HRX-OM-M090 Rated Rated Sensitivity voltage x size voltage current of leak [V] [A] current [mA] HRS012--10 HRS018--10 1-phase 100V AC(50Hz) 100 200 15 15 or 30 HRS01--10-T 1-phase 3 cores x Sharing 100V to 115V 14AWG (High pump head AC(60Hz) [Optional]) (3 cores x 2.0mm2) HRS012--20 HRS018--20 HRS024--20 1-phase 10 30 (including ground) 200, 200-230V AC 230 HRS0--20-T (50/60Hz) 15 30 (High pump head
0.3 1.0 0.3 0.8 0.3 Actuation pressure difference MPaNote 1) 0.5 0.25 0.4 0.2 0.2 0.15 Reverse pressure potential MPa Note 2) 1 x 10 -6 Port A pressure Pa 1.3 x 10 -9 {1 x 10 -8} at ordinary temperatures, excluding gas permeation Internal External 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s {Torr l/s} VCR 1.3 x 10 -11 {1 x 10 -10} Fitting
1 w !2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.
2 5 (Ch0&1 in) Monitor under range 0: disable, 1: enable 6..7 Data format 0: offset binary, 1: signed magnitude, 2: 2s complement Channel parameter Channel 0 to 1 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 0..2 (Ch0 in) Analogue input range 3 Reserved 3 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA 3: 0..10 V, 4: 0..5 V, 5: 1..5 V,
Rc 1/8 1(P) port L plug connector (L): VQZ2220 1(R)-L-C4/C6/M5 DIN terminal (Y): VQZ2220 1(R)-Y-C4/C6/M5 Indicator light 300 136.5 68 (Lead wire length) Pg.7 31 <36> 142.5 MAX.10 71.5 Applicable cable O.D.
(Including r and t) Manifold Block Assembly SQ Replacement Parts VFS VVQ5000 1 No. Part no. Description Material Q'ty VFR VVQ5000-80A-1 Gasket HNBR 10 Type VVQ5000-80A-2 Gasket HNBR 10 Option VQ7 A For 1 station Note) Spare parts consist of sets containing 10 pcs. each.
12 14 1/8 1/8 1/8 0 0.039 1/4 With Rod Boot S 62 62 64 88 TD 8 9 9 10 TT 10 10 10 11 TX 32 40 40 53 TY 32 40 40 53 TZ 52 60 60 77 Z 36 40 40 44.5 ZZ 116 120 122 154 h Symbol Bore size (mm) 20 25 32 40 e f B3 Stroke Bore size (mm) 1 to 50 68 72 72 77 51 to 100 81 85 85 90 101 to 150 93 97 97 102 151 to 200 106 110 110 115 201 to 300 131 135 135 140 301 to 400 156 160 160 165 401 to 500 181
Digital Digital Digital 0.01 to 1 0.02 to 2 0.05 to 5 0.1 to 10 0.3 to 25 0.5 to 50 1 to 100 2 to 200 Power supply voltage Rated flow range [L/min] 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 2 to 200 5 to 500 10 to 1000 20 to 2000 5 to 500 10 to 1000 20 to 2000 0 to 0.5 0 to 1 0 to 3 0.5 to 0.5 1 to 1 3 to 3 30 to 3000 10 to 1000 20 to 2000 60 to 6000 120 to 12000 24 VDC 10% PF3A7 H 12
ML2B Bore size (mm) Contents C J G5-S Kit no. 16 20 25 32 CUX16-PS Piston seal: 1 pc. CV Bore size (mm) Proper tightening torque (Nm) (Cylinder body) Hexagon socket head (mm) CUX20-PS Rod seal: 1 pc. CUX25-PS Gasket: 1 pc. MVGQ 10 16 20, 25 32 0.54 10% M3 CUX32-PS Grease pack (10 g): 1 pc. 1.23 10% M4 It is impossible to replace seals in bore size 10 mm. CC 2.55 10% M5 4.02 10% M6 2.
ML2B Bore size (mm) Contents C J G5-S Kit no. 16 20 25 32 CUX16-PS Piston seal: 1 pc. CV Bore size (mm) Proper tightening torque (Nm) (Cylinder body) Hexagon socket head (mm) CUX20-PS Rod seal: 1 pc. CUX25-PS Gasket: 1 pc. MVGQ 10 16 20, 25 32 0.54 10% M3 CUX32-PS Grease pack (10 g): 1 pc. 1.23 10% M4 It is impossible to replace seals in bore size 10 mm. CC 2.55 10% M5 4.02 10% M6 2.
LG1H/ Aluminum body LG1TH/ Stainless steel body LJ1 LG1 LC1 LX LC6D/LC6C Switches 50 10 10 50 Horizontal load 100% Horizontal load 50% 20 10 20 10 Horizontal load 100% Horizontal load 50% Amount of deflection m Amount of deflection m 500 1000 1000 500 200 100 200 100 50 20 50 20 10 10 5 5 Lateral load 100% Lateral load 100% 0.5 1 2 0.5 1 2 Lateral load 50% Lateral load 50% Horizontal empty
8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 19 13 73.5 8 9 10 57.5 6 3.5 8 Up to 300 55 80 8 20 18 15.5 20 13 38 19 13 83.5 10 10 9 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 25 22 45 19 13 83.5 12 10 9 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 32 22 45 30 16 90.5 14 15 10 76 11 4 8 Up to 300 70 21 100.5 32 11 22 40 24 52 H GQ GR H1 I N NA K L P PG PH PL PW RR S U Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 28
l % M5 M6 i M8 Ye I M4 1MS M6 , M8. li ZPT02 2.5 3.5 ~~112.5 3.5 \ '(~i~ ~ ~ 1-\ ZPT08 (3.5) (3) H 1""'2., "2,'~) {:~~.:) zpno 10 12 171 (6) (13) ZPn3 10 12 10 12 10 12 ,'6.5) (6) : (13) (6.5) (6) ' :13) 1 1 6.5) (6) (13) II . 13 (7) (7) (13) ZPn6 I ZPT20 IS 26 15 26 15 15 15 16 .
-2)/2 n = 2, 4, 6, 8 160 10 10 + 55(n-2)/2 n = 2, 4, 6, 8 A5 A6 2 A59W n 15 15 15 10 10 + 55(n-2)/2 n = 2, 4, 6, 8 15 15 + 55(n-2)/2 n = 2, 4, 6, 8 10 100 35 1 1, 2 F5(W)/J5/J59W n F5BAL/F59F 15 15 1, 2 F5NTL n 10 100 35 1 2 (Same side) 2 (Different sides) A3 K3 G3 n (Same side) n (Different sides) 10 55 35 10 55 35 1 2 (Same side) 2 (Different sides) A44 n (Same side) n (Different
Example: SS3YJ5-20-03 .1 set (Manifold base) SYJ512-5LZ-M5.2 sets (Valve) SYJ500-10-1A.1 set (Blanking plate assembly) SS3YJ5-41R-03-C6 . 1 set (Manifold base) SYJ514R-5G.2 sets (Valve) SYJ500-10-3A .1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.
Symbol Nil Type Rc G*1 Port size F N Symbol Size 150C Applicable body size NPT 250C 350C 450C 550C *1 Conforms to ISO1179-1. 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 90-AMD650/850 AMD 650 10 90 Series compatible with secondary batteries Option Description IN-OUT reversal direction R Symbol Nil 90 Material restriction Body size 650 850 Accessory Symbol Description Bracket*1 Thread type Nil
Size: 10 to 50 Size: 1 to 7 Size: 70 to 200 Note) Only sizes 10, 20, 30 and 50 are available in clean series.
8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings