Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: T (Power Saver), Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: 01 (Body Ported 1/8), Thread: T (NPTF
Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: T (Power Saver), Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Thread: T
Body Size: 20, Thread: Rc, Port: 02 (1/4), Option: G (Round Pressure Gauge w/Limit Indicator), Attachment: T (T-spacer), Semi-Standard 1: C (Bowl Guard), Semi-Standard 2: R (Flow Direction: Right->Left)
Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: T (Power Saver), Voltage: 5 (24VDC), Electrical Entry: MO (M Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: N11 (3/8" One touch Fitting), Thread: T (NPTF)
Body Size: 20, Thread: N (NPT), Port: 02 (1/4), Option: G (Round Pressure Gauge w/Limit Indicator), Attachment: T (T-spacer), Semi-Standard 1: Standard, Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F)
Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: T (Power Saver), Voltage: 5 (24VDC), Electrical Entry: MO (M Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: 01 (Body Ported 1/8), Thread: T (NPTF)
Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: T (Power Saver), Voltage: 6 (12VDC), Electrical Entry: M (M Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: N11 (3/8" One-touch Fitting), Thread: T (NPTF)
Function: 3 (3 Position Closed Center), Body Option: 20 (Body Ported/Individual Pilot EXH), Pilot: Internal Pilot, Voltage: 5 (24VDC), Lead Wire: T (Conduit Terminal), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: 02 (Base Mounted w/Sub-plate 1/4, Body Ported 1/4), Thread: T (NPTF)
Body Size: 20, Thread: Rc, Port: 02 (1/4), Option: G (Round Pressure Gauge w/Limit Indicator), Attachment: T (T Spacer), Semi-Standard 1: Standard, Semi-Standard 2: R (Flow Direction: Right->Left)
Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: T (Power Saver), Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style), A, B Port Size: N7 (1/4" One-touch Fitting
Precision Clean Regulator 40 60 80 100 120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate L/min (ANR) Flow rate L/min (ANR) SRP1101-01 Conditions/Inlet pressure: 0.5 MPa SRP1-01 Conditions/Inlet pressure: 0.7 MPa 0.25 0.50 0.20 0.40 Outlet pressure MPa Outlet pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate L/min (ANR) Flow rate L/min (
The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
7No.PF-OMO0004CN-E * () () CE 050 -8No.PF-OMO0004CN-E * 10 /23% 3 * OUT * 23 -9No.PF-OMO0004CN-E PFMB 7 A*8 201 2~200L/min 8 2 (11) S () C8 8(5/16") *6 02*1 Rc1/4 M SI*7 N02*1 NPT1/4 6 F02*1 G1/4*2 SI 1 2ISO1179-1 7:L/min :L 1 (11) L*3 3 OUT1 OU2 A NPN NPN B PNP PNP C NPN (1~5V) D NPN (4~20mA) E*4 PNP (1~5V) F*4 PNP (4~20mA) G*4 NPN *5 H*4 PNP *5 4 5 -10No.PF-OMO0004CN-E 1 W
used STX ETX ACK NAK ASCII code 30H 31H 32H 33H 34H 35H 36H 37H 38H 39H Number used 0 1 2 3 4 5 6 7 8 9 ASCII code 2DH 20H Number used SP Space Minus ASCII code 41H 42H 43H 44H 45H 46H 47H 48H 49H 4AH Character used A B C D E F G H I J ASCII code 4BH 4CH 4DH 4EH 4FH 50H 51H 52H 53H 54H Character used K L M N O P Q R S T ASCII code 55H 56H 57H 58H 59H 5AH Character used U V W X Y Z HEF002
58H 59H 5AH Character used U V W X Y Z INR-244-831 3-9 Troubleshooting 4 Troubleshooting The table below shows the solutions for the problems.
Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalLEFB25A300, 500, 600, 700, 800, 9001000, 1200, 1500, 1800, 2000248 to 20003,000o0.14850/20BeltLinear guide5 to 4090 or less (No condensation);4236Servo motor (24