Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: E (8mm), Applicable Tubing O.D.: 03 (Ø5/32), Seal Method: None

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: None (0°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: E (8mm), Tubing: 04 (ø4)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: None (0°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: E (8mm), Tubing: 06 (ø6)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: 1 (180°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: E (8mm), Tubing: 06 (ø6)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 0 (Meter-out), Indicator Direction: 1 (180°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: E (8mm), Tubing: 04 (ø4)

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

A 24 M5 thread, depth 8 With or without insert depending on base material. 32 A' Coding stud M5 x 10 DIN913-45H 12 2 8 M5 Drive flange face G1/4 DIN/ISO228/1 19.5 5.5 Solenoid valve flange face O-ring 16 x 2 1.5 IP 3 IW 1301 AW The solenoid valve can be attached with 2 mounting bolts.

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Control Range: FSM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: E (8mm), Tube Size: 02 (ø2)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Control Range: FC (50 to 150 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: E (8mm), Tube Size: 06 (ø6), Sealant: without Sealant, Push lock: A (Push-lock)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: E (8mm), Tube Size: 06 (ø6), Sealant: without Sealant, Push lock: A (Push-lock)

3.2

connector Analog output or auto shift input 2 outputs + Sensor connection M5 female thread, through type (with mounting holes) M3 M5 female thread, through type M5 6 reducer 4 reducer R1/8,NPT1/8 Applications Manifolding is possible.

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Model: 1FS, Thread: R (or None), Port Size: M5 (M5 x 0.8), Width Across Flats: E (8mm), Applicable Tubing: 06 (ø6), Seal: without Sealant

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

2 e !1 No. q w e r t y u i o !0 !1 !2 Material Note Description Body A Handle Body B Needle Needle guide Lock nut Panel nut U seal Spacer Cassette Packing O-ring PBT PBT Brass Brass Brass Brass Brass HNBR PBT POM, Stainless steel NBR NBR Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated Note) !

Series 10-MGF ø40, ø63, ø100 Guide Table

Fittings & Tubing Air Cylinders Rotary Actuators V D C D C E F H A + Stroke B + Stroke GB GA T X PP (Rc, NPT, G): Relief port 2 x P (Rc, NPT, G) Port for extension Port for retraction When the cylinder is extended KA: T-slot for hexagon bolt 4 x M K KB KC 6-K (6 positions) 10 10 M12 x 1.75 M10 x 1.5 M8 x 1.25 M Bore size Standard stroke (mm) GB D A 170 140 10 10 38 38 36.5 E B F KC 11 11

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Guide Table Series MGF ø40, ø63, ø100 1

4 20Clear anodized Rod cover Magnet Magnetic material Aluminum alloy e !5 Chromated Piston Plug Carbon steel Aluminum alloy r !6 Data Electroless nickel plated Piston rod Element Resin Carbon steel t !7 Anodized Plate Snap ring Spring steel Aluminum alloy y !8 Anodized End plate Rod seal NBR Aluminum alloy u !

Manifold Regulator Modular Type ARM2500/3000 Series

Note Outlet pressure (MPa) 136413 ARM2500 ARM3000 Hexagon socket head cap screw (M5 x 70) 4 With flat washer 136313 IRV Hexagon socket head cap screw (M6 x 85) 4 With flat washer VEX SRH Option/Bracket Assembly SRP Individual IN type can be used as a single unit regulator.

A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., Operation Manual, E/P REGULATOR, PRE-SET, INSTRUMENTATION, IT2000/ITV2000 E/P REGULATOR, EB, IT2000 3/8 INCNPT VERSION, .77161 lb, ModelITV101 ITV103 ITV105 ITV201 ITV203 ITV205 ITV201------------

A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., Operation Manual, E/P REGULATOR, INSTRUMENTATION, IT4000/ITV3000 E/P REGULATOR, EB, IT4000 3/8 INCNPT VERSION, 1.32277 lb

A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., E/P REGULATOR, INSTRUMENTATION, IT2000/ITV2000 E/P REGULATOR, DB, IT2000 1/4 INCNPT VERSION, 1.50489 lb