MHx-OMY0001

Z M9NWZ () 2 2 PLC 2 3-4 2 1-4 -16- 5. 5-1. 5-2.

CG1-OM0227

AF AR 1) 5 2) 3) 5 4 4) 1 ( )ISO VG-32 2-2. 1) 2) 3) 4) 5) 6) 7 8) 9) 10) 3 1) 2) 3) 4) 5 5) (40) 2-3. 1) 2) 1) 1 P10[3. ] () (fR)[N] [mm] 1. 6 (MPa)=(MPa)+{(kg) 2)} X /(mm ,, 2) 3) 4) ( ) 5) 6) 7)()1 1 Nm CG120 1.5 1.52.2 CG125 2.9 2.53.5 CG132 2.9 6.08.6 CG140 4.9 10.814.6 CG150 11.8 1925 CG163 24.5 3040 CG180 24.5 --CG1100 42.2 --8) 9) 10) 11) 12) 7

CEx-OMQ0010

No.CE-OMQ0010-C CE2 CE2 SMC 1 2 2 2-1. 89 2-2 10 2-2-1. 10 2-2-2. 11 3 1213 4 4-1. 14 4-2. 14 4-3. () 15 5 5-1. 16 5-2. 16 5-3 17 5-4 1718 6 6-1. 18 6-2 19 6-3. 19 7 7-1. 20 7-2. 2021 8 8-1 21 8-2. 2122 8-3. 22 8-4. 23 8-5. 2324 1 1) (ISO/IEC)(JIS) 2) *1) ISO 4414:Pneumatic fluid power General rules relating to systems.

ZSE30/ISE30

32" One-touch fiting C4H Output specifications Panel mount 25 65 26 28 NPN output PNP output 1 to 5 V output 4 to 20 mA output C6H 6 One-touch fitting B N7H 1/4" One-touch fitting Elbow type 4 One-touch fitting 5/32" One-touch fitting C4L Panel mount adapter + Front protective cover C6L 6 One-touch fitting D N7L 1/4" One-touch fitting Option Part No.

IDUS/IDFS

(C) 50 55 60 65 70 80 15 15 15 15 15 15 10 10 10 10 10 10 5 5 5 5 5 5 1.64 1.37 1.30 1.23 1.16 1.09 1.26 1.05 1.00 0.95 0.89 0.84 0.88 0.74 0.70 0.66 0.62 0.59 30 1.56 1.30 1.24 1.17 1.11 1.04 1.20 1.00 0.95 0.90 0.85 0.80 0.84 0.70 0.67 0.63 0.60 0.56 32 1.50 1.25 1.19 1.12 1.06 1.00 1.15 0.96 0.91 0.86 0.82 0.77 0.81 0.67 0.64 0.60 0.57 0.54 35 1.40 1.17 1.11 1.05 0.99 0.94 1.08 0.90 0.86

STAINLESS STEEL CYLINDER

When replacing seals, take care not to hurt your hand or finger on the corners of parts. 5 - 1.

CEP1

, (CEU5**-D),EMC 5 5-1 (), CEP1 ,, ,, ,, 145 CEP1 ,, 15000 18cm ,, 5-2 0.01mm (4 ) 0.00 0.08 0.04 A B (1) ,0.8mm (2) ,sin,cos 2 ()1 (0.8mm)1 (3) 1/200.04mm/90 () (4) 4 ,0.01mm 5-3 CEP1 A /B 90 11 12 11 10 10 ,A ,90,B ,B ,90,A , ,A B 6 6-1 ?

EXxx-OMP0004CN

A code) 2 (BUS IN) CC-Link (IN ) 1 (M12 4 A code) 3 SI 1 (M12 5 B code) 4 (M3 ) 5 6 LED SI 2 7 SI (M330) SI 2 (BUS OUT)(1 ) 128 2LED 16 -9No.EX-OMP0004CN-I SI n L 1 2 3 4 5 6 7 8 L1 120.7 136.7 152.7 168.7 184.7 200.7 216.7 L2 80 96 112 128 144 160 176 L 9 10 11 12 13 14 15 16 L1 232.7 248.7 264.7 280.7 296.7 312.7 328.7 344.7 L2 192 208 224 240 256 272 288 304 (mm)

VCB

Orifice size (mm) 2 3 4 5 7 10 Symbol 2 3 4 5 7 10 Class 3 Class 2 Class 4 Electrical entry G Grommet C Conduit Refer to the table below for orifice and port size combinations.

25

Relationship between the kinematic viscosity 50 0 1 2 3 4 5 10 20 30 40 50 100 Viscosity (mPas) Transfer is possible up to about 100 mPas.

Hand Valve Series VH 1

VHS 5-8-15

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 SUS304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

ITVH

Self-diagnosis: 5% F.S. or less Switch output PNP open collector output: Max. 80 mA Hysteresis: 3% F.S.

MHL2

8@1@5 tyu@3@4 Order 1 pinion assembly per one unit.

IR1000/2000/3000

Spacer 6 Spacer with L bracket (3 + 5) 7 Spacer with T bracket (4 + 5) AF2000 AF3000 AF4000 AFM2000 AFM3000 AFM4000 B210L B310L B410L B210T B310T B410T Y20 Y30 Y40 Y20L Y30L Y40L Y20T Y30T Y40T 5 Spacer Approx. 133 Approx. 172 97.5 3 L bracket 4 T bracket 135 1 AF2000 IR1000 2 AFM2000 178 1 AF3000 IR2000 2 AFM3000 234 1 AF4000 IR3000 2 AFM4000 Accessories (Optional)/

VT307

(Refer to Figure 1.) 4) Remove the cable gland (4) and plain washer (5) and rubber seal (6). 3. Wiring 1) Passing through the cable (7), cable gland (4), plain washer (5), rubber seal (6) in this order, and then insert into the housing (2). 2) From the terminal block (3), loosen the screw (11), then pass the lead wire (10) through, then again tighten the screw (11).

CM2x-OM0230Q

AF AR 4 - 1) 5 2) 3) 5 4) 1 ISO VG-32 2-2. 1) 2) 3) 4) 5) 6 7) 5 - 8 9) , 10) 11) 3 1) P10 [2-6.] 2) 3) 4) 5) 6) 7) (40) 6 - 2-3. 1) 1 P10 [2-6.] fR Ft N () mm 1. (MPa)=(MPa)+{(kg) 2)} X /(mm ,, 2) 3) 4) 7 - 5) 6) 7) 8) 9) 24. 1) 2) 3) 8 - 1) 2) 1.52 2 2. 2-5. ,AS 9 - 2-6. P7.1. 1.

VP3145/3165/3185

DIN terminal: VP3145-D Conduit terminal: VP3145-T A B A B VQZ VZ VS Conduit terminal with indicator light (TL) G 1/2 Light Light Max. 11 Applicable cable 6 to 12 VFN G 1/2 Rc 1/4 Rc 1/4 ( ): With indicator light (TL) 4-10-5 6 Series VP3145/3165/3185 Dimensions: VP3165 Grommet: VP3165-G A B G 1/2 Manual override Lead wire length 200 mm External pilot port Rc 1/4 Rc 1/4 (PE port) Courtesy

70pvvna

B: Locking slotted type 4 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 220 VAC 50/60 Hz 10 5 6 24 VDC 12 VDC 240 VAC 50/60 Hz 7 15 2 9 Other Nil: Non-locking push type 20 3 Option Valve size 5 to 7 25 4 1 1 1 2 32 5 1 4 1 2 40 50 6 7 Note) Air operated only Electrical entry/ With light/surge voltage suppressor E GS G Grommet with surge voltage suppressor Grommet Grommet

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Selection of air quality by purpose For these cases, degree of quality is 15 4 +3 5 specified as 1, 4, and 2 respectively. 40 5 +7 25 Refer to Guide (1). Refer to Guide (2). Refer to Guide (3). Refer to below piping system chart. Refer to Guide (4) page 14-14-4.