adjusting spring w. When the outlet pressure is higher than the set pressure, the inlet valve r is closed and exhaust of the excess outlet pressure takes place through the adjusting spring cover bleed.
Through-hole/CQ2YB, CDQ2YB Both ends tapped/CQ2YA, CDQ2YA Both ends tapped (mm) Bore size (mm) 63 O1 R O1 thread R R 18 M10 x 1.5 80 22 M12 x 1.75 100 22 M12 x 1.75 H thread effective depth C 4-N through 8-O counter bore U Q F 2-P (Port size) (Rc, NPT, G) I 22 M E D Z 11 Lead wire min. bending radius 10 Auto switch D-A7, A8 K M E S J L B + Stroke A + Stroke Rod end male thread H1 Rod end
O F , < F , Q r '=r, @ r,> r, Pressure Raies (P1 =Primary Pressure) (P2=Secondary Pressure) NVEP3l2O-2 NVEP314O-'r -04 Primary Pressure P1 = 45 PSIG (3 KSI/cmr) E t2 I { t r S F g t o o E 28 (r. a ( 1 ) E a E a NVEHtl4O-1 E t ^ *t 6 S (0.15) (0.s) t . 5 ( 0 1 ) F 5 (0.05) NVEE NVEP CONSTRUCTION DETAIL Flow Raie'lvpo: VEF212O (2 Pdts) NVEF:112O (3 Porb) Pressuro llrp: NVEP3I2O (3 Porb) l
O F , < F , Q r '=r, @ r,> r, Pressure Raies (P1 =Primary Pressure) (P2=Secondary Pressure) NVEP3l2O-2 NVEP314O-'r -04 Primary Pressure P1 = 45 PSIG (3 KSI/cmr) E t2 I { t r S F g t o o E 28 (r. a ( 1 ) E a E a NVEHtl4O-1 E t ^ *t 6 S (0.15) (0.s) t . 5 ( 0 1 ) F 5 (0.05) NVEE NVEP CONSTRUCTION DETAIL Flow Raie'lvpo: VEF212O (2 Pdts) NVEF:112O (3 Porb) Pressuro llrp: NVEP3I2O (3 Porb) l l
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
Calculation: (Example 1) MUB40-15S(T) Basic weight 0.62 kg RQ (Example 2) MUC50-5S(T) Basic weight 1.06 Additional weight (Mounting bracket) 0.40 1.06 + 0.40 = 1.46 kg MU Construction DSpring return -X B 20Data B section MU25 Spring extend B A A section MU25 Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !
0 Setting knob ARM q Diaphragm (A) q w !1 q !1 ARP Steel ball w !1 Bleed !2 Nozzle IR-A @2 w !2 Bleed Diaphragm (B) r !3 @4 Bleed Exhaust u IR IR !7 @3 !2 !5 !4 Diaphragm (C) e OUT (2) SUP (1) OUT (2) OUT (2) SUP (1) IRV SUP (1) @3 !8 Exhaust valve !6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !
Calculation: (Example 1) MUB40-15S(T) Basic weight 0.62 kg RQ (Example 2) MUC50-5S(T) Basic weight 1.06 Additional weight (Mounting bracket) 0.40 1.06 + 0.40 = 1.46 kg MU Construction DSpring return -X B 20Data B section MU25 Spring extend B A A section MU25 Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !
0 @1 r t e u y @0 q @2 @4 @8 @9 !3 !8 !7 #0 @6 o @3 w @7 !5 @5 !4 REBR15 Parts list Parts list No. Description Material Note No.
Actuating force F1 is applied to the top surface of pressure regulation piston r by the pilot pressure (pilot valve assembly q: VY1D B 00-00), and actuating force F2 is applied to the bottom surface of the piston by the port A pressure that pases through the feedback passage. Thus, the port A pressure that corresponds to the pilot pressure is established.
Millirrfeter size 1{1' Q I1'SiZeJ' , 0.6' r'~ '" 0Ur 0~ '2. , ~1/4' a!;'16" 03/4" 'ol/2~ AsP330F'!U R(PT)1/8 M5 X 0.8 J\SP. 4;JOF~02 R(PT)I /4 Rc(PD1 /8 IIS'P530F:03 R(PT)318 Rc(PT)lIS 'ASi"!)30l"'lJ4 " R(PT)1!2 Rc(PT)1I4 ASP;l3OF:,FO~ RIPT)114 G(PF)1I8 I\Sps:ioFf;03' R(PT)318 G(PF)118 ),I'SPsJOF;;04: R(PT)1 /2 G{PF)1/4 A~P33!1F" 'l Il1 NPT1 /8 10-32UNF ,~Sp430FNO,?
"Materj, al' r' f{einag
9 @0 @1 Note Material PBT PBT PBT Brass Brass Brass Brass Brass Brass(3) No. q w e r t y u i o !