[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Dimensions: Common Exhaust (Interchangeable with VVT320 for mounting) Without mounting bracket: VV317-02-1-02 A single valve unit port location P port 2 x 7 mounting hole R port Manual override (Non-locking) A port (Station 1) (Station n) DIN terminal facing upward 136.6 4 x 1/4 n x 1/4 Applicable cable O.D. 6 to 12 L Dimension n: Stations Stations Formula L1 = 46 x n + 29 L2 = 46 x n + 14

WRF100

mounting C B A0.5 55 55 1000.3 Switch mounting bracket Note 2) 12 70 12 Fulcrum 13 40 15 10 F 2 x 4 x M10 x 1.5 depth 12 107 Note 3) 70 2 x 2 x 8H7 +0.015 0 ( ) depth 12 60 1 52 (58.7) (70) 95 700.05 85 75 330 270 0.3 193 (173) 133 25 100 100 (10) Rc1/ 4 Unclamp side port 306 (30.2) (30.2) 360 139 Limit switch Note 1) Rc1/ 4 Clamp side port +0.015 0 4 x 8H7( )through 820.05 143 115 50 4 x 14

XLAQ/XLDQ

B A A XLAQ Series Case A (mm) Weight (kg) Conductance (L/s) B (mm) Model XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 0.33 40 120 5 0.6 50 133 14 65 1.3 178 45 70 190 2.0 80 : Common to the XLAQ/XLDQ series Variations Variations Bellows seal, Single acting/XLAQ 2-step control, Single acting/XLDQ Bellows type is particulate free and completely cleaned. Pressure balancing mechanism.

1

Tightening of Fitting Face seal fitting 1/8 turn after tightening by hand Compression fitting 1 1/4 turns after tightening by hand Tightening of Female Thread NPT, Rc1/8 7 to 9 Nm NPT, Rc1/4 12 to 14 Nm NPT, Rc3/8 22 to 24 Nm Electrical Connections Caution 4. Connection of piping to products When connecting piping to a product, avoid mistakes regarding the supply port, etc.

Air Suction Filter With One-touch Fittings ZFB Series

ZFB100, ZFB101 ZFB200, ZFB201 ZFB300, ZFB301 ZFB401 16 x 14 x L60 rZFB200-08 tZFB300-08, -10 ZFB301-11, ZFB401-13 I-34S-A 10 x 6 x L33 12 x 8 x L42 14 x 10 x L45 I-35S-A I-36S-A I-39S-A 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. yZFB401-13 Note) Elements and O-rings for the cover are sold in sets of 10 pieces each. 10 pcs.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Weight Material: NBR, Mounting: A [g] qWeight Difference by Mounting Style [g] ZHP63BMNA-C6S 184 ZHP80BMNA-C6S 224 ZHP63UMNA-C6S 167 ZHP80UMNA-C6S 175 B C D E F G H 20 5 14 7 25 1 11 wWeight Difference by Material [g] For the ZHPA-00 (without ejector), weight shown above 12 g.

Clean Regulator/Fluororesin Type

Description Material Note Fluorine coated Spring holder 11 Insert bushing Nut Collar 13 14 15 New PFA New PFA New PFA Valve spring 12 Fluorine coated 882 Clean Regulator/Fluororesin Type SRF Series Construction/SRF50 SRF50 Integrated fittings With nut e r y t e ARJ t u y r u AR425 to 935 i w i ARX !5 q AMR !4 ARM !1 !1 o o ARP !0 !2 !3 !3 !0 IR-A w w !2 IR !4 IRV !5 VEX !

High Power Cylinder:

D-G39/K39 D-A44 D-H7C D-C73C/C80C Auto Switch Setting Position Auto Switch Mounting Height (mm) (mm) D-C7 D-C8 D-C73C D-C80C D-H7l D-H7C D-G5NTL D-H7lW D-H7lF D-H7BAL D-B5 D-B6 D-A3l D-A44 D-G39 D-K39 D-B59W D-C7 D-C8 D-H7l D-H7lW D-H7lF D-H7BAL D-B5/B6 D-B59W D-G5NTL D-A3l D-G39 D-K39 D-A44 D-C73C D-C80C Bore size (mm) A B A B A B A B A B A B A B HS HS HS HS HS 20 20.6 9 14.6 8.5 14.1 14

10-my1b-z-e

MY1B25 MY1B32 MY40-16AStroke MY1B40 Qty. 1 Seal belt 14 MY32-16CStroke MY25-16CStroke Urethane Polyamide Dust seal band 15 MY1B25-16BStroke MY1B32-16BStroke MY1B40-16BStroke Stainless steel 1 KA00311 KA00320 KA00320 O-ring 28 NBR 2 (7.15 x 3.75 x 1.7) (7.15 x 3.75 x 1.7) (5.1 x 3 x 1.05) 14, 15, 28, 33 and 37 are not included in the seal kit.

10-my1h-e

Note MY1H10 No. 13 Seal belt MY10-16AStroke 1 14 !6 !7 !8 !9 Dust seal band MY10-16BStroke 1 13 and 14 are not included in the seal kit. Order them as required with by individual part numbers. Scraper 2 Piston seal 2 MY1B10PS MY1B10-PS Tube gasket 2 O-ring 4 Seal kit includes !6, !7, !8 and !9. Seal kit includes a grease pack (10 g). When !3 and !

LJ1H

B A C D 13 14 High Rigidity Direct Acting Guide Series LJ1H20 Standard Motor Motor Output Rolled Ball Screw 100W 15mm/20mm lead Horizontal Mount How to Order Stroke LJ1H202 NC 1 F 2 Cable entry direction Top entry Cable entry direction Cable length Power supply voltage Left entry F R L T B 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) 1 2 Axial Right Left Top Bottom 2 3 4 5 2m 3m 4m 5m Axial

Fluoropolymer Piping Equipment

Refer to the proper tightening torques shown below. 1 P0.01MPa P0.01MPa 1 0.5 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Number of needle rotations Number of needle rotations LVN40 14 Tightening torque for piping 12 Torque (N.m) Body class 1.5 to 2.0 3.0 to 3.5 7.5 to 9.0 Differential pressure P0.05MPa 2 3 4 10 Flow rate (L/min) P0.03MPa 8 6 4 P0.01MPa 2 0 2 4 6 8 10 0 Number of needle rotations 939 A

MA

D90 reverse unit Air gripper for auto hand changing system 20Variations Adapter for assembling robot Series MA2 8, 10, 11, 14, 15, 20 Series MA3 10, 11, 14, 15, 20, 24, 25 Additional installation unit of electrical contact point (Able to add 8 contact points) Air grippers for auto hand changing system (10 to 20) Standard type Narrow type 90 reverse unit Added to the standard AHC unit By attaching

INFORMATION Step Motor Controller 5 types of communication protocols New New

Edition 1.13) Version 1.1 Port Class A Communication speed 100 Mbps*2 10/100 Mbps*2 (Automatic negotiation) 100 Mbps*2 125/250/500 kbps 230.4 kbps (COM3) Configuration file*3 ESI file EDS file GSDML file EDS file IODD file I/O occupation area Input 20 bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 4, 10, 20 bytes Output 4, 12, 20, 36 bytes Input 14

99

Test dust: ACFTD / Flow rate: 35 L/min Dust concentration: 10 mg/L / Temperature: 20C Element: EJ801S Schematic diagram of filtration efficiency data measuring circuit FQ1 EJ-2 m FN 100 99 Dust feeder Initial filtration efficiency (%) EJ-4 m EB ES Tank Flow meter EJ-6 m Differential pressure gauge EJ-13 m 95 Pressure gauge Downstream side sampling Upstream side sampling 90 0 2 4 6 8 10 12 14

AR20-B to AR60-B

Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. 12 1 1 2 2 1 2 1 3 1 2 1 L 14 2 4 12 10 5 1 3 How to Order Refer to page 63 for size 10.

Peltier-type Chiller Thermo-con/ Compact Type

This may shorten the pump life. 14. If tap water is used, it should satisfy the quality standards shown below.

Series 10-, 21- AF-A Air Filter

/21-AF30-A 10-/21-AF40-A 10-/21-AF40-06-A 10-/21-AF50-A 10-/21-AF60-A 142.1 174.1 176.1 247.1 261.1 93.9 122.1 154.1 156.1 227.1 241.1 91.4 28 30 35 34 47 47 2.3 2.3 2.3 2.3 3.2 3.2 40 53 70 70 90 90 8.4 13 12.5 12.5 13 13 5.4 6.5 8.5 8.5 11 11 22 23 26 25 35 35 27 35 52 52 66 66 30 41 50 50 70 70 20 26.7 35.5 35.5 45 47.5 25 35 40 40 30 30 30 38.4 38.4 20 26.7 35.5 35.5 45 47.5 9.8 14

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount P1 P2 A B Note 1) C D Q R S T U V W Y Z F J K AA BB H J M N 10-/21-AR20-B 10-/21-AR25-B 10-/21-AR30-B 10-/21-AR40-B 10-/21-AR40-06-B 10-/21-AR50-B 10-/21-AR60-B 2 Note 2) 1/8, 1/4 28.5 1/8 20.5 40 11 67.4 44 26.5 65.5 M28 x 1 30 28.5 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Recommended Tightening Torque [Nm] Connection thread Pressure Control Equipment 1/2 3/8 1/4 1/8 Torque 28 to 30 22 to 24 12 to 14 7 to 9 2. Avoid excessive torsional moment or bending moment other than those caused by the equipments own weight as this can cause damage. Support external piping separately. 3.