SMC Corporation of America
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refrigerationR134a (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RHClear water, Deionized water10 to 408.0 (at 20 C)1.25 (at 20 C)?

refrigerationR134a (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RHClear water, Deionized water10 to 408.0 (at 20 C)1.25 (at 20 C)?

IDF4E IDF3E IDF2E IDF1E Air flow capacity 100 200 310 500 740 1200 1650 310 500 740 50Hz l/min(ANR)Note1) 110 220 60Hz 350 570 810 1300 1820 350 570 810 Inlet air pressure(MPa) 0.7 Inlet air temperature(C) Rated conditions 35 Saturation 55 Saturation Ambient temperature(C) 32 Outlet air pressure dew point 10 Working fluid Inlet air temperature(C) Compressed air 5~80 5~50 Operating range

50 2-Rc 1/8 Vacuum gauge port IRV3000 IRV3000 54 70 50 66 SMC P K U C S O H L 10.5 x 8.5 2-Rc 1/8 Vacuum gauge port Approx. 130 G 43 74 SET VAC SET Pad side Vacuum pump side 22 Approx. 68 Rc 1/2 2-Rc 1/4, 3/8, 1/2 Connection port 66 2

Connecting power supply/output connection cable To connect the power supply/output connection cable to the controller, insert the cable connector with the C part facing down until it clicks. C 2 m 16-3-20 20 Series PSE Specific Product Precautions 3 Be sure to read before handling. Wiring Caution 3.

Refer to back page 50 for Safety Instructions, pages 543 to 546 for Flow Control Equipment Precautions, and pages 599 to 601 for Specific Product Precautions.

Rc(PT)1 48 to 50 Rc(PT)2 3 Make sure not to apply a lateral load to the body during or after the installation.

55 Reverse rotation suppression input Alarm reset input PG output C phase 0V Servo alarm output 0V Frame ground 65 75 For LX Positioning complete signal output 0V External power supply input A 50 50 Driver model SGDE-A3BP SGDE-A3AP B 55 55 Example for driver connection between equipment +10% 15% +10% 15% Single phase 200 to 230VAC (50/60Hz) For 100V Single phase 100 to 115VAC (50/60Hz) R

63 74 LVA LVH LVD Port size Flange: 32F, 40F, 50F LVQ J (Valve open) LQ Indicator (Option) LVN Pilot port TI/ TIL PA PAX PB 4 x 2-18 mounting hole Applicable flange Pilot port Rc A B C D E F G H J Model 8 10 12 50 40 32 1 8 1 4 1 4 VND50D-32F VND60D-40F VND70D-50F 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36 42 54 12 12 14 17-4-41 6 Series VND Precautions Be

RLQ MLU View A-A' ML1C DStandard Stroke B AF AP E A AA AB AC AD AE BP BZ C D F G GC Bore size (mm) 20 25 32 40 Stroke range (mm) -X 11 depth 8 26.5 73.5 6.8 75, 100, 125, 150, 200 M6 x 1 depth 12 13 94 16.5 70 32 35 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 50 28 135 118 12 14 depth 10 31.5 86.5 8.6 M8 x 1.25 depth 16 16 19 104 75 37 40 50 29 160 140 16 2075, 100, 125, 150, 200, 250, 300 14 depth 10 31.5

RLQ MLU View A-A' ML1C DStandard Stroke BP BZ C D E F G GC A AA AB AC AD AE AF AP B Bore size (mm) 20 25 32 40 Stroke range (mm) -X 11 depth 8 26.5 73.5 6.8 75, 100, 125, 150, 200 M6 x 1 depth 12 13 94 16.5 70 135 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 50 118 28 35 32 12 14 depth 10 31.5 86.5 8.6 M8 x 1.25 depth 16 16 104 19 75 160 50 140 29 40 37 16 2075, 100, 125, 150, 200, 250, 300 14 depth 10 31.5

Unit: mm Piston speed (mm/s) Lock style 50 100 300 500 In terms of specific load conditions, the allowable kinetic energy indicated in the table above is equivalent to a 50% load ratio at 0.5MPa, and a piston speed of 300mm/sec.

(-R) specification Bracket mounting dimensions With auto drain Model Port size A B C 0 E F G I H J K L M N P Q S Float type N.O N.C B B AW3001 1/4 . 3/8 53 2 11 92.5 55 38.5 41 40 46 6.5 8.0 53 2.3 42.5 56 4 32.5 236.5 247 10 AW4001 1/43/8 V2 70 262.5 112 70 38 50 54 54 8.5 10.5 70 2.3 52.5 73 1 36 288 298.5 SMC'S GLOBAL MANUFACTURING DISTRIBUTION, AND SERVICE NETWORKe EUROPE -ASIA -NORTH

(A) 4 (B) 2 Flow-rate Characteristics 1 (P) 5 (R1) 3 (R2) 4, 2 5, 3 (A, B EA, EB) 1 4, 2 (P A, B) Flow-rate characteristics Series Response time (msec) Mass (g) 4-position dual 3-port valve Note) (A) Type of actuation Seal C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv b (A) 4 (B) 2 140 140 170 170 185 185 185 185 185 185 170 225 215 260 250 285 275 285 275 285 275 250 0.30 0.50 0.30 0.50 0.30

A2 Bracket B (Option unit part no.: ZS-38-A2) 42.5 (A) A3 Bracket C (Option unit part no.: ZS-38-A3) Bracket configuration allows mounting in four orientations. 30 1.6 25 20 20 45 30 5.2 5.5 5.2 9.1 13.6 A B 41.4 16.4 Bracket B B 7.5 7.2 53 28 Bracket C 20 When using the bracket B or C, install it by taking the dimensions of the piping part into consideration. 38 2-Color Display High-Precision

JIS symbol Minimum Operating Pressure Unit: MPa Bore size (mm) Minimum operating pressure 20 25 32 40 50 63 80 100 0.02 0.01 Standard Stroke Table Replacement Parts: Seal Kits Bore size (mm) Bore size (mm) 20 25, 32, 40, 50, 63, 80, 100 Standard stroke (mm) Note 1) Contents Kit No. 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 20 25 32 40 50 63 80 100 CG1Y20-PS CG1Y25

Recommended Sonic Conductance and Solenoid Valves (Reference) C [dm3/(sbar)] ZH10--X185 1.48 or more ZH20--X185 3.12 or more ZH30--X185 5.92 or more ZH40--X185 11.08 or more Model VQZ200 VP300 VP500 VP700 Solenoid valve (Reference) Sonic conductance C [dm3/(sbar)]: 1.7 Sonic conductance C [dm3/(sbar)]: 4.2 Sonic conductance C [dm3/(sbar)]: 8.9 Sonic conductance C [dm3/(sbar)]: 15.3 791 C

70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-04 {Rc1/2} FGH200-04 {Rc1/2} FGH300-04 {Rc1/2} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100

Return 0.5 0.4 0.2 0 0 Out -0.2 -0.4 -0.5 -0.6 -0.8 0 25 50 75 -1 1 2 3 4 -1 100 5 Input signal % F.S.