Size: 01(Size 26mm), Stations: 6 Stations, A, B Port: 02 (Side, 1/4), Port Thread: F [G (ISO1179-1 G Threads)], SI Unit: SD0 (EX250/500 Serial Kit w/o SI Unit), End Plate: w/o SI Unit/End Plate, SI Unit COM: +COM, Number of Input Blocks: w/o SI Unit/Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: None, X Option: None, CE Compliant
Size: 01(Size 26mm), Stations: 9 Stations, A, B Port: 02 (Side, 1/4), Port Thread: F [G (ISO1179-1 G Threads)], SI Unit: SD0 (EX250/500 Serial Kit w/o SI Unit), End Plate: w/o SI Unit/End Plate, SI Unit COM: +COM, Number of Input Blocks: w/o SI Unit/Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: None, X Option: None, CE Compliant
Size: 01(Size 26mm), Stations: 10 Stations, A, B Port: 02 (Side, 1/4), Port Thread: F [G (ISO1179-1 G Threads)], SI Unit: SD0 (EX250/500 Serial Kit w/o SI Unit), End Plate: w/o SI Unit/End Plate, SI Unit COM: +COM, Number of Input Blocks: w/o SI Unit/Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: None, X Option: None, CE Compliant
Body Size: 30, Thread: Rc, Port Size: 02 (1/4), Option: Standard, Attachment: V1 (3-Port Valve for Residual Pressure Release; Mounting: V+AF+AR), Semi-Standard 1: Standard, Semi-Standard 2: W (Drain Cock w/Barb Fitting for ø6 x ø4 Nylon Tube)
Body Size: 30, Thread: Rc, Port Size: 02 (1/4), Option: G (Round Type Pressure Gauge w/Limit Indicator), Attachment: V1 (3-Port Valve for Residual Pressure Release; Mounting: V+AF+AR), Semi-Standard 1: Standard, Semi-Standard 2: W (Drain Cock w/Barb Fitting for ø6 x ø4 Nylon Tube)
Body Size: 25, Thread: Rc, Port Size: 02 (1/4), Option: G (Round Type Pressure Gauge w/Limit Indicator), Attachment: Standard, Semi-Standard 1: Standard, Semi-Standard 2: W (Drain Cock w/Barb Fitting for ø6 x ø4 Nylon Tube)
Body Size: 25, Thread: Rc, Port Size: 02 (1/4), Option: Standard, Attachment: Standard, Semi-Standard 1: Standard, Semi-Standard 2: W (Drain Cock w/Barb Fitting for ø6 x ø4 Nylon Tube)
Adapter Material: Brass, Standard, Pad Diameter: ø2, Pad Type: U (Flat), Pad Material: N (NBR), Mounting Thread Size: A6 (M6 x 0.75, Male Thread), Vacuum Inlet: 02 (øTubing)
Adapter Material: Brass, Pad Diameter: ø1.5, Pad Type: U (Flat), Pad Material: N (NBR), Mounting Thread Size: B3 (M3 x 0.5, Female Thread), Vacuum Inlet: 02 (ø2, One-touch Fitting)
Adapter Material: Brass, Pad Diameter: ø6, Pad Type: B (Bellows), Pad Material: GN (Conductive NBR), Mounting Thread Size: B5 (M5 x 0.8, Female Thread), Vacuum Inlet: 02 (ø2, One-touch Fitting)
IDX-OM-M051 The number of years stated is a reference value for a running rate of 12 hours per day (JEMA) x 300 days. Also, the replacement period is the time over which the probability of the failure of the product will increase. Replacement will not necessarily be required, but should be done if any error is found or as a preventive maintenance measure.
X500 AC (50/60 Hz) 1 2 3 4 7 B DC 5 6 24 VDC 12 VDC X600 TRIAC output specification (Refer to page 14.) 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] 240 VAC 24 VAC PE port EA/EB port VF1000 VF3000 > VF5000 > A, B port size VF5000 > > VF1000 > > VF3000 > > Port size M5 x 0.8 1/8 1/4 3/8 Symbol M5 01 02 03 Refer to Made to Order (Page 14) when piping to PE port is required.
Oooosite side of 02 2 stations 20 20 stations Same side as A port Port size I B3T lone touch frttina fors/32'tube B7T lone touch fittino for 1/4" tube Body ported / Type 21 (A pon: top porting) NW3KF3-21-@-OOT Applicable valves NVKF3330 OOO -M5 NVKF333O OOO -o1T .
Suction port 2 Series PA3000 How to Order PA 3 3 1 0 03 Assembly environment Standard Clean room Nil P Option Body material Nil Body only With foot With silencer (for automatic operation type only) 3 Fluororesin B N* Diaphragm material 1 PTFE * With silencer AN200-02 for AIR EXH. AN200-N02 for NPT.
Port size Body size Thread size Port thread Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.
(g) Flow rate( /min (ANR))Effective area (mm2)Flow rate( /min (ANR))Effective area (mm2)AS1000-M5M5 x 0.8901.4801.26, 10, 16, 20, 2533
Delivery Pressure: 02 [0.5 to 30 psig (0.0034 to 0.2 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: Elgiloy™; Nozzle: 316L SS), Surface Finish: X [5 μin. (0.13 μm)], Range Options: Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Outlet:
Delivery Pressure: 02 [0.5 to 30 psig (0.0034 to 0.2 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: Elgiloy™; Nozzle: 316L SS), Surface Finish: X [5 μin. (0.13 μm)], Range Options: Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Outlet: No
Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: X [5 μin. (0.13 μm)], Ports: 3PW [3 Ports (1-In; 2-Out; 4-Gauge Port Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet: 0 (No Pressure
Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa); Sub-atmospheric : 100mm Hg absolute to 30 psig (-88kPa to 0.2MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: X [5 μin. (0.13 μm)], Range Options: A (Sub-atmospheric), Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/