NCQ8

1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/4 2-1/2 2-3/4 3 3-1/2 4 4-1/2 5 #10-24UNC1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/4 2-1/2 2-3/4 3 3-1/2 4 4-1/2 5 #10-24UNC1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1

CRQ2

Size 20, 30, 40 (mm) (mm) (mm) Y 1 to 9 1 to 10 1 to 15 1 to 18 1 to 20 Size 10 15 20 30 40 X 2 to 18 2 to 20 Size 10 15 Size 10 15 CRQ2 Y 1 to 9 1 to 10 X 2 to 18 2 to 20 MSQ MRQ Symbol: A20 Symbol: A21 Symbol: A22 The long shaft can be further shortened by machining it into a stepped round shaft with a double-sided chamfer.

Flow Control Equipment

Style Inch Millimeter Elbow Universal 2 3 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 23 04 06 08 10 12 03 05 07 09 11 13 4 6 8 10 12 Control Meter out Meter in 0 1 1/8" tube should be used.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

32 10 85 15 26 54 10 10 8 M8 x 1.25 6 14 71 50 25 to 600 25 to 600 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 11 M8 x 1.25 7 18 80 63 32 to 600 32 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 11 M10 x 1.25 7 18 99 80 41 to 750 41 to 750 40 37 102 32 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 13 M12 x 1.75 10 22 117 100 45 to 750 45 to 750 40 37 116 41 140 1/4 1

Series VQ Base Mounted Metal Seal/Rubber Seal

(1) [EX124-SCS2](2) EX120-SMJ1(-XP)(1) [EX124-SMJ1](2) AXT100-1-P (4) U S w e r U S U S VZ AXT100-1-F (4) U S AXT100-1-GU20 Note 1) Suffix XP for dust-proof SI unit.

HRX-OM-X037

method Air-cooled refrigeration Refrigerant R410A(HFC) Quantity of refrigerant kg 1.8 1.8 Control method PID control Ambient temperature C 2 to 45 Circulating fluid CH1 : Clear water 1, DI water (pure water) 9 CH2 : Clear water 1,DI water (pure water) Set temperature range C CH1 : 5 to 35 / CH2 : 10 to 40 Cooling capacity2 kW 10 1 8 21.5 1 8 Heating capacity3 kW 1.5 1 4.0 1 Temperature stability

CL

8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 19 13 73.5 8 9 10 57.5 6 3.5 8 Up to 300 55 80 8 20 18 15.5 20 13 38 19 13 83.5 10 9 10 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 25 22 45 19 13 83.5 12 9 10 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 32 22 45 30 16 90.5 14 10 15 76 11 4 8 Up to 300 70 21 100.5 32 11 22 40 24 52 H GQ GR H1 I N NA K L P PG PH PL PW RR S U Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 28

Title not found

1/4-28 3/8-24 B Hex 9/16 9/16 9/16 9/16 9/16 9/16 7/16 7/16 5/16 5/16 7/16 C Thread 10-32 10-32 1/16 NPT 1/8 NPT 1/16 NPT 1/8 NPT 10-32 1/16 NPT 10-32 10-32 10-32 D Height 3/4 1/2 1/2 1/2 3/4 3/4 9/16 9/16 17/32 17/32 1/2 Part # RB 1/4-10 RB 1/4-10 Short RB 1/4-1/16 Short RB 1/4-1/8 short RB 1/4-1/16 RB 1/4-1/8 RB 1/8-10 RB 1/8-1/16 RB 1/16-10 RB 428-10 RBB3/8-10 72 Caps & Swivel Nipple Swivel

HRX-OM-M090

Rated Rated Sensitivity voltage x size voltage current of leak [V] [A] current [mA] HRS012--10 HRS018--10 1-phase 100V AC(50Hz) 100 200 15 15 or 30 HRS01--10-T 1-phase 3 cores x Sharing 100V to 115V 14AWG (High pump head AC(60Hz) [Optional]) (3 cores x 2.0mm2) HRS012--20 HRS018--20 HRS024--20 1-phase 10 30 (including ground) 200, 200-230V AC 230 HRS0--20-T (50/60Hz) 15 30 (High pump head

High Vacuum Angle Valve, XL Series

0.3 1.0 0.3 0.8 0.3 Actuation pressure difference MPaNote 1) 0.5 0.25 0.4 0.2 0.2 0.15 Reverse pressure potential MPa Note 2) 1 x 10 -6 Port A pressure Pa 1.3 x 10 -9 {1 x 10 -8} at ordinary temperatures, excluding gas permeation Internal External 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s {Torr l/s} VCR 1.3 x 10 -11 {1 x 10 -10} Fitting

CQS

25 Note) 2 15 Note) 5 10 1.

Thermo-chiller/Rack Mount Type

1 w !2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

2 5 (Ch0&1 in) Monitor under range 0: disable, 1: enable 6..7 Data format 0: offset binary, 1: signed magnitude, 2: 2s complement Channel parameter Channel 0 to 1 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 0..2 (Ch0 in) Analogue input range 3 Reserved 3 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA 3: 0..10 V, 4: 0..5 V, 5: 1..5 V,

VQZ1000/2000/3000

Rc 1/8 1(P) port L plug connector (L): VQZ2220 1(R)-L-C4/C6/M5 DIN terminal (Y): VQZ2220 1(R)-Y-C4/C6/M5 Indicator light 300 136.5 68 (Lead wire length) Pg.7 31 <36> 142.5 MAX.10 71.5 Applicable cable O.D.

42

(Including r and t) Manifold Block Assembly SQ Replacement Parts VFS VVQ5000 1 No. Part no. Description Material Q'ty VFR VVQ5000-80A-1 Gasket HNBR 10 Type VVQ5000-80A-2 Gasket HNBR 10 Option VQ7 A For 1 station Note) Spare parts consist of sets containing 10 pcs. each.

CM2

12 14 1/8 1/8 1/8 0 0.039 1/4 With Rod Boot S 62 62 64 88 TD 8 9 9 10 TT 10 10 10 11 TX 32 40 40 53 TY 32 40 40 53 TZ 52 60 60 77 Z 36 40 40 44.5 ZZ 116 120 122 154 h Symbol Bore size (mm) 20 25 32 40 e f B3 Stroke Bore size (mm) 1 to 50 68 72 72 77 51 to 100 81 85 85 90 101 to 150 93 97 97 102 151 to 200 106 110 110 115 201 to 300 131 135 135 140 301 to 400 156 160 160 165 401 to 500 181

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Digital Digital Digital 0.01 to 1 0.02 to 2 0.05 to 5 0.1 to 10 0.3 to 25 0.5 to 50 1 to 100 2 to 200 Power supply voltage Rated flow range [L/min] 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 2 to 200 5 to 500 10 to 1000 20 to 2000 5 to 500 10 to 1000 20 to 2000 0 to 0.5 0 to 1 0 to 3 0.5 to 0.5 1 to 1 3 to 3 30 to 3000 10 to 1000 20 to 2000 60 to 6000 120 to 12000 24 VDC 10% PF3A7 H 12

CJ2X/CUX/CQSX/CQ2X/CM2X

ML2B Bore size (mm) Contents C J G5-S Kit no. 16 20 25 32 CUX16-PS Piston seal: 1 pc. CV Bore size (mm) Proper tightening torque (Nm) (Cylinder body) Hexagon socket head (mm) CUX20-PS Rod seal: 1 pc. CUX25-PS Gasket: 1 pc. MVGQ 10 16 20, 25 32 0.54 10% M3 CUX32-PS Grease pack (10 g): 1 pc. 1.23 10% M4 It is impossible to replace seals in bore size 10 mm. CC 2.55 10% M5 4.02 10% M6 2.

CJ2X/CUX/CQSX/CQ2X/CM2X

ML2B Bore size (mm) Contents C J G5-S Kit no. 16 20 25 32 CUX16-PS Piston seal: 1 pc. CV Bore size (mm) Proper tightening torque (Nm) (Cylinder body) Hexagon socket head (mm) CUX20-PS Rod seal: 1 pc. CUX25-PS Gasket: 1 pc. MVGQ 10 16 20, 25 32 0.54 10% M3 CUX32-PS Grease pack (10 g): 1 pc. 1.23 10% M4 It is impossible to replace seals in bore size 10 mm. CC 2.55 10% M5 4.02 10% M6 2.

LG1H

LG1H/ Aluminum body LG1TH/ Stainless steel body LJ1 LG1 LC1 LX LC6D/LC6C Switches 50 10 10 50 Horizontal load 100% Horizontal load 50% 20 10 20 10 Horizontal load 100% Horizontal load 50% Amount of deflection m Amount of deflection m 500 1000 1000 500 200 100 200 100 50 20 50 20 10 10 5 5 Lateral load 100% Lateral load 100% 0.5 1 2 0.5 1 2 Lateral load 50% Lateral load 50% Horizontal empty